Biennial Report 2022/2023

Tailored Surfaces

Members of the Board of Trustees Free State of Saxony, Ministry of State of Science and Art represented by RD’in Cathrin Liebner (Chairwoman) Federal Republic of Germany, Federal Ministry of Education and Research represented by Dr. Peter Zimmer Association of the Leibniz Institute of Surface Engineering (IOM) represented by Dr. Karsten Otte Independent Expert Prof. Dr. Christina Trautmann, GSI Helmholtzzentrum für Schwerionenforschung GmbH Members of the Scientific Advisory Board Prof. Dr. A. von Keudell (chairman) Ruhr-Universität Bochum Prof. Dr. Horst Hahn Karlsruher Institut für Technologie Prof. Dr. Bernd Herzog (until 12/2022) BASF Grenzach GmbH Grenzach-Wyhlen Dr. Helmut Rudigier CTO of Oerlikon, Pfäffikon, Switzerland Prof. Dr. Andrea A. Robitzki Karlsruher Institut für Technologie Dr. Maren Büchner Carl Zeiss SMT GmbH, Ulm Prof. Dr. Céline Croutxé-Barghorn University of Haute-Alsace (UHA), France Dr. Nicolas Schiller Fraunhofer FEP, Dresden Prof. Dr. Mathias Ulbricht Universität Duisburg-Essen Prof. Dr.-Ing. Thomas Mussenbrock (since 01/2023) Ruhr-Universität Bochum Dr. Ilia Valov (since 01/2023) Forschungszentrum Jülich GmbH

Contents 9 Preface 23 Scientific and Technology Results 24 Reports 24 26 28 30 32 33 34 36 38 39 40 42 43 44 45 46 Reactive ion beam smoothing and figuring of optical aluminum surfaces Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2 Laser-based precise surface engineering for functional metal surfaces A new hydrogen permeation measurement system for gas barrier materials under uniaxial mechani- cal strain for the green hydrogen economy UV-Imprinted microstructured polymer foils for biomedical disposables Surface and defect engineering of nanodiamonds for bioimaging applications Photocatalytic degradation of micropollutants by immobilized TiO2 on polymer membranes in a con- tinuous flow-through process Development of adsorptive polymer microfiltration membranes by electron beam irradiation Towards molecular ionic devices - synthesis ion soft-landing, and scanning probe microscopy on metallic surfaces Efficient molecular dynamics simulations of deep eutectic solvents with first-principles accuracy using machine learning interatomic potentials Development and test of a cost-efficient gridded ion thruster propulsion system for small satellites – IonJet Hertz Elektron Beam Lab – research infrastructure of the Leibniz Association: materials modification for sensing applications LIF spectroscopy for Xe ion VDF and neutral gas temperature measurements Examples of the supporting activities of the cross-sectional unit “Material Characterization and Ana- lytics” Pulsed laser deposition of GeTe-Sb2Te3 heterostructures on amorphous surfaces at room tempera- ture Characterization of EB-irradiated diamonds by IR microspectral imaging 49 Equipment for Research and Application 65 Personnel Activities 66 70 72 Graduation Committee Work Honors 75 Scientific Events 76 76 78 79 80 Scientific Meetings co-organized by IOM Institute Colloquia Lecture Series Seminar Series Structured Doctoral Training Program: „Surface Engineering“ 83 Publications and Presentations 84 98 101 101 113 118 Publications in Journals and Books Publications in Journals (not peer-reviewed) Presentations Talks Posters Patents

PREFACE Preface Preface The Leibniz Institute of Surface Engineering (IOM) is a member of the Leibniz Association. Its research focuses on engineering surfaces and thin films by ion beam, electron, photon (laser, UV radiation) and plasma techniques. The institute performs “application-oriented fundamental re- search” at the interesting and rewarding interface of fun- damental and applied research with the goal of creating modified surfaces and new materials in economically rele- vant technology fields. The years 2022/23 were marked by major institute events. First, 2022 was the year of the periodic “big” evaluation that Leibniz institutes undergo every seven years. The pre- vious evaluation, in 2015, called for a “strategic process” to develop a concept that includes greater topical focusing and closer collaboration between the two departments that existed at that time. The strategic process and resulting reforms started in 2020/21; they are now fully imple- mented. The evaluation, looking comprehensively at all as- pects of the institute, recognized the effort and com- mended the scientific and technical results. Overall, the in- stitute earned “very good to excellent” grades, a compli- ment to all who put a lot of effort into reaching these ac- complishments. Another major accomplishment was the development of a concept for a “strategic expansion” of the institute. A pro- posal was prepared and submitted to greatly expand the size, role, and integration of the cross-sectional unit “Mod- elling and Simulation”. It was proposed that a strong mod- elling pillar should strengthen the institute, which is known for its experimental and analytical capabilities. The pro- posed expansion includes the development of new meth- odological approaches to surface engineering and the ap- plication of artificial intelligence (AI). It turns out that we hit a nerve in this respect since AI approaches have be- come mainstream since the public release of novel AI tools in 2022 and 2023. We plan to closely cooperate with key AI players in Saxony such as the Leipzig AI Center, which will open in 2026. Our proposal, at the time of this writing, got excellent reviews and was approved by the GWK (“Ge- meinsame Wissenschaftskonferenz”), the conference of re- search and financial ministers, though still conditional on the country’s overall funding situation. The main research areas in 2022/23 included: Ultraprecision surfaces of the electronics and optics in- dustries Barrier coatings and precision thin films, primarily in the context of renewable energy Biocompatible and bioactive surfaces for biomedical applications Porous polymer membranes, primarily for filtration of water Investigation of beam-deposited, mass-selected, switchable molecules with possible application in mo- lecular electronics development of ion sources of improved lifetime, both for surface engineering and electric propulsion. Among the highlights of the reporting period were: The completion of the EU Horizon 2020 project “IT2 - IC Technology for the 2 nm node”, with 34 partners, with a total funding of 93.1 M€ (2020–2023); it con- tributes to the development of the 2-nm generation of microchips The development of a follow-up EU-project, the “10ACE project”, which pushes the boundaries of EUV lithogra- phy even further Membrane technology to selectively filter contamina- tion from water, in collaboration with companies that bring solutions to the real world of water treatment. In 2023, the IOM General Assembly (“Verein”) issued new, modernized statues (“Satzung”) in order to pave the way for organizational changes suggested by the recommenda- tion of the 2022 evaluation. Looking forward, the institute is implementing the recom- mendations of the 2022 evaluation and prepares for the Strategic Expansion, which is scheduled to start in 2025. The institute prepares to split its leadership into a Director of Science and a Director of Operations. This will address the increasingly extensive and sophisticated requirements of governance and compliance. The institute enjoys exten- sive systems of equipment, especially beam tools and an- alytical devices (such as XPS, TEM, SEM, AFM, TOF-SIMS, etc.), however, they need to be replaced over the next dec- ade by the next generation of equipment, ensuring the competitiveness of IOM at an international level for the years to come. Researchers at IOM continued to be engaged in educating the next generation of researchers, especially in the frame- work of IOM’s Structured Graduate Program. IOM renewed its formal certification as being “family-supportive” and fol- lows plans to increase its female staff at all levels. IOM would like to thank the Leibniz Association and all part- ners who supported its development. Special thanks go to the Board of Trustees, the Scientific Advisory Board, the Ministry of Science and Arts of the Free State of Saxony, and the Ministry of Education and Research of the Federal Government of Germany. Last but not least, I would like to thank the staff of the institute for their dedicated efforts and excellent contributions in the last two years. Leipzig, in Spring 2024 Prof. Dr. André Anders Director

PREFACE PRODUCTION OF THE IOM IMAGE FILM / In the spring of 2022, the film agency significant.picture was commissioned to produce an image film about the IOM. The aim was to provide a broad audience with an insight into the IOM's research priorities and laboratories, and to communicate them appropriately in the form of a short film. After completing the script and planning and organising the filming, several shoots were carried out at various IOM locations. The professionalism of the film crew and the dedication of the staff involved were outstanding. 30 YEARS OF IOM - ANNIVERSARY CELEBRATIONS IN LEIPZIG / The IOM celebrated its 30th anniversary in style. Representatives from the worlds of politics, science and business, as well as IOM's guests of honour, gathered in Leipzig on 29 June 2022 to look back on 30 years of work and look forward to the future. After a welcome address by IOM Director Prof André Anders, the Saxon State Minister for Science, Culture and Tourism, Sebastian Gemkow, opened the event with a message of appreciation for the IOM and its importance as a pillar of Saxony's scientific community. Clemens Schülke, Head of Economic Development for the City of Leipzig, also congratulated the organisation on its anniversary. The guests of honour and founding fathers Prof. Dr. Frieder Bigl (founding director and first director of the IOM from 1992-2000) and Prof. Dr. Reiner Mehnert (deputy director of the IOM from 1992-2005) as well as PD Dr. Axel Schindler (former group leader at the IOM) gave an impressive summary of the events and the courageous research spirit of the early years under the difficult conditions shortly after the reunification of Germany. Among the well-wishers were long-standing cooperation partners who gave scientific presentations on the expertise of the IOM and emphasised that the IOM, with its potential of renowned scientists and state-of-the-art equipment, is an important and reliable strategic partner both nationally and internationally.

PREFACE EVALUATION OF THE IOM / The IOM is jointly funded by the federal and state governments. In July 2022, the regular external evaluation examined whether the conditions for the joint funding of the Leibniz Institute, i.e. the supra-regional importance and the national science policy interest, continue to be met. The evaluation also provides valuable information on the areas in which, in the opinion of recognised independent experts, strengths and weaknesses lie and where there is particular potential for the further development of a Leibniz institution. In particular, experts assess the extent to which work in science and research is convincing and the extent to which the Leibniz institution has a coherent concept that brings together and further develops the individual activities. SAXON TRANSFER ROADSHOW AND DGMT REGULARS' TABLE AT THE IOM / At the event entitled "From basic research to spin-offs to competitive advantage", Dr Agnes Schulze, Head of the Surface Porous Membrane Filters Research Field at the IOM, Dr Alexander Braun, Managing Director of qCoat GmbH and Carsten Bachert, Managing Director of WTA Technologies GmbH, presented the background to their respective success stories. In the panel discussion that followed, the participants shared further experiences on the challenges of science-based spin-offs and answered questions from around 40 interested parties. The Transfer Roadshow was moderates by Marina Heimann, Managing Director of futureSAX GmbH. Final get-together in the IOM application centre was used for in-depth discussions and intensive networking. Afterwards, the members of the regulars' table of the German Society for Membrane Technology (DGMT) continued their dialogue with the aim of promoting membrane technology and its applications in Germany. CELEBRATION OF 30 YEARS OF LEIBNIZ INSTITUTES IN SAXONY / In 2022, the Leibniz Institutes in Saxony looked back on three decades of excellent research. The founding anniversary on 1 January 2022 was the occasion for a joint celebration event for the ten Leibniz Institutes currently based in Leipzig, Dresden and Görlitz in September 2022 at the International Congress Center Dresden. The institutes thanked the members of parliament and ministries for their reliable funding and helpful support for their work. In their welcoming speeches, Saxony's Minister President Michael Kretschmer, State Secretary Kornelia Haugg from the Federal Ministry of Education and Research, Science Minister Sebastian Gemkow, Leibniz President Prof. Dr Martina Brockmeier and the Lord Mayors of Dresden and Leipzig praised the achievements of the institutes and emphasised their importance for Saxony in particular.

PREFACE 1ST LEIPZIG FUTURE DAY / At the Future Festival in April 2023, everything revolved around the question: How do we want to live, work and play in Leipzig in 2030? The entire urban community was called upon to visualise ideas and concrete measures for a liveable, green and healthy city and to build Germany's first future forest as a symbolic sign of the urban community. In the Leipziger Passagen shopping centre, companies showcased their contribution to a sustainable and climate-neutral Leipzig. The IOM was also represented with a stand on the topic of "Removing micropollutants from water with functionalised membrane filters". EXCURSION OF THE IOM DOCTORAL STUDENTS TO THE FRAUNHOFER IMWS IN HALLE / The full-day excursion to the Fraunhofer Institute for Microstructure of Materials and Systems IMWS, initiated by the representatives of young scientists, took place as part of the Structured Doctoral Training Programme. The extensive programme of the host department for Optical Materials and Technologies offered the guests interesting insights, especially into the competence fields of "Materials and Components for Electronics" and "Optical Materials" as well as selected cooperation projects, with mutual exchange, in addition to a laboratory tour. PLASMA GERMANY VISITS THE IOM / The spring meeting of the PLASMA GERMANY Committee took place at the IOM in April 2023. The national network of experts discussed topics including the future of plasma technology. The IOM took part with a presentation on "Precision machining with plasma jets" from the "Ion beam and plasma jet-based ultra- precision surface figuring" working group. Prior to the meeting, the IOM offered guests the opportunity to visit the PlasmaLab and facilities for plasma jet-based ultra-precision machining.

PREFACE LONG NIGHT OF SCIENCE IN LEIPZIG / The Long Night of Science took place again in Leipzig on 23 June. The IOM also invited interested visitors to take a look "behind the scenes" at our institute and to talk to researchers about various research topics on site. To this end, there were two guided tours from 6 p.m. on the topics of "Recycled car parts for membrane filter production, protective suits for solar cells or insects and cells in detail" and "How do ion thrusters work? What does an ion beam have to do with the rainbow? Or how do you print molecules?". Prior to this, the IOM broadcast the opening lecture "About the Neanderthals and how they live on in us" by Nobel Prize winner Prof Dr Svante Pääbo live from the Paulinum at Leipzig University into the lecture hall. LASER WORLD OF PHOTONICS 2023 / LASER World of PHOTONICS is the world's leading trade fair in the photonics industry and took place from 27 - 30 June 2023 in Munich. The world's leading trade fair for photonics components, systems and applications attracts trade visitors and exhibitors from all over the world every two years. Members of the research group "Ultra-Precision Surfaces" represented the IOM at a booth and with a lecture at the Photonics Congress. More than 1,300 exhibitors presented their innovations and intensively exchanged information on the latest trends in photonics technology with each other and with the approximately 40,000 visitors. PUPILS FROM CARL-ZEISS-GYMNASIUM JENA ON AN EXCURSION AT THE IOM / In June 2023, pupils from Carl-Zeiss-Gymnasium Jena visited the IOM as part of a study trip. The excursion was intended to familiarise the visitors with applications of physics in research, industry and technology and also serve as orientation for their later choice of studies and career. The eleventh- graders were particularly interested in the mathematical and scientific areas. The guests were introduced to ion sources and engines, laser processing, atomic force microscopy (AFM), ion beam-assisted structuring and smoothing (RIBE) and scanning electron microscopy (ESEM).

PREFACE MEETING OF THE LEIBNIZ ASSOCIATION'S IT WORKING GROUP AT THE IOM / This year, the Leibniz Institute of Surface Engineering (IOM) hosted the 60th meeting, which took place from 09 to 10 November 2023 at the IOM in Leipzig and was opened with a welcome address by Prof. Anders, Director of the IOM. It was a very successful meeting for the approximately 60 participants, as the topics were diverse, there were constructive discussions and a lively exchange of opinions as well as different perspectives with new approaches to the often identical main topics. In addition, the guests had the opportunity to take part in a guided tour of the IOM to gain an insight into the various areas of work and expertise. 19TH INTERNATIONAL CONFERENCE ON REACTIVE SPUTTER DEPOSITION (RSD 2023) AT THE IOM IN LEIPZIG / This year, the RSD conference and accompanying trade exhibition took place from 12 to 13 December at the Leibniz Institute for Surface Engineering (IOM) in Leipzig. The continuation of the successful series of conferences on reactive sputter deposition has provided an excellent platform for years to discuss the latest trends and their implementation in new technologies and innovative products. Equipment, products and services from a large number of interesting companies were presented at the accompanying trade exhibition. The day before the conference, a workshop for students and young scientists on reactive sputter deposition was held, led by Prof. Diederik Depla, the "father" of RSD. This year there were about 80 visitors, mainly from Europe but also from Korea and Japan.

PREFACE COMPATIBILITY OF CAREER AND PERSONAL LIFE / The years 2022/2023 continued to be characterized in part by the Covid-19 pandemic. In 2023, the sickness rate in Germany was at a record level for the second year in a row. Respiratory illnesses such as colds, bronchitis and flu were the main reason for the high incidence. Parents with children are increasingly affected, partly because caring for sick children increases the number of missed working days and may have drawbacks for individual careers. The already at the IOM implemented mobile working and technical infrastructure (laptops, VPN access) allowed partly an adjustment to the situation. Individual adaptions and regulations to the situation for parents helped to master the difficult times. within the certification The regular implementation for a better work and personal life balance at the IOM are regularly assessed and implemented process “auditberufundfamilie” (“audit work and family”). In 2023, an institute-wide survey on improving the compatibility of work and family life was conducted. Flexible working time, a parents child room, the organization of meetings and scientific colloquia within core working hours and in a digital format (online meetings), promotion of individual activities to maintain health (e.g. sporting activities, city cycling, company run, health day), different part-time models, individualized support in challenging family situations, as well as support of families during working times in other countries are examples for improving the work and personal life at the IOM. Employees who can successfully balance work and personal life are the most valuable asset for the success of the IOM. / The IOM received confirmation of the audit berufundfamilie certificate from the board of trustees of berufundfamilie Service GmbH on 10 December 2023. This is the second time that the IOM has been awarded the certificate in recognition of its long- term, sustainable, family- and life-phase-conscious human resources policy. The berufundfamilie audit certificate is a seal of quality for a strategically organised work-life balance policy. Prior to this, the institute successfully completed the dialogue procedure for the audit, which is open to employers who have been pursuing a strategic family and life-phase-conscious HR policy for at least nine years with the audit. The IOM was first awarded the audit certificate in 2011. After 2 re-audits, the second dialogue process has now followed.

Scientific and Technology Results Reports

ULTRA-PRECISION SURFACES REPORTS measurements using multiple magnifications at identi- cal spots at the surface. Combined isotropic power spectral density (PSD) functions were determined from the roughness measurements to investigate the occur- rence of features at different spatial frequencies. Investigations of topography development depending on material removal depth using N2 as process gas at 0° ion incidence show a successive increase in rough- ness, mainly caused by the development of etch pits. Partly, protruding particles referred to as Al6MnFe are transferred to pits, that coalesce into larger holes, while Mg containing precipitates form new peaks. Figure 2 a) shows roughness parameters Sq, Spk, and Svk, which indicate RMS roughness, mean peak height and mean valley height, respectively. The Spk value rises slightly while the Svk value rises significantly. This corre- sponds with the exposure of some precipitates while other precipitates, which show preferential etching, are forming pits. As pitting is more distinct, the increase of Svk is more pronounced than the increase of Spk. In the case of CF4 processing a significant reduction in mean peak height and roughness can be achieved as the bulk material is only etched 8 nm, as shown in Fig- ure 2b). Etch selectivity S indicates the ratio of etch ve- locity of protruding Mg containing precipitations with re- spect to the etch velocity of the surrounding Al surface. During the initial ion attack the peaks are etched 7 times faster than the aluminum matrix. For deeper etching, Sq and Spk gradually increase, which is mainly due to the increase of the peak heights. New precipitates are exposed from the bulk material. Once the precipitate is fully removed, the etch rate of the bulk material applies and S approaches a value of 1. How- ever, due to the previous masking effect of the precip- itates, peaks remain in place. Figure 3: Roughness decrease at 80° ion incidence angle: surface roughness Sq compared to initial state. 25 Figure 4: Figure error before and after ion beam figuring process on RSA 6061 using O2 RIBE processing. Further investigations have been conducted at ion in- cidence angles ranging from 20° to 80°. It was shown that in the spatial frequency range >1 µm-1 a smoothing effect can be observed. Depending on the initial Sq value a reduction in roughness between 10% and 70% can be achieved (see Figure 3). In addition, investigations regarding surface figure er- ror correction targeting spatial wavelengths >5 mm have been performed on another commonly used alu- minum alloy (RSA 6061) sample. Modifications of the aperture geometry and voltage polarity of the ion beam source resulted in a near Gaussian ion beam current density distribution of 2.6 mm FWHM at an ion energy of 2.8 keV. For this experiment an O2 RIBE process was used. The obtained figure error reduction is shown in Figure 4. Analysis of the micro-roughness before and after ion irradiation at different positions on the processed sur- face showed no significant increase in roughness. However, the preparation of small holes and peaks with lateral extensions between 50 nm and 100 nm could be observed in AFM images. It still needs to be clarified to what extent these struc- tures contribute to light scattering in the UV/VIS range and how this can be avoided if necessary. Acknowledgements The authors gratefully acknowledge funding from DFG (Deutsche Forschungsgemeinschaft) grant No. 452333040. Literature [1] F. Hölzel, D. Rolón, J. Bauer, J. Kober, S. Kühne, F. Pietag, D. Oberschmidt, T. Arnold, Surf. Interfaces 38 (2023) 102784, DOI: 10.1016/j.surfin.2023.102784 [2] J. Kober, D. Rolón, F. Hölzel, S. Kühne, D. Oberschmidt, T. Arnold, Results Eng. 17 (2023) 100793, DOI: 10.1016/j.rineng.2022.100793

ULTRA-PRECISION SURFACES REPORTS Figure 3: Selectivity in dependence of different ion source configu- rations (1: with contact; 2: without contact between cathode and dis- charge vessel; a-c: different magnetic setups) at 150 V discharge voltage, 700 V beam voltage, 70 mA beam current, 1.65 scccm CHF3 + 2.35 sccm O2. As already mentioned, the process parameters also have an influence on the composition of the ion beam and thus on the selectivity Figure 5 shows the relative intensity of different ions and the resulting etching se- lectivity of SiO2 and Si to the photoresist AZ1505 as a function of the ion beam current. A higher extracted ion beam current requires a higher plasma density, which is achieved by a higher filament heating current. This leads to an enhanced consumption of O2+-ions due to a reaction with the graphite discharge vessel to CO+. The lower O2+ amount in the ion beam reduces the re- moval rate of the photoresist and thus increases the selectivity. The influence of the configuration of the ion source is also evident here. This dependence on the amount of oxygen also explains the decreasing selec- tivity with longer operating times. The increasing de- posits in the ion source suppress the reaction of graph- ite with oxygen, so that more oxygen is found in the ion beam, which increases the removal rate of the photo- resist and thus reduces the selectivity. These results Figure 4: Drift of the main ion energy measured for m/z = 51 amu + (4.0 sccm CHF3; beam current: 70 mA) at different ion source CHF2 setups (red: with contact; black: without contact between cathode and discharge vessel at similar magnetic field setup. 27 Figure 5: (a) Relative intensity of different ions in dependence of the ion beam current and (b) resulting selectivity of SiO2/AZ1505 and Si/AZ1505 (open symbols: with contact; closed symbols: without contact between cathode and discharge vessel at similar magnetic field setup). serve as a reference and starting point for the develop- ment of a new competitive broad beam ion source at NTG Neue Technologien GmbH & Co. KG, to over- come the disadvantages of this Kaufman-type ion source, such as the reduced cycle time due to the fre- quent need to change filaments and performance vari- ations due to process- and ion source specific deposits in the ion source. Acknowledgements The authors want to acknowledge Toni Liebeskind for the preparation of samples for etching experiments. This project was supported by the Federal Ministry for Economic Affairs and Climate Action (BMWK) based on a decision by the German Bundestag. Literature [1] Finzel, F. Koch, G. Dornberg, D. Lehr, F. Frost, T. Glaser, Opt. Eng. 58 (2019) 092614. [2] M. Ulitschka, J. Bauer, G. Dornberg, F. Frost, and T. Arnold, Opt. Eng. 59 (2020) 035108. [3] G. Dornberg, E. Rohkamm, P. Birtel, F. Scholze, F. Frost, J. Vac. Sci. Technol. A 41 (2023) 053104.

ULTRA-PRECISION SURFACES REPORTS a) b) x a m  2.2 2.0 1.8 1.6 1.4 1.2 1.0 0.8 untreated copper 500 1000 1500 2000 2500 3000 0 accumulated laser fluence acc [J/cm²] Figure 2: (a) Secondary electron yield (SEY) of unprocessed and laser-nanostructured copper surfaces ( = 355 nm, tp = 12 ps, acc = 6.5 kJ/cm²). The inset shows an optical photograph of a laser-pro- cessed copper sample (black area) and an SEM image revealing the surface morphology. (b) Maximum secondary electron yield max in dependence on the accumulated laser fluence ( = 1064 nm, P = 14.8 W, v = 10-100 mm/s, y = 50 µm, tp = 12 ps). in case of wear increased when increasing the dimple depth as shown in Fig. 1b [2]. Interestingly, a subse- quent laser texturing of such areal-functionalized sur- faces can be implemented to locally transform the sur- face wetting state to hydrophilic. This selective micro- patterning of the wettability allows exciting fluidic appli- cations. In collaboration with CERN, the nanostructur- ing of copper surfaces by ultrashort pulse laser abla- tion was investigated with the goal of reducing the sec- ondary electron yield (SEY). This effect can be utilised to solve the existing problem of electron cloud for- mation in modern hadron accelerators. When the high energy particle beam interacts with residual gas mole- cules inside of the copper-coated tube as well as due to the presence of synchrotron radiation, electrons are excited, accelerated and then collide with the vacuum chamber walls, thus leading the emission of additional secondary electrons for high-SEY surfaces, cascading to a high electron density. These electron clouds re- duce the performance of accelerators and must be mit- igated. The fundamental research conducted at IOM contributes to overcome this technical limitation by la- ser-functionalization of the copper screen surfaces. Like for the stainless-steel, laser processing of copper results in the formation of various nanostructures rang- ing from LIPSS (laser-induced periodic surface struc- tures) to agglomerated nanoparticles. The resulting surface structures are mainly dependent on the accu- mulated laser fluence acc. At high acc, compact cau- liflower head-like nanostructures (see SEM image in Figure 2a) are formed independent of the used laser wavelength (from 343 nm to 1064 nm) [3-5]. Especially this type of surface nanostructures exhibits a very low SEY. The reduction of the SEY of copper by laser pro- cessing in comparison to an unprocessed Cu surface is also shown in Fig. 2a. The laser processing reduces the maximum SEY from 2.2 down to 0.7. The achieved SEY characteristics are sufficient to mitigate the for- mation of electron clouds in particle accelerators, since for max < 1 no amplification occurs. In Figure 2b, the influence of the accumulated laser fluence via variation of scanning speed on the maximum SEY max is shown for surface processing with an IR ps-laser. The max de- creased with increasing accumulated laser fluence and decreasing scanning speed, respectively. The laser-in- duced nanostructures also cause significant reduction of the optical reflectivity (see photograph in Fig. 2a) since they provide efficient light trapping nanostruc- tures. In conclusion, laser processing with ultra-short pulses is a precise, versatile tool for micropatterning and nanostructuring of metal surfaces to realize ex- traordinary, tailored surface properties. The subse- quent chemical modification of laser-processed metals can complete the adjustment of macroscopic proper- ties to the needs of real-world applications. The direct writing capabilities of lasers for micropatterning the wettability are currently under investigation to pave the way for laser-based surface engineering of a wide range of wetting-related applications. in frame of Acknowledgements This work was supported in parts by Europäische Fonds für regionale Entwicklung (EFRE) and the Freistaat Sachsen the contract Nr. 100387051. (*) Furthermore, we acknowledge Gregor Hommes and Sebastian Peter from the SKAN Deutschland GmbH for scientific discussions and technical support in the field of functionalized stainless-steel surfaces. (**) We would like to thank Dr. Roy Morgenstern and Prof. Dr. Thomas Lampke from the University of Tech- nology Chemnitz for their scientific support, i.e. for car- rying out wear tests on functionalized stainless-steel surfaces. Literature [1] P. Lorenz, J. Zajadacz, J. Bauer, M. Ehrhard, G. Hommes, S. Peter, K. Zimmer, Surfaces and Interfaces 37 (2023) 102685. [2] P. Lorenz, J. Zajadacz, L. Streisel, M. Ehrhardt, R. Morgen- stern, T. Lampke, G. Hommes, S. Peter, K. Zimmer, Phys. Sta- tus Solidi A (2024) 2300482. [3] E. Bez, M. Himmerlich, P. Lorenz, M. Ehrhardt, A. G. Gunn, S. Pfeiffer, M. Rimoldi, M. Taborelli, K. Zimmer, P. Chiggiato, A. Anders, J. Appl. Phys. 133 (2023) 035303. [4] P. Lorenz, E. Bez, M. Himmerlich, M. Ehrhardt, M. Taborelli, K. Zimmer, J of Laser Micro/Nanoengineering 18 (2023) (3) 121. [5] P. Lorenz, M. Himmerlich, M. Ehrhardt, E. Bez, K. Bogdawicz, M. Taborelli, K. Zimmer, Lasers Manuf. Mat. Process. 9 (2022)13. 29

BARRIER AND PRECISION COATINGS REPORTS gas method. The investigated samples were SiOx gas barrier films prepared by UV photoconversion of perhy- dropolysilazane (PHPS) on a polyethylenterephthalate (PET) substrate (for film preparation details see e.g. [3]). The photochemically initiated conversion reaction of the precursor films into dense SiOx thin films was performed using the roll-to-roll deposition equipment at the IOM. 6 5 4 3 2 1 0 Figure 3: Exemplary measurement of a SiOx gas barrier thin film on PET foil material obtained with the carrier gas method at room tem- perature. As an example, a measurement of hydrogen permeat- ing through a SiOx gas barrier film prepared on PET foil is shown in Fig. 3 for the case of the carrier gas method. The obtained measurement curve is typical, characterized by the breakthrough time, i.e. the time required for hydrogen to pass through the sample, as well as by the saturation level of the hydrogen concen- tration measurement signal which corresponds to the stable final hydrogen permeation rate of the investi- gated sample. The hydrogen permeation measurement system de- scribed in this report will act as an important building block in the ongoing research on gas barrier films at the IOM and the obtained results will contribute to the growing research aiming for a future hydrogen econ- omy in Saxony and beyond. Acknowledgements Funding by the Sächsisches Staatsministerium für Wissenschaft, Kultur und Tourismus (SMWK), Ger- many is greatly acknowledged („Dehnbare Gassperr- schichten für die Umsetzung der Grünen Wasserstoff- wirtschaft“, FKZ: 100611543). Kategorie 1 Kategorie 2 Kategorie 3 Kategorie 4 Datenreihe 1 Datenreihe 2 Datenreihe 3 Figure 2: Schematic of the principle of the different hydrogen per- meation measurement modes: (a) pressure difference method (pressure increase method) (b) carrier gas method with hydrogen selective trace analysis device (c) measurement of sample under uniaxial mechanical strain with carrier gas method. Literature [1] V. Nemanic, Nucl. Mater. Energy 19 (2019) 451. [2] M. Wetegrove, M.J. Duarte, K. Taube, M. Rohloff, H. Gopalan, C. Scheu, G. Dehm, A. Kruth, Hydrogen 4 (2023) 307. [3] P.C. With, U. Helmstedt, L. Prager, Front. Mater. 7 (2020) 200. [4] F. Herbst, S. Großer, P.C. With, L. Prager, M. Pander, Packag. Technol. Sci. 34 (2021) 497. 31

BIOCOMPATIBLE AND BIOACTIVE SURFACES REPORTS Surface and defect engineering of nanodiamonds for bioimaging applications C. Laube, W. Knolle in collaboration with T. Wanek, S. Mairinger, T. Filip, C Kuntner, Preclinical Molecular Imaging, AIT Austrian Institute of Technology GmbH, Austria, M. Raabe, N. A. Alam, L. Xu, T. Weil, Max Planck Institute for Polymer Research, Synthesis of Macromolecules, Germany, V. Rasche, Core Facility Small Animal Imaging, Ulm University, Germany, G. Winter, Department of Nuclear Medicine, Ulm University Medical Center, Germany Nanodiamonds (NDs) represent a new class of na- nomaterial, which gained increasing interest in multi- ple applications such as quantum sensing, magne- tometry, and medical imaging. For these applica- tions, the exact tailoring of the surface functionality and the engineering of single atom-based color cen- ters inside the diamond are of great importance. For example, for quantum sensing applications based on nitrogen vacancy (NV) centers in nanodiamonds, it is necessary to adjust their optical properties, such as the fluorescence lifetime, as precisely as possible, while the surface of the nanodiamond remains un- changed. This was achieved through an innovative new approach using electron beam irradiation with a 10 MeV electron accelerator (Mevex Corp.). The ap- proach specifically creates vacancy defects in addi- tion to the existing NV centers inside the nanodia- mond. These defects act as luminescence quench- ers for the NV center. This was achieved by generat- ing defects in a controlled, quantitative way using de- fined irradiation fluences, which lead to tailored opti- cal properties of the NV centers. In addition to the high sensory application potential, the approach also enables other applications, for example, the use of fluorescence-tailored nanodiamonds as biomarkers or as innovative data storage media. For the latter, we demonstrated and discussed a novel concept for long-term storage using NV centers inside nanodia- monds. Using the tailored fluorescence lifetime of the NV center to code the information we achieved a “be- yond binary” data storage density per bit (see figure 1). We also observed that this process is reversible by heating the sample or the spot of information. This proof of principle confirmed that this technique could be a promising alternative data storage technology, especially in terms of long-term storage due to the high stability of the involved color centers. Beyond the defect engineering, the modification of the nanodiamonds´ surface is a key factor for their applicability regarding bio-imaging or drug delivery applications. In a joint project with partners from Uni- versity Ulm, the University Vienna, and the Max- Planck Institute for Polymer Research, we were able to demonstrate the suitability of surface modified 33 Figure 1: Control of the NV- center luminescence lifetime inside nanodiamonds by inserting additional vacancy defect center.1 Figure 2: Surface modification of nanodiamonds targeting ad- vanced 68Ga based PET imaging.2 nanodiamonds for bio-imaging. Therefore, pre-mod- ified nanodiamonds were functionalized with albu- min-derived copolymer ligands. The so-modified nanodiamonds were applied as multi-modal target- ing probes able to bind imaging relevant 68Ga iso- topes (see figure 2). Using positron emission tomog- raphy (PET) imaging, the biokinetics and biodistribu- tion of the 68Ga-radiolabelled NDs were studied and evaluated in vivo in AR42J tumor-bearing CD1 mice. The results illustrate the accumulation of the nanodi- amonds in the liver and spleen. The results indicate the good biocompatibility of the nanodiamonds but also the need of further enhancement of the surface modification in order to achieve a higher level of tu- mor addressing. Acknowledgements We want to acknowledge Prof. Bernd Abel for provid- ing infrastructure, required for the presented studies. Literature [1] Laube, C. et. al.; ACS Nano 2023, 17 (16), 15401-15410. [2] Wanek et. al.; Nuclear Medicine and Biology 2023, 116-117, 108310.

SURFACES OF POROUS MEMBRANE FILTERS REPORTS relevant to environmental ways. The application of the catalysts in suspension gains high surface area per unit volume (especially with nanosized particles) but their efficient recovery and recycling is another challenge. Nanoparticle im- mobilization on a support material (i.e. polymer mem- branes [2]) makes continuous operation of the waste streams possible and nanoparticles do not have to be recovered from the stream. But surface area to volume, light illumination and mass transfer is lim- ited. Hence, a flow-through photocatalytic membrane reactor (PMR) concept, where the photocatalyst in form of nanoparticles is immobilized on the inner wall of a porous membrane was investigated [3]. The con- fined space in the pores and on the surface of the membrane is beneficial to facilitate close contact of the radicals with the small sized micropollutants. The research was conducted at a micropollutant concen- tration conditions (100 ng L-1) including four different steroid hormones (17β-estradiol E2, estrone E1, progesterone P, tes- tosterone T and 17-α-ethynyl estradiol EE2), aiming to attain the stringent 1 ng L-1 drinking water guide- line, which has proven to be a challenging yet signif- icant endeavor. The underlying mechanisms in- volved in degrading steroid hormones at such mini- mal concentrations within a single-pass flow-through PMR with TiO2 immobilized on a polyethersulfone PES [1] and polyvinylidenfluoride PVDF [4] microfil- tration membranes was conducted looking at the fac- tors that limit the rate of degradation under various operational conditions (such as water flux, light inten- sity, and temperature), solution chemistry parame- ters (including feed concentration, pH, and types of steroid hormones), and membrane characteristics (such as surface titanium content, homogeneity of TiO2 nanoparticles, and pore size of the membrane). Enhancing the water flux (thus reducing hydraulic residence time) led to an increase in the degradation rate while the removal rate decreased [1, 4]. The lin- ear rate below 900 L m-2 h-1 indicates that the photocatalytic degra- dation kinetics regime is primarily influenced by the molar flux and mass transfer of the E2 molecule to the photocatalyst surface [4]. With increased light in- tensity, the degradation rate of estradiol rises at lower light intensities (up to 10 mW cm-2 [4] and 20 mW cm-2 [1]) due to increased formation of reac- tive oxygen species indicating that at lower light in- tensities, the reaction is constrained by the quantity of photons and the resultant generation of ROS. At high light intensities, the degradation rate plateaued, likely due to limitations in reaction, potentially stem- ming from TiO2 surface or E2 availability [1, 4]. Ele- vating the temperature above 40 °C resulted in a de- cline in degradation rate for TiO2 immobilized on a increase of the degradation PVDF membrane [4] while degradation rate de- creased over the whole temperature range from 10 to 62 °C for TiO2 on the PES membrane [1], possibly due to reduced estradiol adsorption and dissolved O2 concentration, disregarding any temperature-related impacts on ROS generation. An increase in estradiol degradation rate was observed with rising feed con- centration from 0.05 to 1000 μg L-1, without reaching a surface-reaction-limited or ROS-formation-limited regime. This suggests that the quantity of reaction centers (or the level of reactive oxygen) are no limit- ing factors [1, 4]. Looking at different steroid hor- mones, the removal efficiency of T was lower com- pared to E1, E2, and P. No competition for degrada- tion among the four steroid hormones was observed when present in a mixture [1, 4]. The primary con- straint identified was the surface Ti content. An in- crease in surface Ti content from 4% to 6.5% proved advantageous for E2 removal and degradation rate, with the threshold value for surface Ti content esti- mated at around 5% [4]. The apparent degradation kinetics remained unaffected by the depth of TiO2 penetration within the membrane. Decreasing the membrane pore size from 0.45 to 0.1 μm did not lead to improved E2 degradation, as mass transfer within this pore size range had minimal impact [4]. Optimized conditions yielded a permeate concentra- tion of E2 at 3.5 ± 2.8 ng L-1 (corresponding to 96% removal, limit of quantification is at 3.8 ng L-1) [4]. The PMR system is a promising technology to achieve high micropollutant removal at high permea- bility (throughput) without the generation of a con- centrate (toxic waste). Acknowledgements The financial support by the Federal State of Ger- many and the Free State of Saxony is gratefully acknowledged. The Helmholtz Association is thanked for Recruitment Initiative funding, as well as the Bundesministerium für Bildung und Forschung (BMBF) project NEMWARE, Deutscher Akad- emischer Austauschdienst (DAAD) provided a PhD stipendium to S. Lotfi. Literature [1] S. Lotfi, K. Fischer, A. Schulze, A.I. Schäfer, Nature Nano- technology 17 (4) (2022) 417-423. [2] K. Fischer, P. Schulz, I. Atanasov, A. Abdul Latif, I. Thomas, M. Kühnert, A. Prager, J. Griebel, A. Schulze Catalysts 8 (2018) 376. [3] C. Regmi, S. Lotfi, J.C. Espíndola, K. Fischer, A. Schulze, A.I. Schäfer Catalysts 10 (2020) 725. [4] S. Liu, E. Véron, S. Lotfi, K. Fischer, A. Schulze, A.I. Schäfer Journal of Hazardous Materials 447 (2023) 130832. 35

SURFACES OF POROUS MEMBRANE FILTERS REPORTS Figure 2: Composite PES membranes incorporating DVB particles used for dynamic adsorption of various EDCs from water [2]. membrane scaffold to enhance adsorption perfor- mance, durability, and sustainability for practical wa- ter treatment applications. Figure 2 shows the struc- ture of the composite PES membrane containing DVB particles and the intended application. In the third approach, molecularly imprinted polymer (MIP) particles specifically designed with E2 as the template molecule were synthesized via precipitation polymerization. These MIP particles were then inte- grated into the membrane scaffold, forming compo- site membranes [3]. Figure 3 shows the composite imprinted membrane structure. This integration re- sulted in composite membranes with notable adsorp- tion efficiency and selectivity towards the target mol- ecule, E2. This selectivity was demonstrated by se- lectivity factors of 6.2 and 12.5 for E2 when tested alongside model micropollutants like BPA and cital- opram, respectively. The removal capacity of both membranes for E2 was studied using adsorption iso- therms. The adsorption data obtained for the im- printed composite membranes fit well with the Lang- muir model, suggesting that monolayer recognition sites were evenly distributed on the membrane's sur- face and that E2 was adsorbed through monolayer Figure 3: Composite membrane integrated with MIP particles [3] This image has been selected for display on the front cover of the journal Materials Chemistry Frontiers (Issue 19, 2023). Figure 4: Experimental data fitted with Langmuir (Top) and Freun- dlich (bottom) isotherms regarding the adsorption of E2 on com- posite PES membranes [3]. adsorption onto these sites. Figure 4 illustrates the adsorption isotherm models. Additionally, the composite membranes displayed exceptional reusability, maintaining high adsorption efficiency over 10 successive cycles with an interme- diate washing step. This reusability enhances the practicality and sustainability of the developed com- posite membranes for water treatment applications. In conclusion, various successful methods for modi- fying membranes through electron beam irradiation have been identified, each offering distinct ad- vantages. The selection of the most appropriate method depends on specific objectives. When deal- ing with low initial concentrations of EDCs, modifying the membranes with urethane functional groups proves to be a practical choice. Conversely, for ef- fectively adsorbing a wide range of EDCs at high concentrations, composite membranes incorporating adsorber particles exhibit significant advantages. Fi- nally, when the goal is the selective removal of a par- ticular pollutant at elevated concentrations, integrat- ing MIP particles into the membranes emerges as the optimal option. These insights provide valuable guidance for tailoring membrane modification strate- gies to suit particular water treatment needs. Literature [1]. Z. Niavarani, D. Breite, M. Yasir, V. Sedlarik, A. Prager, N. Schönherr, B. Abel, R. Gläser and A. Schulze, Frontiers of Environmental Science & Engineering, 2023, 18, 45. [2]. Z. Niavarani, D. Breite, B. Ulutaş, A. Prager, K. Ömer, B. Abel, R. Gläser and A. Schulze, RSC Advances, 2023, 13, 32928- 32938. [3]. Z. Niavarani, D. Breite, A. Prager, I. Thomas, M. Kuehnert, B. Abel, R. Gläser and A. Schulze, Materials Chemistry Fron- tiers, 2023, 7, 4460-4472. 37

MODELLING AND SIMULATION REPORTS Efficient molecular dynamics simulations of deep eutectic solvents with first-principles accuracy using machine learning interatomic potentials O. Shayestehpour, S. Zahn Deep eutectic solvents (DES) are an emerging class of compounds characterized by melting points signif- icantly lower than their individual components. They have many desirable characteristics such as low va- por pressure, thermal stability, and tunable proper- ties, which makes them suitable candidates as room temperature solvents and electrolytes. Preparation of novel DESs from many potential com- ponents and a wide range of compositions is a chal- lenging task. In this context, computer modeling and molecular simulations are valuable complements to experiments, providing insights to the nature of inter- actions at the atomic scale and the connections be- tween structure and functionality [1]. In recent years, a data-driven approach to the devel- opment of interatomic potentials for molecular dy- namics (MD) simulations has emerged in the context of machine learning (ML). In this approach, the par- ametrization of an interatomic potential is regarded as a regression problem, where a set of inputs such as atomic coordinates are mapped to a set of outputs such as energies and atomic forces. Hence, ML in- teratomic potentials (MLIP), trained on data from ac- curate electronic structure methods, aim to approxi- mate a potential energy surface (PES) with the target accuracy at significantly improved computational ef- ficiency. In our recent work [2], we utilized the Deep Potential (DP) model [3], an end-to-end deep neural network representation of a PES, to train a MLIP for a eutectic mixture of choline chloride (ChCl) and urea (reline). Our primary training dataset is built based on atomic configurations sampled using density functional based tight-binding (DFTB) simulations, for a system containing 8 ChCl and 16 urea molecules. The sam- pled structures are subsequently labeled with energy and atomic forces using our target DFT method. To reduce the computational cost of the reference data generation and to ensure that the training dataset is representative of the relevant parts of the PES, we used an iterative active learning (AL) scheme based on uncertainty estimates from an ensemble of trained models to efficiently explore the under-represented regions of the configuration space in the primary da- taset. We consider the use of an AL approach as an important step for the construction of a robust MLIP. MD simulations were carried out for a mixture of 64 ChCl and 128 urea molecules. The obtained struc- tural and dynamical properties of reline from our MD 39 Figure 1: Radial distribution functions (RDF) from a first-princi- ples MD (FPMD) reference are compared to RDFs from MD sim- ulations using our MLIP. simulations are in good agreement with the results from first-principles simulations and experiments (fig- ure 1). Additionally, we showed that for a reliable investiga- tion of dynamical properties, such as diffusion coeffi- cients, a larger number of simulation runs are re- quired. Considering the size and time scale of the performed simulations, MLIPs enable this type of analysis that otherwise are not accessible by the first-principles methods. Follow up studies will focus on development of MLIPs based on equivariant atomic representations which are considerably more data-efficient and will further reduce the computational cost of these ML approaches. Additionally, the approach will be em- ployed to study hydrogen diffusion in gas permeation barrier coatings. Acknowledgements S. Zahn thanks the German Research Foundation (DFG) for financial support (ZA 606/8-1). Computa- tional time from the Center for Information Services and High-Performance Computing (ZIH) of TU Dres- den is gratefully acknowledged. Literature [1] O. Shayestehpour, S. Zahn, J. Phys. Chem. B 2022, 126, 18, 3439–3449. [2] O. Shayestehpour, S. Zahn, J. Chem. Theory Comput. 2023, [3] H. Wang, L. Zhang, J. Han, Comput. Phys. Commun. 2018, 19, 23, 8732–8742. 228, 178−184.

TOOLS REPORTS Figure 2: The gridded ion thruster with integrated neutralizer in oper- ation (taken from [1]). saves space and reduces power losses as well as overall complexity of the propulsion system. The IonJet flow control subsystem was designed in consideration of the MICROJET main assemblies FCU and FDU. In the development process, the design re- quirements and interfaces of all main assemblies were iterated between AI and IOM and a dedicated mathe- matical simulation model was developed for the entire IonJet flow control subsystem. In the design process of the PSCU, care was taken to ensure that it can control the entire IonJet EM. To characterize the operation and performance of the newly designed ion thruster, it was installed together with the PPU in a vacuum test chamber at IOM. The Xe gas was provided by a conventional mass flow con- troller in this test campaign with total volumetric flows for ion thruster and neutralizer between 1.29 sccm and 1.58 sccm. Various ignition procedures were investi- gated to determine the optimum setting for the gas flow and gas peak. The performance tests of the thruster subsystem were carried out using two grid configurations: (i) an unre- stricted grid system with 237 grid holes and (ii) a re- stricted grid system with only 114 grid holes. The ex- perimental values of the beam current as function of the RF power were found to be in good agreement with the simulations. For the unrestricted grid system thrusts well in excess of 1 mN have been achieved in- dicating potential for miniaturization of the thruster if 1 mN maximum thrust is envisaged. This also allows re- ducing the number of grid holes and the gas consump- tion and increasing the specific impulse. With the engi- neering model, Isp values up to 1100 s were demon- strated. The mass efficiencies ranged between 0.15 and 0.22 for RF powers between 6 W and 14 W. Ne- glecting losses in the power supplies, the thrust to power ratio ranged between 0.030 and 0.036 mN per Watt. As the last step of testing the IonJet EM, the flow con- trol subsystem and the thruster subsystem were inte- grated to the IonJet EM (see Fig. 3). The whole system was mounted in a vacuum chamber at IOM and the Xe Figure 3: Image of the IonJet EM. The dimensions in centimeters are length × width × height = 33 × 33 × 20. (taken from [1]) flow rates were optimized for thruster operation and gas peak. Afterwards, the thruster was successfully ig- nited several times and stable operation of the IonJet EM was demonstrated, including a refilling of the ple- num by the FCU under thruster operation. Currently, in the next phase, funded by the DLR, an engineering qualification model (EQM) of IonJet called IonJet-Evo is developed and tested by IOM and Aero- space Innovation GmbH. The overall size and weight of the system will be significantly reduced, compatible with the Cubesat specifications for the 6U-16U-format while maintaining or improving the performance fig- ures. Acknowledgements The authors gratefully acknowledge financial support from Deutsches Zentrum für Luft- und Raumfahrt (DLR) through grants BMWi 50RK1914 and 50RK1915 (Bundesministerium für Wirtschaft und Energie). We are greatly indebted to M. Müller as well as F. Hager and S. Daum from the workshop of IOM for the tech- nical support. Literature [1] F. Scholze, F. Pietag, H. Adirim, M. Kreil, M. Kron, R. Woyciechowski, C. Bundesmann, D. Spemann, J. Electric Prop. 1 (2022) 28. [2] M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Dis- charges and Materials Processing,2nd edn. John Wiley & Sons, Inc., New Jersey (2005). [3] H. Adirim, M. Kreil, M. Kron, A. Mitrofanow, W. Halle, M. Lieder, W. Bärwald, S. Babben, T. Terzibaschian, Proc. 10th IAA Symp. on Small Satellites for Earth Observation, 10–1106 (2015, Berlin, Germany). [4] F. Scholze, F. Pietag, D. Spemann, R. Woyciechowski, Vorrich- tung und Verfahren zur Ionenerzeugung durch ein Plasma, Pa- tent WO 2023/222626 A1. 41

TOOLS REPORTS LIF spectroscopy for Xe ion VDF and neutral gas temperature measurements L. Pietzonka, C. Eichhorn, F. Scholze, D. Spemann The temperature of plasma neutrals and the ion ve- locity distribution function (VDF) are integral param- eters regarding the physics of low-pressure dis- charges. Acquiring spatially resolved data referring to these quantities can provide valuable information in terms of performance optimization of broad beam ion sources used in ion beam etching or ion beam assisted thin film deposition. Apart from terrestrial uti- lization contexts of broad beam ion sources, that facet of plasma diagnostics is relevant for the closely related gridded ion thruster technology in electric space propulsion. For example, experimental data of the neutral propellant local kinetic temperature is re- quired as an input for DynaSim [1], an in-house de- veloped numerical code for simulating extraction grid erosion and thereby predicting the operational life- time of gridded ion thrusters. We are using (single-photon absorption) laser-in- duced fluorescence (LIF) spectroscopy for assessing the kinematic properties of plasma constituents in- cluding the neutral temperature. LIF can be seen as another optical, thus, non-intrusive plasma diagnos- tics approach complementing our previously in- stalled two-photon absorption laser-induced fluores- cence (TALIF) spectroscopy diagnostics, which is aiming at neutral density mapping. [2] Recently, we reported on using LIF spectroscopy to obtain the VDFs of neutral and singly ionized xenon within the discharge chamber of a radiofrequency driven ion source [3]. This allowed us to infer the ki- netic temperature of either plasma species depend- ing on the ion source operating conditions. We also observed neutral gas heating in the course of time from which conclusions on stability and performance evolution can be drawn (see Figure 1). Analyzing LIF data attributed to common propellants in electric space propulsion, i.e. xenon and krypton, may be affected by uncertainty which must not be underestimated. This is related to the complexity of the respective spectral lineshapes, in particular, due to the occurrence of hyperfine splitting and isotope shifts. In that regard, only limited data, if any, is avail- able to build the required spectral linestructure mod- els for the optical transitions of interest. We therefore extended the capabilities of our LIF setup to enable Doppler-free saturation spectroscopy for linestruc- ture characterization with enhanced spectral resolu- tion. The anticipated results would support future 43 Figure 1: (a) Kinetic temperature progression for a specific ion source operation condition obtained by deconvolution of LIF spec- trum timeseries of xenon neutrals and ions in the discharge cham- ber. (b) Aggregated kinetic temperature data extracted from LIF timeseries at different ion source operation conditions. LIF-based investigations of the ion source plume re- gion and will moreover provide data of potential in- terest in a more general atomic physics framework. Acknowledgements Financial support during design of the experimental set-up by the Deutsches Zentrum für Luft- und Raumfahrt (DLR) through grant BMWi 50RS1506 is gratefully acknowledged. Literature [1] M. Tartz, E. Hartmann, H. Neumann, Rev. Sci. Instrum. 79 (2008) 02-905. [2] C. Eichhorn, L. Pietzonka, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann, H. Leiter, EPJ Tech. Instrum. 9, 2 (2022). [3] L. Pietzonka, C. Eichhorn, F. Scholze, D. Spemann, J. Electr. Propuls. 2, 4 (2023).

MATERIAL CHARACTERIZATION AND ANALYTICS REPORTS Pulsed laser deposition of GeTe-Sb2Te3 heterostructures on amorphous surfaces at room temperature S. Cremer, N. Braun, A. Lotnyk in cooperation with L. Voß, N. Wolff, L. Kienle, Kiel University, Germany Phase change materials (PCMs) such as Ge-Sb-Te (GST) alloys have been studied for their outstanding properties since their discovery and have since be- come the main contender for replacing standard memory technology. However, for future applica- tions, the performance of GST-based memory cells needs to be further improved, mainly to reduce power consumption and resistance drift while im- proving overall thermal stability. Common strategies involve the modification of device architecture and materials engineering, including doping. Replacing the homogeneous GST thin films with heterostruc- tures (HSs) or multilayers consisting of alternating stacked layers of two different PCMs such as GeTe and Sb2Te3 is another approach to optimize material properties. However, to further optimize the proper- ties of HSs and SLs, microstructural studies are cru- cial. They must provide the insights into the GeTe- Sb2Te3 interfaces and switching mechanism, as the latter has been highly debated over the last decade. In this work, GeTe-Sb2Te3 (GT-ST) based HSs with periodic and non-periodic layer stacking were grown by pulsed laser deposition (PLD) at room tempera- ture onto SiO2/Si substrates [1]. To protect the HSs from oxidation, La-Al-O thin films were deposited on top of the HS without vacuum breaking. To investi- gate the influence of different deposition parameters on the growth and microstructure, the laser pulse en- ergy and the number of pulses used for deposition were systematically varied. Advanced transmission electron microscopy (TEM) methods, such as EDX and EELS, combined with X-ray diffraction, were used to study the growth and microstructure of the HSs as well as their chemical composition [1]. Experimental results showed that the growth rate of GT and ST thin films depends on the laser pulse en- ergy. The deposition rate for ST is higher compared to GT. A decreasing laser pulse energy and number of laser pulses led to a decrease in the layer thick- ness. This affects the alloying of the layers, as EDX and EELS measurements confirmed interdiffusion of Ge in ST and Sb in GT layers. In general, a small layer thickness resulted in more pronounced inter- mixing, which is reflected in the formation of amor- phous GST ternary compound layers at the lowest laser pulse energy used (Fig. 1). This shows the flex- ibility of PLD for thin film growth with varying compo- sition in addition. However, this does not fully reflect 45 Figure 1: (a) EDX map of GT-ST HS deposited at lowest laser pulse energy of 100 mJ, showing the formation of non-stoichio- metric GST thin film. (b) EDX map of GT-ST HS deposited at a laser pulse energy of 140 mJ with uniformly thick individual layers after adjusting the HS growth to the deposition rates of ST and GT. (c) Atomic-resolution HAADF-STEM image of ST grain formed in GT-ST HS prepared with 140 mJ laser pulse energy. The micro- graph depicts the co-existing of different ST structures. the relationship between the alloy and layer thick- ness. While thicker GT layers led to a more pro- nounced diffusion of Ge in ST, a larger layer thick- ness of ST hinders the alloying of Sb with GT. This applies to setting the layer thickness via the number of laser pulses. Furthermore, increasing the GT layer thickness by laser pulse energy had no impact on the alloying of Ge with ST or the mixing of Sb with GT. The microstructure of GT-ST HSs is characterized by the amorphous GT and polycrystalline ST layers. Dif- ferent sizes in the range of several nanometers and bilayer defects as well as grain boundaries are char- acteristic of the crystallites. Furthermore, metastable cubic and vacancy-ordered (vo-) ST as well as stable trigonal (t-) ST can coexist within a single ST layer (Fig. 1). However, the intermediate vo-ST can be converted into the cubic phase under intense elec- tron beam irradiation [1]. The ST crystallites form de- spite deposition at room temperature and growth on an amorphous surface. Even in the mixed sample deposited with the lowest laser pulse energy, crystal- lites are present near the thin film-substrate inter- face, indicating the direct crystallization during PLD. Overall, this work provides insights into the growth and microstructure of GT-ST HSs, which give the reasons for the outstanding performance of the HSs and for discussion on switching mechanisms and the crystalization behaviour of HS. is crucial Acknowledgements This work is financially supported by the German Re- search Foundation (DFG 445693080). Literature [1] S. Cremer, L. Voß, N. Braun, N. Wolff, L. Kienle, A. Lotnyk, Appl. Surf. Sci. 655 (2024) 159679.

Equipment for Research and Application

FACILITIES RIBE 450 Facility Reactive ion beam etching (RIBE) is an efficient and well known technology enabling the fabrication of e.g. optical elements with sub-atomic precision. Within the extended research infrastructure a RIBE facility was established in 2016. An integrated 5 axes-motion system enables uniform etching of large workpieces with diameters up to 450 mm and a maximum weight of 50 kg. The RIBE system is equipped with a Kaufman-type ion source, configured for Fluorine-containing etching gases, and can be upgraded with different optical and mass spectroscopic in-situ measurement technologies which guarantee high process stability and reliability. With the RIBE 450 etching plant the sophisticated IOM etching processes for ultraprecise and innovative structured functional surfaces can be further scaled up to industrially relevant sizes. Expertise Ion beam driven self-organization RIBE for pattern transfer IBE/RIBE on large surfaces Ion beam assisted surface smoothing

ELECTRON BEAM BASED POLYMER MEMBRANE FUNCTIONLIZATION IN ROLL-TO-ROLL PROCESS Porous polymer membranes are of increasing importance regarding modern separation technologies such as wastewater treatment, sterilization filtration, hemodialysis, dairy industry, etc. To comply with re- quired process conditions these polymer membranes are predominantly fabricated from synthetic hy- drophobic polymers. However, these materials are prone to fouling. Electron beam technology can be efficiently used for the hydrophilization of polymer membranes by directed grafting of hydrophilic small molecules/polymers or even (bio)catalysts to the membrane surface. This pilot plant enables an upscal- ing (roll-to-roll) of our method using hollow fibres or flat sheet membranes with individual pre- and post- treatment. Furthermore, an inline contact angle measurement system allows permanent control over the functionalized flat sheet membrane surface. Expertise Hydrophilization, functionalization of membrane surfaces Antifouling membrane surfaces Cross-linking of polymer blends/mixtures Permanent immobilization of functional molecules/polymers/nanostructures/proteins/enzymes ✓ Hydrophilization: permanent ✓ Fouling reduction: 60-90% ✓ Permeation flux: +90% ✓ Energy demand for system operation: -50% ✓ Maintenance and cleaning effort: reduced ✓ Available operating time & lifetime: increased

UNIVERSAL DIAGNOSTIC PLATFORM FOR REACTIVE ION BEAM PROCESSES Today, many high-tech applications would be inconceivable without ion beam processes and methods. In this context, highly developed and process-adapted ion sources suitable for reactive gases are essen- tial. Driven by the application-related demands, the development and optimization of process-adapted broad-beam ion sources will be of increasing importance within the R&D work in the future. A prerequisite for such technological developments is the diagnostic platform RISQ-DIAP for the characterization of reactive ion beam processes, which was realized within the framework of the SAB/EFRE infrastructure initiative and which is unique both in Germany and internationally. Expertise Diagnostic capabilities at RISQ-DIAP: Faraday-Probe measurements (single probe, array) Residual gas analysis and energy selective mass spectrometry Thermal probe and thermal camera Quartz microbalances Optical etch rate monitoring, ellipsometry and optical emission spectroscopy Large area RIBE processing

EQUIPMENT The accelerator at the IOM is based on a technological platform providing computer-controlled stable average beam currents up to 1 mA (10 kW beam power) for material modification. The high energy of 10 MeV electrons allows synthesis and modification of 3D-samples up to a thickness of 5 cm (single- sided irradiation). Scanning and transport system provide homogeneous irradiation up to sample sizes of 0,6 m x 1,5 m. A modification of the accelerator for short (15 ns) single pulses of high pulse current (1A) allows state- of-the-art time-resolved spectroscopy (pulse radiolysis) of electron-induced primary processes for basic research in radiation chemistry. Expertise Defect sites design (NV-centers in diamonds, ZnO, SiC, …) Cross-linking (PE, Hydrogels, Cryogels …) Material modification (e.g. semiconductors, materials in regenerative medicine) Cryo- (> 77K) and HT (<1000°C) irradiation Radiation and radical chemistry Elucidation of structure-property relationships Time-resolved analytics during irradiation Single pulse and pulse train investigations Timescales: ns up to hours The research facility is co-financed by tax funds based on the budget passed by the Saxon state parliament.

EQUIPMENT The IOM’s Laser laboratories are equipped with state-of-the-art industrial laser sources for materials processing that are integrated into workstations for the full control of the laser machining process. IOM completed these workstations with equipment for material processing at specific conditions or with in process analysis options. Modern workstations with pulsed lasers with wavelengths from UV 193 nm to NIR 1,55 µm and ns, ps and fs pulse length Modules for cylinder machining with UV-ns, fs, and ps laser Off and in process measurement subsystems for process control and optimization Expertise Qualifying laser machining processes (ablation, etching, and surface modification) on state-of- the-art laser workstations including advanced analytics Developing and qualifying laser micro processing techniques for high quality, high precision and low damage machining Developing of enabling technologies for ultrahigh precision machining with pulsed lasers Developing, optimizing, and implementing application-specific machining processes including the processing strategy Application of beam shaping techniques for high speed and/or high-quality machining Hybrid processing: combining of laser processing with other beam-based or standard pro- cessing technologies Adapting of laser processing to existing process chains

MODULAR RESEARCH PLATFORM FOR PLASMA-BASED THIN FILM DEPOSITION TECHNIQUES IOM provides a new and unique tool to modify surfaces and synthesize new functional materials and thin films by applying different plasma deposition processes. The platform is flexible and modular in design in order to be utilized for different material and research require- ments. First tests with the platform have be carried out on material systems from the fields of switchable lay- ers at low temperatures (low temperature phase change materials in film form) and energy conversion and storage (electrochemically active surfaces as needed in solid acid fuel cells). HIGH RESOLUTION X-RAY DIFFRACTOMETER/REFLEC- TOMETER SYSTEM A new high resolution x-ray diffraction/reflectivity sys- tem offers additional diffraction and scattering tech- niques for the non-destructive characterization of crys- talline and amorphous materials. By means of a high- power rotating anode x-ray source, beam-shaping x- ray optics elements and a highly sensitive area detec- tor, different samples can now be measured by using a highly intense x-ray beam, while the beam shape can be optimized for the respective required measurement task. X-rays diffracted or scattered by a sample can be detected and evaluated even at low intensity. The highly precise 5-axis-goniometer together with various available degrees of freedom in movement of x-ray source, sample attachments and detector provide a variety of alignment and measurement scenarios. These research facilities are co-financed by tax funds based on the budget passed by the Saxon state parliament.

LEIPZIGER nanoANALYTIKUM (LenA) Nanoscale analysis of artificially produced materials is an important prerequisite for understanding the relationship between material structure and material properties. The design of materials with desired functionalities can only be achieved through precise knowledge of their real structure. The research area of LenA focuses on the structural and chemical analysis of thin films, interfaces and nanostructures using advanced methods of transmission electron microscopy (TEM). Expertise Aberration-corrected high-resolution scanning transmission electron microscopy In-situ transmission electron microscopy Nanoscale analysis of nanostructures, interfaces, and defects Thin films and heterostructures The research facility is co-financed by tax funds based on the budget passed by the Saxon state parliament.

Personnel Activities Graduation Committee Work Honors

GRADUATIONS Diploma and Master Theses 2022 Bernhardt, Annik Laser Modification of Titanium Dioxide Nanotubes for the Photocatalytic Degradation of Micropollutants Universität Leipzig, Fakultät für Chemie und Mineralogie Dörner, Chiara-Danae Degradation des Mikroschafsoffs Diclofenac aus wasser unter Verwendung von photoaktiven TiO2- und Eosin Y-modifizierten Polyvinylidenfluorid-Membranen Universität Leipzig, Fakultät für Chemie und Mineralogie Karoos, Julius Electron Beam Modification of Equine Tendon Tissue Universität Leipzig, Fakultät für Physik und und Erdsystemwissenschaften Lakshmi Kumar, Chinna Kannu Modification of surface and microstructural evolution on phase change epitaxial Ge2Sb2Te5 thin film induced by femtosecond laser pulses Technische Universität Dortmund, Fakultät für Maschinenbau Meise, Patricia Langzeitstabilität der Oberflächeneigenschaften von Titandioxid-Nanoröhren- Scaffolds und deren Einfluss auf gesunde und karzinogene Brustepithelzellen Hochschule Mittweida 2023 Becker, Robert Untersuchung zu Mechanismen beim Plasmajetpolieren von optischen Substraten aus Quarzglas Technische Universität Dresden Koohbor, Nima Ion Soft-Landing and Mass Spectrometric Investigation of Transition Metal Complexes TU Chemnitz Lorenz, Jonas Polyoxovanadate - Poly(methyl methacrylate) Composite Materials as potential resistive switching materials: A Study on Structural and Electronic Effects Universität Leipzig, Fakultät für Physik und Erdsystemwissenschaften Oumard, Jules Kinetic description oft the afterglow of a high-power impulse magnetron sputtering discharge Universität Leipzig, Fakultät für Physik und Erdsystemwissenschaften Wagner, Kenneth MS Imaging of Ion Soft-Landing Depositions: Exploring the Limits of Spatial Resolution in LESA Analysis Universität Leipzig, Fakultät für Chemie und Mineralogie 67

GRADUATIONS Wolfer, Valentin Magnetische Eisenoxid-Nanopartikel: Untersuchung und Optimierung der Synthese durch Elektronenbestrahlung Universität Leipzig, Fakultät für Physik und Erdsystemwissenschaften 2023 Demiri, Visar Laser-Induced Plasma Etching (LIPE) of Polyimide Foils Universität Leipzig, Fakultät für Physik und Erdsystemwissenschaften Neubert, Lukas Design of Experiment beim reaktiven Ionenstrahlätzen Westsächsische Hochschule Zwickau Stäglich, Tim Elektronenstrahlmodifizierte granulare PEGDA-Hydrogle: Untersuchung der Größenverteilung und rheologischer Eigenschaften Universität Leipzig, Fakultät für Physik und Erdsystemwissenschaften Voitel, Michael Untersuchungen zur Synthese und Charakterisierung von Polyoxometallaten funktionalisiert mit Yttriumphtalocyaningruppen Universität Leipzig, Fakultät für Chemie und Mineralogie Wätzold, Emily Leoline Effect of electron beam irradiation on vitreous humours Universität Leipzig, Fakultät für Physik und Erdsystemwissenschaften 69

COMMITTEE WORK Dr. Stephan Mändl Member of the International Committee “Plasma Based Ion Implantation and Deposition“ Guest Editor Surf. Coat. Technol. Proc. 15th International Conference on Plasma- Based Ion Implantation and Deposition Prof. Dr. Stefan G. Mayr Reviewer in the Review Board of the DFG Dr. Kirill Monakhov Mentor in the International Younger Chemists Network (IYCN) Member of the Collaborative Research Center (TRR 386) “Hyp*Mol - Hyperpolarization in Molecular Systems” Member of the International Research Network IRN-POM “Smart Molecular Oxides” Member of the German Chemical Society (GDCh) Reviewer for the National Research and Development Agency (ANID) of the Ministry of Science, Technology, Knowledge and Innovation of Chile Reviewer for the Alexander von Humboldt Foundation Dr. Martin Rudolph Member of the Program Committee of the International Conference on Reactive Sputter Deposition, Leipzig, 2023 Member of the Program Committee of the 49th International Conference on Metallurgical Coatings and Thin Films, San Diego, 2023 Dr. Tom Scherzer Advisory Board of the European European Symposium of Photopolymer Science Advisory Board of the International Symposium on Photopolymerization Dr. Agnes Schulze Member of Deutsche Gesellschaft für Membrantechnik DGMT Member of the German Chemical Society (GDCh) Member of ZIM-Innovationsnetzwerk „Technologien zur nachhaltigen Nutzung auf Aufbereitung von Wasser“ Board of Graduate School BuildMoNa, University Leipzig Review Editor of Frontiers in Chemistry / Polymer Chemistry Dr. Klaus Zimmer Member of the Editorial Board “Surfaces and Interfaces” Elsevier Reviewer in the Review Board of the DFG Reviewer in the Review Board of the Bayerische Forschungsstiftung 71

Scientific Events Scientific Meetings Institute Colloquia Lecture Series Seminar Series

SCIENTIFIC EVENTS Infrared microspectral imaging – a powerful tool for surface analysis and materials characterization Dr. Tom Scherzer Leibniz Institute of Surface Engineering (IOM), Leipzig 01.12.2022 From surface functionalization to hybrid interfaces with ab initio approaches Prof. Dr. Ralf Tonner-Zech Lehrstuhl für Theoretische Chemie Universität Leipzig 13.12.2022 Beschichtungslösungen für die Wasserstoffwirtschaft Dr. Ralf Bandorf Fraunhofer-Institut für Schicht- und Oberflächentechnik IST 15.12.2022 Preparation of Recycling-PET-Membranes using Phase Separation from High Temperature Solutions Dr. Daniel Breite IOM 26.01.2023 Laser-induced periodic surface structures: mechanisms, applications, and unsolved problems Dr. Jörn Bonse Bundesanstalt für Materialforschung und –prüfung (BAM), Berlin 02.02.2023 Spatially-resolved analysis of the chemical composition at the nanometer scale using atom probe tomography Dr. Marcus Hans Lehrstuhl für Werktoffchemie, RWTH Aachen 23.03.2023 Radio-Frequency Ion Thrusters for Commercial and Scientific Applications – Status, Challenges and Future Prof. Dr. Hans Leiter ArianeGroup GmbH 20.04.2023 A window to the Universe: optical coatings for gravitational-wave detectors Dr. Mariana Fazio University of Strathclyde, Scotland 04.05.2023 Customized Solutions for functional Surfaces and Coating - from Lab to Fab Dr. Thomas Gischkat Fraunhofer IOF Jena 01.06.2023 Thin film materials design & some thoughts on complexity and sustainability Prof. Dr. Jochen Schneider Lehrstuhl für Werkstoffchemie, RWTH Aachen 13.07.2023 77

SCIENTIFIC EVENTS Prof. Dr. Stefan G. Mayr Experimentalphysik 5 Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2021/22, Winter 2022/23 Experimentalphysik 4 Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2022, Summer 2023 Dr. Agnes Schulze Funktionskontrolle an komplexen Oberflächen Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2021/22, Winter 2022/23, Winter 2023/24 Dr. Daniel Spemann Teilchenphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2022, Summer 2023 Experimentalphysik VII – Kern- und Teilchenphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2021/22, Winter 2022/23, Winter 2023/24 Dr. Unutulmazsoy, Yeliz Plasmas Physics, Thin Film Deposition and Characterization Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2023 Seminar Series Prof. Dr. André Anders Plasmas Physics, Thin Film Deposition and Characterization Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2021/22, Winter 2022/23, Summer 2023, Winter 2023/24 Dr. Ulrike Helmstedt Modul “Coatings on Complex Surfaces" in "Function Control at Complex Surfaces“ Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2021/22, Winter 2022/23 Priv. Doz. Dr. Stephan Mändl Plasmas Physics, Thin Film Deposition and Characterization Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2021/22, Winter 2022/2023, Winter 2023/24 Prof. Dr. Stefan G. Mayr Seminar „Oberflächenphysik“ Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2021/22, Winter 2022/23, Summer 2022, Summer 2023 79

Publications and Presentations Publications in Journals and Books Conference Proceedings Talks Posters Patents

PUBLICATIONS IN JOURNALS AND BOOKS Y. Chen, X. Shen, F. Liu, G. Wang, A. Lotnyk Double-layered GeTe/Sb2Te heterostructures for enhancing thermoelectric performance Scr. Mater. 218 (2022) 114848, DOI: 10.1016/j.scriptamat.2022.114848 O. Daikos, T. Scherzer In-line monitoring of the residual moisture in impregnated black textile fabrics by hyperspectral imaging Prog. Org. Coat. 163 (2022) 106610, DOI: 10.1016/j.porgcoat.2021.106610 O. Daikos, S. Naumov, W. Knolle, K. Heymann, T. Scherzer Photoinitiator-free radical photopolymerization using polybrominated and polychlorinated aromatic methacrylates: Investigations on the mechanisms of initiation J. Photochem. Photobiol. A 429 (2022) 113916, DOI: 10.1016/j.jphotochem.2022.113916 H.B. Dizaji, T. Zeng, H. Hölzig, J. Bauer, G. Klöß, D. Enke Ash transformation mechanism during combustion of rice husk and rice straw Fuel 307 (2022) 121768, DOI: 10.1016/j.fuel.2021.121768 C. Eichhorn, L. Pietzonka, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann, H. Leiter Single- and two-photon absorption laser-induced fluorescence spectroscopy in rare gasses for gridded ion thruster diagnostics EPJ Techn. Instrum. 9 (2022) 2, DOI: 10.1140/epjti/s40485-022-00077-y I. Elbalasy, N. Wilharm, E. Herchenhahn, R. Konieczny, S.G. Mayr, J. Schnauß From strain stiffening to softening—rheological characterization of keratins 8 and 18 networks crosslinked via electron irradiation Polymers 14 (2022) 614, DOI: 10.3390/polym14030614 H. Ennaceri, K. Fischer, A. Schulze, N. R. Moheimani Membrane fouling control for sustainable microalgal biodiesel production: A review Renew. Sust. Energ. Rev. 161 (2022) 112335, DOI: 10.1016/j.rser.2022.112335 J. Foglszinger, A. Denisenko, T. Kornher, M. Schreck, W. Knolle, B. Yavkin, R. Kolesov, J. Wrachtrup TR12 centers in diamond as a room temperature atomic scale vector magnetometer npj Quantum Inf. 8 (2022) 65, DOI: 10.1038/s41534-022-00566-8 J. Frenzel, A. Kupferer, M. Zink, S.G. Mayr Laminin adsorption and adhesion of neurons and glial cells on carbon implanted titania nanotube scaffolds for neural implant applications Nanomaterials 12 (2022) 3858 R.N. Gannon, M.M. Choffel, H.R. Blackwood, N. Wolff, A. Lotnyk, L. Kienle, D.C. Johnson Growth of crystallographically aligned PbSe films of controlled thickness on amorphous substrates Z. Anorg. Allg. Chem. 648 (2022) e202200015, DOI: 10.1002/zaac.202200015 R. Garmasukis, C. Hackl, A. Charvat, S. G. Mayr, B. Abel Rapid prototyping of microfluidic chips enabling controlled biotechnology applications in microspace Curr. Opin. Biotechnol. 81 (2023) 102948, DOI: 10.1016/j.copbio.2023.102948 M. Glöß, R. Pütt, M. Moors, E. Kentzinger, S. Karthäuser, K.Yu. Monakhov Exploring the ligand functionality, electronic band gaps, and switching characteristics of single wells-Dawson-type polyoxometalates on gold DOI: 10.1002/admi.202200461 85

PUBLICATIONS IN JOURNALS AND BOOKS D. Kalanov, Y. Unutulmazsoy, D. Spemann, J. Bauer, A. Anders, C. Bundesmann Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature J. Vac. Sci. Technol. A 40 (2022) 033409, DOI:10.1116/6.0001825 F. Klenner, M. Umair, S.H. G. Walter, N. Khawaja, J. Hillier, L. Nölle, Z. Zou, M. Napoleoni, A. Sanderink, W. Zuschneid, B. Abel, F. Postberg Developing a laser induced liquid beam ion desorption spectral database as reference for spaceborne mass spectrometers Earth Space Sci. 9 (2022) e2022EA002313, DOI: 10.1029/2022EA002313 C. Krömmelbein, X. Xie, J. Seifert, R. Konieczny, S. Friebe, J. Käs, S. Riedel, S.G. Mayr Electron beam treated injectable agarose/alginate beads prepared by electrospraying Carbohydr. Polym. 298 (2022) 120024, DOI: 10.1016/j.carbpol.2022.120024 T.I. Kwinda, B. Oberleiter, K. Fischer, I. Thomas, A. Schulze, D. Enke, S. Koppka Evaluating the photocatalytic activity of 14.6TiO2–7Na2O–23B2O3-55.4SiO2 (mol.-%) glass based porous catalysts after selective laser sintering and conventional shaping Ceram. Int. 48 (2022) 34064-34074, DOI: 10.1016/j.ceramint.2022.07.355 C. Lee, M.N. Pohl, I.A. Ramphal, W. Yang, B. Winter, B. Abel, D.M. Neumark Evaporation and Molecular Beam Scattering from a Flat Liquid Jet J. Phys. Chem. A 126 (2022)3373-3383, DOI: 10.1021/acs.jpca.2c01174 M. Lehnig, S. Glass, N. Lippmann, S. Ziganshyna, V. Eulenburg, R. Werdehausen Evaluation of a luminometric cell counting system in context of antimicrobial photodynamic inactivation Microorganisms 10 (2022) 950, DOI: 10.3390/microorganisms10050950 P. Lorenz, M. Himmerlich, M. Ehrhart, E. Bez, K. Bodganowicz, M. Taborelli, K. Zimmer Secondary electron yield reduction of copper after 355 nm ultrashort pulse laser ablation Lasers Manuf. Mater. Process. 9 (2022) 135-150, DOI: 10.1007/s40516-022-00167-5 P. Lorenz, E. Bez, M. Himmerlich, M. Ehrhardt, M. Taborelli, K. Zimmer Secondary electron yield engineering of copper surfaces by 532 nm ultrashort laser pulses Proc. CIRP 111 (2022) 662-666, DOI: 10.1016/j.procir.2022.08.017 P. Lorenz, J. Zajadacz, F. Marquardt, M. Ehrhardt, G. Hommes, S. Peter, K. Zimmer Self-cleaning stainless steel surfaces induced by laser processing and chemical engineering Proc. CIRP 111 (2022) 711-714, DOI: 10.1016/j.procir.2022.08.019 S. Lai, M. Ehrhardt, P. Lorenz, J. Zajadacz, B. Han, A. Lotnyk, K. Zimmer Ultrashort pulse laser-induced submicron bubbles generation due to the near-surface material modification of soda-lime glass Opt. Laser Technol. 146 (2022) 107573, DOI: 10.1016/j.optlastec.2021.107573 A. Lipatiev, S. Lotarev, T. Lipateva, A. Okhrimchuk, S. Fedotov, A. Lotnyk, V. Sigaev Fabrication of single-mode hybrid crystal-glass waveguides by direct femtosecond laser writing and thermal annealing Mater. Res. Bull. 152 (2022) 111840, DOI: 10.1016/j.materresbull.2022.111840 P. Lorenz, M. Ehrhardt, K. Zimmer High pore density polyimide membrane Production by ps laser pulses J. Laser Micro Nanoengin. 17 (2022) 6-11, DOI: 10.2961/jlmn.2022.01.2002 87

PUBLICATIONS IN JOURNALS AND BOOKS H. Müller, Th. Waak, U. Birnbaum, G. Böhm, Th. Arnold Atmospheric plasma jet processing for figure error correction of an optical element made from S-BSL7 10.1051/jeos/2022003 F. Niefind, R. Shivhare, S.C.B. Mannsfeld, B. Abel, M. Hambsch Investigating the morphology of bulk heterojunctions by laser photoemission electron microscopy Polym. Test. 116 (2022) 107791, DOI: 10.1016/j.polymertesting.2022.107791 S.K. Petrovskii, M. Moors, S. Schmitz, E.V. Grachova, K.Yu. Monakhov Increasing the redox switching capacity of Lindqvist-type hexavanadates by organogold post-functionalisation Chem. Commun. 59 (2023) 9517-9520, DOI: 10.1039/D3CC02511J L. Qian, F.-D. Kopinke, T. Scherzer, J. Griebel, A. Georgi Enhanced degradation of perfluorooctanoic acid by heat-activated persulfate in the presence of zeolites Chem. Eng. J. 429 (2022) 13200, DOI: 10.1016/j.cej.2021.132500 E. Reisz, S. Naumov, A. Tekle-Röttering, W. Schmidt Hydride transfer versus H-abstraction in the reaction of O3 with 2-propanol: The influence of solvent J. Phys. Org. Chem. 35 (2022) e4288, DOI: 10.1002/poc.4288 P. Räcke, J. Meijer, D. Spemann Image charge detection of ion bunches using a segmented, cryogenic detector J. Appl. Phys. 131 (2022) 204502, DOI: 10.1063/5.0096094 S.G. Robson, P. Räcke, A.M. Jakob, N. Collins, H.R. Firgau, V. Schmitt, V. Mourik, A. Morello, E. Mayer, D. Spemann, D.N. Jamieson Near-surface electrical characterisation of silicon electronic devices using focused keV ions Phys. Rev. Appl 18 (2022) 034037, DOI: 10.1103/PhysRevApplied.18.034037 M. Rudolph, N. Brenning, H. Hajihoseini, M.A. Raadu, T.M. Minea, A. Anders, J.T. Gudmundsson, D. Lundin Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge J. Phys. D: Appl. Phys. 55 (2022) 015202ACCEPTED MANUSCRIPT, DOI: 10.1088/1361-6463/ac2968 M. Rudolph, A. Revel, D. Lundin, N. Brenning, M.A. Raadu, A. Anders, T.M. Minea, J.T. Gudmundsson On the population density of the argon excited levels in a high power impulse magnetron sputtering discharge Phys. Plasmas A 29 (2022) 023506, DOI: 10.1063/5.0071887 M. Rudolph, N. Brenning, H. Hajihoseini, M.A. Raadu, J. Fischer, J. T. Gudmundsson, D. Lundin Operating modes and target erosion in high power impulse magnetron sputtering J. Vac. Sci. Technol. A 40 (2022) 043005, DOI: 10.1116/6.0001919 M. Rudolph, P. Birtel, T. Arnold, A. Prager, S. Naumov, U. Helmstedt, A. Anders, P.C. With Low-temperature atmospheric pressure plasma conversion of polydimethylsiloxane and polysilazane precursor layers to oxide thin films Plasma Process Polym. 5 (2023) 2200229, DOI: 10.1002/ppap.202200229 89

PUBLICATIONS IN JOURNALS AND BOOKS A. Spesyvyi, J. Zabka, M. Polásek, A. Charvat, J. Schmidt, F. Postberg, B. Abel Charged ice particle beams with selected narrow mass and kinetic energy distributions J. Am. Soc. Mass Spectrom. 34 (2023) 878-892, DOI: 10.1021/jasms.2c00357 L. Streisel, M. Ehrhardt, P. Lorenz, R. Heinke, A. Hossain, K. Zimmer Ultrahigh precision machining of polymer surface using laser-induced reactive micro- plasmas J. Laser Micro Nanoengin. 17 (2022) 28-34, DOI: 10.2961/jlmn.2022.01.2005 J. Su, S. Fichtner, M.Z. Ghori, N. Wolff, M.R. Islam, A. Lotnyk, D. Kaden, F. Niekiel, L. Kienle, B. Wagner, F. Lofink Growth of highly c-axis oriented AlScN films on commercial substrates Micromachines 13 (2022) 783, DOI: 10.3390/mi13050783 E. Vogelsberg, M. Moors, A.S. Sorokina, D.A. Ryndyk, S. Schmitz, J.S. Freitag, A.V. Subbotina, T. Heine, B. Abel, K.Yu. Monakhov Solution-processed formation of DNA-origami-supported polyoxometalate multi-level switches with countercation-controlled conductance tunability Chem. Mater. 35 (2023) 5447-5457, DOI: 10.1021/acs.chemmater.3c00776 D.S. Walch, Y. Yun, N. Ramakrishnegowda, L. Mühlenbein, A. Lotnyk, C. Himcinschi, A. Bhatnagar Resistive switching in ferroelectric Bi2FeCrO6 thin films and impact on the photovoltaic effect Adv. Electron. Mater. 8 (2022) 2200276, DOI: 10.1002/aelm.202200276 G. Wang, Y. Chen, A. Lotnyk, X. Shen, H. Shi Kirkendall effect induced ultralow thermal conductivity yields enhanced thermoelectric properties in Mg–Zn–Sb alloys Chem. Eng. J. 444 (2022) 136599, DOI: 10.1016/j.cej.2022.136599 X. Wang, B. Han, M. Ehrhardt, F. Zhang, J. Wang, P. Wang, P.P. Monka, S. Sun Non-damage deep etching of SiC by hybrid laser-high temperature chemical processing Int. J. Appl. Ceram. Technol. 19 (2022) 2344-2355, DOI: 10.1111/ijac.14061 X. Wang, K. Zimmer, M. Ehrhardt, F. Zhang, J. Wang, P. Wang, J. Shao, J. Liu, A. Cao, W. Sun, S. Sun One-step in-situ low damage etching of SiC/SiC composites by high-temperature chemical-assisted laser processing Ceram. Int. 48 (2022) 34472-34482, DOI: 10.1016/j.ceramint.2022.08.028 X. Wang, M. Ehrhardt, P. Lorenz, K. Zimmer, F. Zhang, J. Wang, P. Wang, Y. Hayasaki, H.B. Ahmad, J. Shao, S. Sun Effects of various pulse width laser with 1064 nm wavelength on thermal ablation and phase transition of monocrystalline silicon Exp. Heat. Trans. 36 (2023) 632-647, DOI: 10.1080/08916152.2022.2066736 X. Wang, B. Han, M. Ehrhardt, D. Kim, F. Zhang, J. Wang, P. Wang, S. Sun Optimizing hole shape and improving surface quality of Inconel 718 alloy by high temperature chemical assisted laser processing Met. Mater. Int. 29 (2023) 1991-2003, DOI: 10.1007/s12540-022-01344-z M. Wertz, M.B. Schmidt, H. Hoelzig, M. Wagner, B. Abel, G. Kloess, S. Hahnel, A. Koenig Rhombohedral phase formation in yttria-stabilized zirconia induced by dental technical tools and its impact on dental applications Materials 15 (2022) 4471. DOI: 10.3390/ma15134471 91

PUBLICATIONS IN JOURNALS AND BOOKS A. Banari, K. Graebe, M. Rudolph, E. Mohseni, P. Lorenz, K. Zimmer, R. Hübner, C. Henry, M. Bossy, U. Hampel, G. Lecrivain Influence of engineered roughness microstructures on adhesion and turbulent resuspension of microparticles J. Aerosol Sci. 174 (2023) 106258, DOI: 10.1016/j.jaerosci.2023.106258 C. Bekker, M.J. Arshad, P. Cilibrizzi, C. Nikolatos, P. Lomax, G.S. Wood, R. Cheung, W. Knolle, N. Ross, B. Gerardot, C. Bonato Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography Appl. Phys. Lett. 122 (2023) 173507 E. Bez, M. Himmerlich, P. Lorenz, M. Ehrhardt, A.G. Gunn, S. Pfeiffer, M. Rimoldi, M. Taborelli, K. Zimmer, P. Chiggiato, A. Anders Influence of wavelength and accumulated fluence at picosecond laser-induced surface roughening of copper on secondary electron yield J. Appl. Phys. 133 (2023) 035303, DOI: 10.1063/5.0131916 F. Bia, I. Gualandi, J. Griebel, L. Rasmussen, B. Hallak, D. Tonelli, B. Kersting Heterobimetallic conducting polymers based on salophen complexes via electrosynthesis J. Mater. Chem. C 11 (2023) 2957-2969, DOI: 10.1039/D2TC04372F N.F.L. Collins, A.M. Jakob, S.G. Robson, S.Q. Lim, P. Räcke, B.C. Johnson, B. Liu, Y. Lu, D. Spemann, J.C. McCallum, D.N. Jamieson Graphene-enhanced single ion detectors for deterministic near-surface dopant implantation in diamond Adv. Funct. Mater. 33 (2023) 2306601, DOI: 10.1002/adfm.202306601 M. Dannenmann, F. Klenner, J. Bönigk, M. Pavlista, M. Napoleoni, J. Hillier, N. Khawaja, K. Olsson-Francis, M.L. Cable, M.J. Malaska, B. Abel, F. Postberg Toward detecting biosignatures of DNA, lipids, and metabolic intermediates from bacteria in ice grains emitted by Enceladus and Europa Astrobiology 23 (2023) 60-75, DOI: 10.1089/ast.2022.0063 V. Demiri, M. Ehrhardt, P. Lorenz, R. Heinke, K. Zimmer Pulse duration dependent laser-induced plasma etching of polyimide using a high repetition rate laser Appl. Surf. Sci. Adv. 17 (2023) 100450, DOI: 10.1016/j.apsadv.2023.100450 J. Dietrich, A. Enke, N. Wilharm, R. Konieczny, A. Lotnyk, A. Anders, S.G. Mayr Energetic electron-assisted synthesis of tailored magnetite (Fe3O4) and maghemite (g-Fe2O3) nanoparticles: structure and magnetic properties Nanomaterials 13 (2023) 786, DOI: 10.3390/nano13050786 G. Dornberg, E. Rohkamm, P. Birtel, F. Scholze, F. Frost Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2 J. Vac. Sci. Technol. A 41 (2023) 053104, DOI: 10.1116/6.0002766 L. Escalada, E.L. Dalibon, S.P. Brühl, D. Manova, S. Mändl, S. Simison Influence of inclusions in the corrosion behaviour of plasma nitrided stainless steel Adv. Eng. Mater. 25 (2023) 2201112, DOI: 10.1002/adem.202201112 K. Fischer, J. Lohmann, E. Schmidt, T.H. Blaich, C. Belz, I. Thomas, E. Vogelsberg, A. Schulze Anti-biofouling membranes via hydrogel electron beam modification - A fundamental and applied study Colloids Surf. A: Physicochem. Eng. Asp. 675 (2023) 132044, DOI: 10.1016/j.colsurfa.2023.132044 93

PUBLICATIONS IN JOURNALS AND BOOKS S. Kawa, H. Knorke, J. Jin, M. Rohdenburg, K.R. Asmis, R. Tonner-Zech, E. Bernhardt, C. Jenne, M. Finze, J. Warneke Binding properties of small electrophilic anions [B6X5]− and [B10X9]− (X=Cl, Br, I): Activation of small molecules based on π-backbonding Chem. Eur. J. 29 (2023) e202302247, DOI: 10.1002/chem.202302247 S. Karimi Aghda, D.M. Holzapfel, D. Music, Y. Unutulmazsoy, S. Mràz, D. Bogdanovski, G. Fidanboy, M. Hans, D. Primetzhofer, A.S. José Méndez A. Anders, J.M. Schneider Ion kinetic energy-and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films Acta Mater. 250 (2023) 118864, DOI: 10.1016/j.actamat.2023.118864 J. Kober, D. Rolón, F. Hölzel, S. Kühne, D. Oberschmidt, T. Arnold Micro-embossing of micro-structures in RSA-501 as mold inserts for the replication of micro-lens arrays Results Eng. 17 (2023) 100793, DOI: 10.1016/j.rineng.2022.100793 N. König, Y. Godínez-Loyola, F. Yang, C. Laube, M. Laue, P. Lönnecke, C.A. Strassert, E. Hey-Hawkins Facile modification of phosphole-based aggregation-induced emission luminogens with sulfonyl isocyanates Chem. Sci. 14 (2023) 2267-2274, DOI: 10.1039/D3SC00308F N. König, Y. Godínez-Loyola, H. Weiske, S. Naumov, P. Lönnecke, R. Tonner-Zech, C.A. Strassert, E. Hey-Hawkins Access to strong thieno[3,2-b]phosphole-based solid-state emitters via manganese(III)-mediated oxidative annulation Chem. Mater. 35 (2023) 8218–8228, DOI: 10.1021/acs.chemmater.3c01734 C. Küstner-Wetekam, L. Marder, D. Bloß, C. Honisch, N. Kiefer, C. Richter, S. Rubik, R. Schaf, C. Zindel, M. Förstel, K. Gokhberg, A. Knie, U. Hergenhahn, A. Ehresmann, P. Kolorenc, A. Hans Experimental quantification of site-specific efficiency of Interatomic Coulombic Decay after inner shell ionization Commun. Phys. 6 (2023) 50, DOI: 10.1038/s42005-023-01166-4 C. Laube, R. Temme, A. Prager, J. Griebel, W. Knolle, B. Abel Fluorescence lifetime control of nitrogen vacancy centers in nanodiamonds for long- term information storage ACS Nano 17 (2023) 15401-15410, DOI: 10.1021/acsnano.3c00328 E. Lehner, C. Honeder, W. Knolle, W. Binder, J. Scheffler, S.K. Plontke, A. Liebau, K. Mäder Towards the optimization of drug delivery to the cochlear apex: Influence of polymer and drug selection in biodegradable intracochlear implants Int. J. Pharm. 643 (2023) 123268, DOI: 10.1016/j.ijpharm.2023.123268 H. Li, J. Li, G. Yang, Y. Liu, F. Frost, Y. Hong Can one series of self-organized nanoripples guide another series of self-organized nanoripples during ion bombardment: from the perspective of power spectral density entropy? Entropy 25 (2023) 170, DOI: 10.3390/e25010170 Y. Li, Y. Zhang, Z. Liu, S. Cheng, X. Li, W. Jin, Y. Zhang, Y. Qin, X. Yang, J. Zhang, A. Lotnyk, L. Yuan All-fiber synapse utilizing phase change materials for information recognition and processing ACS Photonics 10 (2023) 4160-4168, DOI: 10.1021/acsphotonics.3c00846 95

PUBLICATIONS IN JOURNALS AND BOOKS A. Paul, P.D. Esquinazi, C.I. Zandalazini, A. Setzer, W. Knolle Magnetic manipulation in Dy/Tb multilayer upon electron-irradiation J. Magn. Magn. Mater. 565 (2023) 170258, DOI: 10.1016/j.jmmm.2022.170258 L. Pietzonka, C. Eichhorn, F. Scholze, D. Spemann Laser induced fluorescence spectroscopy for kinetic temperature measurement of xenon neutrals and ions in the discharge chamber of a radiofrequency ion source J. Electr. Prop. 2 (2023) 4, DOI: 10.1007/s44205-022-00029-4 M. Rasadujjaman, J. Zhang, D.A. Spassky, S. Naumov, A.S. Vishnevskiy, K.A. Vorotilov, J. Yan, J. Zhang, M.R. Baklanov UV-Excited luminescence in porous organosilica films with various organic components Nanomaterials 13 (2023) 1419, DOI: 10.3390/nano13081419 M. Rohdenburg, Z. Warneke, H. Knorke, M. Icker, J. Warneke Chemical synthesis with gaseous molecular ions: Harvesting [B12Br11N2]− from a mass spectrometer Angew. Chemie Int. Ed. 62 (2023) e202308600, DOI: 10.1002/anie.202308600 F.M. Schumann-Muck, N. Hillig, P.G. Braun, J. Griebel, M. Koethe Impact of nanoscale coating of stainless steel on Salmonella Enteritidis and Escherichia coli J. Food Saf. 43 (2023) e13075, DOI: 10.1111/jfs.13075 T. Şener Raman, M. Kuehnert, O. Daikos, T. Scherzer, C. Krömmelbein, S.G. Mayr, B. Abel, A. Schulze A study on the material properties of novel PEGDA/gelatin hybrid hydrogels polymerized by electron beam irradiation Front. Chem. 10 (2023) 1094981, DOI: 10.3389/fchem.2022.1094981 A.O. Serov, A.N. Ryabinkin, A.S. Vishnevskiy, S. Naumov, A.F. Pal, T.V. Rakhimova, D.S. Seregin, K.A. Vorotilov, M.R. Baklanov Damage to OSG low-k films during IPVD deposition of the Ta barrier layer Plasma Process. Polym. 20 (2023) 2200169, DOI: 10.1002/ppap.202200169 O. Shayestehpour, S. Zahn Efficient molecular dynamics simulations of deep eutectic solvents with first- principles accuracy using machine learning interatomic potentials J. Chem. Theory Comput. 16 (2023) 8732-8742, DOI: 10.1021/acs.jctc.3c00944 S. Soni, I. Werner, M. Aidi, M. Moors, C.L. Mthembu, M. Zharnikov, R.W.A. Havenith, K.Yu. Monakhov, R.C. Chiechi Influence of polyoxovanadate and phthalocyanine on 4f electron transfer in gold- confined monolayers probed with EGaIn top contacts ACS Appl. Nano Mater. 6 (2023) 22643-22650, DOI: 10.1021/acsanm.3c05021 P. Su, Z. Warneke, D. Volke, M.F. Espenship, H. Hu, S. Kawa, K. Kirakci, R. Hoffmann, J. Laskin, C. Wiebeler, J. Warneke Gas Phase Reactivity of [Mo6X14]2- Dianions (X = Cl - I) J. Am. Soc. Mass Spectrom. 34 (2023) 161-170, DOI: 10.1021/jasms.2c00243 Y. Unutulmazsoy, D. Kalanov, K. Oh, S.K. Aghda, J.W. Gerlach, N. Braun, F. Munnik, A. Lotnyk, J .M. Schneider, A. Anders Toward decoupling the effects of kinetic and potential ion energies: Ion flux dependent structural properties of thin (V,Al)N films deposited by pulsed filtered cathodic arc J. Vac. Sci. Technol. A 41 (2023) 063106, DOI: 10.1116/6.0002927 97

PUBLICATIONS IN JOURNALS AND BOOKS K. Holste, T. Henning, B. Nauschütt, P.J. Klar, D. Spemann, F. Scholze, C. Eichhorn, H. Leiter, P. Dietz, E. Bosch-Borras Endurance and coupling test of the RIT-µX Paper Nr. IEPC-2022-247, 37th Int. Electric Propulsion Conf., Cambridge, MA, United States, 19.-23.06. (2022) K.H. Leopold, D. Breite, A. Prager, N. Schönherr, L. Drößler, S. Weiß, M. Schmidt, M. Went, D. Enke, A. Schulze In-situ hydrophilization of hollow fiber membranes using electron beam grafting Proc. Euromembrane 2022, Sorrento, Italy, 20.-24.11 (2022) P. Lorenz, M. Himmerlich, M. Ehrhardt, E. Bez, K. Bogdanowicz, M. Taborelli, K. Zimmer Secondary electron yield engineering of copper surfaces using ultra short infrared laser pulses Proc. SPIE 11989, Laser-based Micro- and Nanoprocessing XVI (2022) 119890A, DOI: 10.1117/12.2609463 H. Müller, Th. Arnold Atmospheric plasma jet used as polishing tool for optical glasses Proc. SPIE 12298, Ninth European Seminar on Precision Optics Manufacturing (2022) 1229806, DOI: 10.1117/12.2631860 Z. Niavarani, D. Breite, B. Abel, A. Schulze Synthesis of hybrid PES membranes via electron beam irradiation for selective removal of 17ß-estradiol from water Proc. Euromembrane 2022, Sorrento, Italy, 20.-24.11. L. Pietzonka, C. Eichhorn, F. Scholze, D. Spemann Extraction of velocity distribution functions of neutrals and ions from laser-induced fluorescence spectra measured in the discharge chamber of a radiofrequency-driven xenon ion source Paper Nr. Paper Nr. IEPC-2022-249, 37th Int. Electric Propulsion Conf., Cambridge, MA, United States, 19.-23.06. (2022) M. Schmidt, A. Abdul Latif, A. Prager, R. Gläser, A. Schulze Reagent-free biofunctionalization of polymer membranes Proc. 6th International School and Conference on Biological Materials Science – Bioinspired Materials 2022, Kostenz, Germany, 21. -24.03. (2022) 40 M. Schmidt, A. Prager, R. Gläser, A. Schulze Bioactive polymer membrane filters by grafting of enzymes Proc. Biennial Meeting of the GDCh-Division of Macromolecular Chemistry, Aachen, Germany, 12.-14.09. (2022) 74 F. Scholze, F. Pietag, C. Bundesmann, R. Woyciechowski, D. Spemann, M. Kreil, M. Kron, H. Adirim IonJet: Development of a cost-efficient gridded ion thruster propulsion system for smallsats Paper Nr. IEPC-2022-246, 37th Int. Electric Propulsion Conf., Cambridge, MA, United States, 19.-23.06. (2022) A. Schulze, T. Sener Raman, S.G. Mayr, B. Abel Synthesis of a PEGDA/Gelatin hybrid hydrogel for wound dressing 16. ThGOT Thementage Grenz- und Oberflächentechnik & 13. Biomaterial Kolloquium, Zeulenroda, Germany, 14.-15.06. A. Schulze, K. Fischer, J. Becker-Jahn, Z. Niavarani, D. Breite Functionalized microfiltration membranes for the removal of micropollutants from water Proc. Euromembrane 2022, Sorrento, Italy, 20.-24.11. (2022) 236 99

TALKS Talks 2022 T. Amelal, J. Bernstein, M. Mateev, L. Pietzonka, D. Spemann, C. Bundesmann* Low-energy ion-target interaction: Fundamentals and applications Ionenstrahltreffen 2022, Jena, Germany, 31.03.-01.04.2022 A. Anders* Cathodic arc plasma science and applications: The known unknown and unknown known Online Low Temperature Plasma (OLTP) Seminar Series, Princeton Plasma Physics Laboratory, Princeton University, Online, Princeton, NJ, United States, 06.09.2022 A. Anders* Quality of vacuum: A decisive factor for thin films and coatings deposited by plasma- based methods 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 A. Anders* I-V-characteristics and the transition from glow to arc 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 A. Anders* Plasma-assisted coatings for applications in ultrahigh vacuum ATS Seminars - Accelerators and Technology, CERN, Geneva, Switzerland, 11.10.2022 A. Anders*, K. Oh, D. Kalanov Colored random noise of cathodic arcs: What is it? Should we care? Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, United States, 22.-27.05.2022 T. Arnold*, J. Bauer, G. Böhm, H. Müller Ultra-precision optical surface processing by reactive atmospheric plasmas and low energy ion beams Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, United States, 22.-27.05.2022 T. Arnold*, G. Böhm, H. Müller, M. Ehrhardt, K. Zimmer Plasma assisted polishing of fused silica freeform optics European Optical Society Annual Meeting 2022, Porto, Portugal, 12.-16.09.2022 J. Bauer*, H. Hosseini, G. Dornberg, F. Frost Effect of crystallinity in ion beam-induced nanostructuring of titanium surfaces XXVII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 14.-18.03.2022 E. Bez*, M. Himmerlich, A.K. Reascos Portilla, P. Lorenz, K. Zimmer, M. Taborelli, A. Anders Processing copper surfaces with ultrashort laser pulses to reduce secondary electron yield DPG Tagung der Sektion Kondensierte Materie, Regensburg, Germany, 04.-09.09.2022 101

TALKS C. Eichhorn*, F. Scholze, D. Spemann, H. Leiter Two-photon laser-induced fluorescence measurements of neutral densities near the accelerator grid of an ion thruster: Status of current activities 37th Int. Electric Propulsion Conf., Cambridge, MA, United States, 19.-23.06.2022 H. Eliasson, M. Rudolph, N. Brenning, H. Hajihoseini, M. Zanaska, M. Adriaans, M. Raadu, T. Minea*, J. Gudmundsson, D. Lundin Modeling of high power impulse magnetron sputtering discharges with graphite target Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, United States, 22.-27.05.2022 J. Fischer*, J.T. Gudmundsson, B.P. Hinriksson, M. Rudolph, D. Lundin A plasma chemical model of the copper HiPIMS discharge 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 J. Frenzel*, A. Kupferer, M. Zink, S.G. Mayr Adsorption of laminin and cellular response of neurons and glial cells on ion implanted titania nanotube scaffolds DPG Tagung der Sektion Kondensierte Materie, Regensburg, Germany, 04.-09.09.2022 A. Freyer, R. Heller, U. Helmstedt*, M. Naumann, L. Prager, U. Trimper, P. With Application oriented studies on photon-assisted coating technologies Fachgruppe Chemie, Universität Bayreuth, Germany, 08.03.2022 S. Glaß, M. Kühnert, B. Abel, A. Schulze* Tailored hydrogel wound patches prepared by controlled electron beam synthesis 16. ThGOT Thementage Grenz- und Oberflächentechnik & 13. Biomaterial Kolloquium, Zeulenroda, Germany, 14.-15.06.2022 R. Heinke*, M. Ehrhardt, J. Bauer, A. Lotnyk, P. Lorenz, R. Morgenstern, T. Lampke, T. Arnold, K. Zimmer Low surface damage laser processing of silicon by laser-induced plasma etching (LIPE) 2022 EMRS Spring Meeting, Online, 30.05.-03.06.2022 R. Heinke*, M. Ehrhardt, P. Lorenz, T. Arnold, K. Zimmer Using laser-induced plasmas as a tool for precise surface patterning with extremely low (sub) surface damage 23rd Int. Symposium on Laser Precision Microfabrication, Dresden, Germany, 07.-10.06.2022 S. Henkel*, C. Schulze, S. Frank, C. Letsch, J. Bliedtner, T. Arnold, H. Mueller, E. Raedlein Investigation on a novel process chain for manufacturing of freeform surfaces European Optical Society Annual Meeting 2022, Porto, Portugal, 12.-16.09.2022 K. Holste*, T. Henning, B. Nauschütt, P.J. Klar, D. Spemann, F. Scholze, C. Eichhorn, H. Leiter, P. Dietz, E. Bosch-Borras Endurance and coupling test of the RIT-µX 37th Int. Electric Propulsion Conf., Cambridge, MA, United States, 19.-23.06.2022 F. Hölzel* Optimization of diamond-turned RSA 501 surfaces for optical applications by ion beam treatment XXVII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleiten, Germany, 14.-18.03.2022 103

TALKS S. Mändl*, D. Manova Depth-resolved phase analysis using a combination of ion beam sputtering and in-situ x-ray diffraction MSE Congress - Materials Science and Engineering, Darmstadt, Germany, 27.-29.09.2022 D. Manova*, S. Mändl A combination of ion beam sputtering and in-situ x-ray diffraction as a method for depth-resolved phase analysis 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 H. Müller*, Th. Arnold Application of Atmospheric Plasma Jet as polishing tool for optical glasses 9th European Seminar on Precision Optics Manufacturing, Deggendorf Institute of Technology, Teisnach, Germany, Online, 04.-05.05.2022 Z. Niavarani*, D. Breite, B. Abel, A. Schulze Estradiol removal by adsorptive microfiltration membrane 14th Annual BuildMoNa Conf., Leipzig, Germany, 14.-15.03.2022 Z. Niavarani*, D. Breite, B. Abel, A. Schulze Synthesis of hybrid PES membranes via electron beam irradiation for selective removal of 17ß-estradiol from water Euromembrane 2022, Sorrento, Italy, 20.-24.11.2022 L. Pietzonka*, C. Eichhorn, F. Scholze, D. Spemann Laserinduzierte Fluoreszenzspektroskopie zur Messung der Geschwindigkeitsverteilungsfunktionen von Xenon-Ionen und -Neutralgasteilchen in der Entladungskammer einer RF-Ionenquelle XXVII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 14.-18.03.2022 L. Pietzonka*, C. Eichhorn, F. Scholze, D. Spemann Extraction of velocity distribution functions of neutrals and ions from laser-induced fluorescence spectra measured in the discharge chamber of a radiofrequency-driven xenon ion source 37th Int. Electric Propulsion Conf., Cambridge, MA, United States, 19.-23.06.2022 P. Räcke, J.W. Gerlach, J. Meijer, D. Spemann* Towards deterministic ion implantation for quantum technologies: Achievements and challenges XXVII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 14.-18.03.2022 M. Rudolph*, N. Brenning, H. Hajihoseini, M.A. Raadu, T.M. Minea, A. Anders, J.T. Gudmundsson, D. Lundin The influence of the magnetic field on the discharge parameters of a high power impulse magnetron sputtering discharge Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, United States, 22.-27.05.2022 M. Rudolph*, N. Brenning, H. Hajihoseini, M.A. Raadu, J.T. Gudmundsson, T. Minea, D. Lundin The energy cost of producing metal ions and neutrals in a magnetron sputtering discharge 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 105

TALKS 2023 T. Amelal, J. Bernstein, R. Feder, M. Mateev, L. Pietzonka, D. Spemann, C. Bundesmann* Particle properties in ion beam sputtering processes Hiden Plasma User Meeting 2023, Dresden, Germany, 29.11.2023 A. Anders* Fundamental aspects of plasmas used for thin-film processes Int. Symposium on Coatings for Energy, Ben Guerir, Morocco, 24.-29.11.2023 A. Anders* Engineering of surfaces with plasmas and ion beams: a historical perspective on physics and applications 15. BuildMona Conf., Leipzig, Germany, 20.-21.03.2023 A. Anders* I-V-Characteristics and the transition from glow to arc: Defining glow and arc discharges without resorting to current and voltage XXVIII. Erfahrungsaustausch Oberflächentechnologien mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 13.-16.03.2023 A. Anders* Glows, arcs and some specific considerations of discharge modes XXIII. Int. Conf.on Gas Discharges and their Applications, Greifswald, Germany, 10.-15.09.2023 A. Anders* Reactive sputter deposition: A perspective 19th Int. Conf. on Reactive Sputter Deposition, Leipzig, Germany, 11.-13.12.2023 A. Anders* Affecting density and microstructure of energy-relevant films with kinetic and potential energies of ions Int. Symposium on Coatings for Energy, Ben Guerir, Morocco, 24.-29.11.2023 T. Arnold*, H. Mueller, M. Ehrhardt, K. Zimmer, S. Henkel, C. Schulze, J. Bliedtner Plasma jet polishing of freeform optics CCUPOB 13th High-Level Expert Meeting - Asphere Metrology, Wetzlar, Germany, 28.-29.03.2023 T. Arnold*, J. Bauer, G. Boehm, F. Hoelzel, H. Mueller, F. Frost, F. Scholze, D. Spemann Ion beam and plasma jet etching technology at IOM Leipzig Leybold Optics IBF Open House Workshop, Leipzig, Germany, 31.03.2023 S.S. Babu*, M. Rudolph, D. Lundin, T. Shimizu, J. Fischer, J. Bradley, J. Gudmundsson Modeling of high power impulse magnetron sputtering discharges with tungsten target Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, United States, 21.-26.05.2023 J. Bauer*, A. Prager, J. Griebel Chemical XPS analysis of modified surfaces at the Leibniz-Institute of Surface Engineering (IOM) - Part I Kratos German User Meeting, Berlin, Germany, 25.10.2023 J. Bauer*, H. Hosseini, G. Dornberg, F. Frost Ion-beam induced nanostructuring on titanium surfaces World of Photonics Congress / SPIE Optical Metrology, München, Germany, 26.-29.06.2023 107

TALKS J. Fischer*, M. Renner, J.T. Gudmundsson, M. Rudolph, H. Hajihoseini, D. Lundin Angular distribution of ions and neutrals in high power impulse magnetron sputtering of titanium 3rd Plasma Thin Film International Union Meeting, Antibes, France, 11.-15.09.2023 K. Fischer*, A. Abdul Latif, J. Griebel, A. Prager, A. Schulze Photocatalytic removal of micropollutants from water via a visible light active Bi2WO6 polymer membrane 13th Int. Congress on Membranes and Membrane Processes, Chiba, Japan, 09.-14.07.2023 K. Fischer*, J. Lohmann, E. Schmidt, T.H. Blaich, C. Belz, I. Thomas, E. Vogelsberg, A. Schulze Application of synthetic hydrogels on polymer membranes via electron beam modification and its anti-biofouling properties - a fundamental and applied study 13th Int. Congress on Membranes and Membrane Processes, Chiba, Japan, 09.-14.07.2023 S. Frank*, M. Reichenbächer, M. Seiler, T. Arnold, J. Bliedtner Investigation on subsurface damage patterns in ultrashort pulse laser machining of glass using optical coherence tomography European Optical Society Annual Meeting, Dijon, France, 11.-15.09.2023 J. Frenzel*, A. Kupferer, S.G. Mayr Interaction of laminin and brain cells with ion implanted titania nanotube scaffolds DPG Frühjahrstagung der Sektion Kondensierte Materie, Dresden, Germany, 26.-31.03.2023 J.T. Gudmundson*, M. Rudolph, K. Barynova, J. Fischer, S.S. Babu, N. Brenning, M. Raadu, D. Lundin, H. Hajihoseini On the connection between the self-sputter yield and deposition rate in high power impulse magnetron sputtering Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, United States, 21.-26.05.2023 R. Heinke*, T. Arnold, M. Ehrhardt, P. Lorenz, K. Zimmer Combining atmospheric pressure plasma jet processing with pulsed laser ablation for ultra-precise processing of technical glasses 2023 EMRS Spring Meeting, Strasbourg, France, 29.05.-02.06.2023 R. Heinke*, M. Ehrhardt, P. Lorenz, T. Arnold, K. Zimmer Laser-assisted atmospheric pressure plasma jet etching of optical glasses 86. Jahrestagung der DPG und DPG-Frühjahrstagung der Sektion Materie und Kosmos, 20.-24.03.2023 F. Hölzel*, D. Rolón, J. Bauer, J. Kober, S. Kühne, D. Oberschmidt, T. Arnold Reactive ion beam figuring of rapidly solidified aluminium EUSPEN Special Interest Group Meeting: Micro/Nano Manufacturing, Ilmenau, Germany, 28.-29.11.2023 F. Hoelzel*, H. Mueller, G. Boehm, H. Paetzelt, T. Arnold Präzisionsbearbeitung mit plasmajet machining Plasma Germany Frühjahrssitzung, Leipzig, Germany, 26.-27.04.2023 A. Kupferer*, S. Friebe, P. Jauch, J. Frenzel, S. Kallendrusch, I. Nel, B. Aktas, S.G. Mayr Nanotube scaffolds: Versatile and customizable culture platform for primary cells and adult tissues 2023 MRS Fall Meeting & Exhibit, Boston, MA, United States, 26.11.-01.12.2023 109

TALKS P. Räcke*, D. Reinhardt, J. Meijer, D. Spemann Focused beams of highly charged ions for quantum technologies 3rd fit4nano Workshop, Lisboa, Portugal, 17.-19.07.2023 P. Räcke* Deterministische Einzelionenimplantation - Die Platzierung einzelner Atome für die Entwicklung von Quantencomputern 26. Tag der Technik an der Landesschule Pforta, Naumburg (Saale), Germany, 12.10.2023 P. Räcke*, N.F.L. Collins, S.G. Robson, A.M. Jakob, D. Reinhardt, J. Meijer, D.N. Jamieson, D. Spemann High-resolution characterisation of single ion IBIC detectors using a focused low-keV ion beam 2nd Int. RAISIN Meeting, Guildford, UK, 04.-08.09.2023 E. Rohkamm*, F. Scholze, D. Spemann, F. Frost Study of the energy and mass distribution of a broad ion beam: Insights into EQPs mass dependent transmission Hiden Plasma User Meeting 2023, Dresden, Germany, 29.11.2023 E. Rohkamm*, F. Scholze, D. Spemann, F. Frost Characterization of the reactive species of a RF-excited broad beam ion source XXVIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 13.-16.03.2023 D. Rolon*, F. Hölzel, J. Kober, S. Kühne, C. M. Vehmann, M. Tavares, T. Arnold, D. Oberschmidt Suitability of aluminium RSA-501 for manufacturing diffractive optical elements by shaping processes EUSPEN 23rd Int. Conf. & Exhibition, Copenhagen, Denmark, 12.-16.07.2023 T. Rüdiger, M. Mitzschke, A. Prager, Y. Liu, B. Abel, A. Schulze, F. Frost* Ion incidence angle dependent pattern formation at AZ 4562 photo resist by (reactive) ion beam etching XXVIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 13.-16.03.2023 M. Rudolph* Lean plasma models for deposition processes Leibniz MMS Days 2023, Potsdam, Germany, 17.-19.04.2023 M. Rudolph*, P. Birtel, T. Arnold, A. Prager, S. Naumov, U. Helmstedt, A. Anders, P.C. With Konversion von PHPS-Präkursorschichten zu dichten SiOx-Schichten durch Plasmen bei Atmosphärendruck 43. Workshop des Anwenderkreis Atmosphärendruckplasma, Leipzig, Germany, 26.-27.04.2023 M. Rudolph*, N. Brenning, H. Hajihoseini, M.A. Raadu, J. Fischer, J.T. Gudmundsson, D. Lundin Operating modes and target erosion in high power impulse magnetron sputtering HiPIMS Today - Recent Developments in High-Power Impulse Magnetron Sputtering, Linköping University, Linköping, Sweden, Online, 22.-24.03.2023 T. Scherzer*, O. Daikos Hyperspectral imaging for process control in coating and finishing technology 21st Int. Conf. on Near Infrared Spectroscopy, Innsbruck, Austria, 20.-24.8.2023 111

POSTERS Posters 2022 S.S. Babu*, M. Rudolph, T. Shimizu, D. Lundin, N. Brenning, M.A. Raadu, J.T. Gudmundsson Ionization region model of a high-power impulse magnetron sputtering discharge of tungsten 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 J. Bauer*, M. Ehrhardt, P. Lorenz, K. Zimmer Complementary XPS and ToF-SIMS Analysis of Laser-induced Plasma etched Germanium Surfaces 18th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 12.-15.09.2022 N. Braun, V. Roddatis, A. Mill, S. Cremer, H. Bryja, L. Voß, S. Sun, L. Kienle, W. Zhang, A. Lotnyk* Preparation and characterization of Cu-Te phases synthesized by focused ion beam method 2022 MRS Fall Meeting & Exhibit, Boston, MA, United States, 27.11.-02.12.2022 S. Cremer, L. Voß, N. Braun, L. Kienle, A. Lotnyk* Growth and microstructure of GeTe-Sb2Te3 heterostructures deposited by pulsed laser deposition 2022 MRS Fall Meeting & Exhibit, Boston, MA, United States, 27.11.-02.12.2022 O. Daikos, A. Volland, T. Scherzer* Comparison of a NIR camera and a NIR multiplex spectrometer system for in-line monitoring of textile finishing processes by hyperspectral imaging IASIM 2022 - Conf. on Spectral Imaging, Esbjerg, Denmark, 03.-06.07.2022 O. Daikos, G. Mirschel, T. Scherzer* In-line monitoring of finishing and lamination processes of black textiles by NIR hyperspectral imaging IASIM 2022 - Conf. on Spectral Imaging, Esbjerg, Denmark, 03.-06.07.2022 E. Gärtner*, J. Edelmann, C. Hackl, L. Roussak, L. Tomasova, Z. Guttenberg, S. Gnüchtel UV-Imprint of micro-textured polymer films for biomedical disposables EUSPEN, 22nd International Conference & Exhibition, Geneva, Switzerland, 30.05.-03.06.2022 A. Kupferer*, A. Holm, A. Lotnyk, S. Mändl, S.G. Mayr Compositional patterning in carbon implanted titania nanotubes 2022 MRS Spring Meeting & Exhibit, Honolulu, HI, USA, 08.-13.05.2022 K.H. Leopold*, D. Breite, A. Prager, N. Schönherr, L. Drößler, S. Weiß, M. Schmidt, M. Went, D. Enke, A. Schulze In-situ hydrophilization of hollow fiber membranes using electron beam grafting Euromembrane 2022, Sorrento, Italy, 20.-24.11.2022 F. Linß*, P. Birtel, D. Manova, F. Frost Manipulation of silicon etching with surfactant sputtering 22nd Int. Conf. on Ion Beam Modification of Materials, Lisboa, Portugal, 10.-15.07.2022 D. Manova*, S. Mändl In-situ x-ray diffraction for elucidating the initial formation of expanded austenite during ion nitriding 22nd Int. Conf. on Ion Beam Modification of Materials, Lisboa, Portugal, 10.-15.07.2022 113

POSTERS E. Bez, P. Lorenz, M. Himmerlich, M. Ehrhardt, S. Amoruso, J. J. Nivas, M. Valadan, M. Taborelli, A. Anders, K. Zimmer* Secondary electron yield engineering of copper using ultra-short laser pulse irradiation 2023 EMRS Spring Meeting, Strasbourg, France, 29.05.-02.06.2023 P. Birtel*, F. Linß, F. Frost Influence of water background on the etching rate of silicon and photoresist of a broad reactive ion beam 66th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication, San Francisco, CA, United States, 30.05.-02.06.2023 N. Braun*, V. Roddatis, A. Mill, S. Cremer, H. Bryja, L. Voß, S. Sun, L. Kienle, W. Zhang, A. Lotnyk Phase transitions in Cu-Sb2Te3 thin film systems induced by focused ion beam milling Microscopy Conf. 2023, Darmstadt, Germany, 26.02.-02.03.2023 N. Braun*, V. Roddatis, A. Mill, S. Cremer, H. Bryja, L. Voß, S. Sun, L. Kienle, W. Zhang, A. Lotnyk Microstructural characterization of layered Cu-Te structures synthesized by focused ion beam 3rd fit4nano Workshop, Lisboa, Portugal, 17.19.07.2023 N. Braun*, V. Roddatis, A. Mill, S. Cremer, H. Bryja, L. Voß, L. Kienle, A. Lotnyk Preparation and characterization of Cu-Te phases using focused ion beam DPG-Frühjahrstagung der Sektion Kondensierte Materie, Dresden, Germany, 26.-31.03.2023 S. Cremer*, L. Voß, N. Braun, L. Kienle, A. Lotnyk Microstructure of GeTe-Sb2Te3 heterostructures grown by pulsed laser deposition Microscopy Conf. 2023, Darmstadt, Germany, 26.02.-02.03.2023 S. Cremer*, L. Voß, N. Braun, L. Kienle, A. Lotnyk Microstructure investigation of pulsed laser deposited GeTe-Sb2Te3 heterostructures DPG-Frühjahrstagung der Sektion Kondensierte Materie, Dresden, Germany, 26.-31.03.2023 S. Cremer*, L. Voß, N. Braun, L. Kienle, A. Lotnyk Influence of deposition parameters on the microstructure of GeTe-Sb2Te3 heterostructures grown by pulsed laser deposition 2023 EMRS Spring Meeting, Strasbourg, France, 29.05.-02.06.2023 J. Fischer*, J. T. Gudmundsson, M. Rudolph, F. Thompson, D. Lundin Flux composition in reactive high-power impulse magnetron sputtering of Ti in an Ar/N2 atmosphere 19th Int. Conf. on Reactive Sputter Deposition, Leipzig, Germany, 11.-13.12.2023 A. Kahnt*, J. Gransee, J. Griebel, S. Naumov, B. Abel, S. Eigler Radiation chemical functionalization of reduced graphene oxide 32nd Miller Conference on Radiation Chemistry, Furiani, France, 03.-08.06.2023 D. Kalanov*, Y. Unutulmazsoy, J.W. Gerlach, A. Lotnyk, J. Bauer, A. Anders, C. Bundesmann Reactive ion beam sputter deposition of heteroepitaxial Ga2O3 thin films 19th Int. Conf. on Reactive Sputter Deposition, Leipzig, Germany, 11.-13.12.2023 D. Kalanov*, Y. Unutulmazsoy, J.W. Gerlach, A. Lotnyk, J. Bauer, A. Anders, C. Bundesmann Ion beam sputter deposition of epitaxial Ga2O3 thin films on C-plane Al2O3 3rd Plasma Thin Film International Union Meeting, Antibes, France, 11.-15.09.2023 115

POSTERS M. Schmidt*, A. Abdul Latif, A. Prager, A. Schulze Modelling of polymer membrane surface functionalization 1st Conf. on Artificial Intelligence in Materials Science and Engineering AIMSE 2023, Saarbrücken, Online, Germany, 22.-23.11.2023 Y. Unutulmazsoy*, D. Kalanov, K. Oh, S. Karimi Aghda, J.W. Gerlach, J.M. Schneider, A. Anders Towards decoupling the effects of the kinetic and potential ion energies on microstructure of thin films deposited by pulsed filtered cathodic arc 20th Plasma Technology Conf., Bochum, Germany, 27.-29.03.2023 L. Voß*, S. Cremer, N. Braun, L. Kienle, A. Lotnyk Temperature induced volume change in GeTe-Sb2Te3 heterostructures below the crystallization temperature European Phase Change and Ovonic Symposium, Rome, Italy, 17.-20.09.2023 P.C. With, M. Rudolph, P. Birtel, T. Arnold, A. Prager, S. Naumov, A. Anders, U. Helmstedt Plasma conversion of polydimethylsiloxane and perhydropolysilazane precursor layers by a pulsed atmospheric pressure plasma jet to a silicon oxide thin film Micro and Nano Engineering Conference, Berlin, Germany, 25.-28.09.2023 S. Zahn*, O. Shayestehpour Reliable molecular dynamics simulations of deep eutectic solvents by machine learning force fields 1st Conf. on Artificial Intelligence in Materials Science and Engineering - AIMSE 2023, Saarbrücken, Germany, 22.-23.11.2023 117