Tailored Surfaces

Members of the Board of Trustees Free State of Saxony, Ministry of State of Science and Art represented by RD’in Cathrin Liebner (Chairwoman) Federal Republic of Germany, Federal Ministry of Education and Research represented by Dr. Peter Zimmer Association of the Leibniz Institute of Surface Engineering (IOM) represented by Dr. Karsten Otte Independend Expert Prof. Jochen M. Schneider, PhD, RWTH Aachen University Members of the Scientific Advisory Board Prof. Dr. Achim von Keudell (chairman) Ruhr-Universität Bochum Prof. Dr. Horst Hahn Karlsruher Institut für Technologie PD Dr. Bernd Herzog BASF Grenzach GmbH, Grenzach-Wyhlen Dr. Helmut Rudigier CTO of Oerlikon, Pfäffikon, Switzerland Prof. Dr. Andrea A. Robitzki Karlsruher Institut für Technologie Dr. Maren Büchner Carl Zeiss SMT GmbH, Ulm Prof. Dr. Céline Croutxé-Barghorn University of Haute-Alsace (UHA), France Dr. Nicolas Schiller Fraunhofer FEP, Dresden Prof. Dr. Mathias Ulbricht Universität Duisburg-Essen

Contents Preface Scientific and Technology Results Reports Plasma Jet Machining of Optical Glasses for Optics Manufacturing Development and Validation of Processes and Ion Source Technologies for the Processing of Advanced Lithography Optics Precise Machining of Materials by Laser-induced Plasma Etching Large-area Development Platform for Structured Functional Surfaces Cathodic Arc Processes: High-resolution Observation of Cathode Spots and Pulsed Filtered Cathodic Arc Deposition Functional Carbon Implanted Titania Nanotubes and Magnetic Responsive Collagen Hydrogels Radiation-Induced Graft Immobilization of Non-Vinyl Compounds on Polymer Membranes Paving the Way for Molecule-based Data Memories with Switchable Metal–oxo Clusters on Conducting Surfaces Utilizing Nanostructured Systems for Photoinduced H2 Formation Local Structure of Switchable Epitaxial Multilayers Grown by PLD Tayloring Color Centers in (Nano)Diamonds for Sensing Applications Global Modelling of High-power Impulse Magnetron Sputtering Discharges Molecular Features Contributing to the Non-ideal Mixing Behavior of Deep Eutectic Solvents Based on Urea Derivatives Laser-induced Fluorescence in the Discharge Chamber of a Gridded Ion Source Single Ion Implantation for Quantum Technologies A Combination of Ion Beam Sputtering and In situ X-Ray Diffraction as a Method for Depth- resolved Phase Analysis Topography, Grain Orientation, and Chemical Analysis of Technological Metallic Surfaces Infrared Spectral Imaging from Micro to Macro Dimensions Five Examples of the Supporting Activities of the Cross-sectional Unit “Material Characterization and Analytics” Equipment for Research and Application Personnel Activities Graduations Committee Work Honors Scientific Events Scientific Meetings co-organized by IOM Institute Colloquia Lecture Series Seminar Series Publications and Presentations Publications in Journals and Books Conference Proceedings Presentations Talks Posters Patents 7 17 18 18 20 22 24 26 28 30 32 34 35 36 37 38 39 40 41 42 43 44 47 63 64 69 71 73 74 74 75 76 79 80 100 102 102 108 111

PREFACE Preface The Leibniz Institute of Surface Engineering (IOM) is a member of the Leibniz Association. Its research focuses on engineering surfaces and thin films by ion beam, elec- tron, laser and plasma techniques. The institute performs “application-oriented fundamental research” at the inter- esting and rewarding interface of fundamental and ap- plied research with the goal of creating modified surfaces and new materials in economically relevant technology fields. The years 2020/21 were characterized by several re- markable developments and events. Remarkable resili- ence was shown in the face of the COVID-19 pandemic. Through careful observation of precautionary measures, the impact of lockdowns, travel restrictions and frequent mobile office work was relatively minor: Apart from a drastic reduction of presentations at conferences, re- search output was strong, and in terms of journal publica- tions, even at record highs. Other remarkable develop- ments are associated with the strategic decision to in- creasingly focus research activities on topics of great societal relevance while further developing our expertise of “beam tools” (ions, electrons, photons, plasmas). By combining our diverse expertise in physics, chemistry and engineering, we aim to develop unique solutions for the required engineered surfaces in our main research areas. These main research areas are: Ultraprecision surfaces Barrier coatings and precision thin films Biocompatible and bioactive surfaces Porous polymer membranes Functional surfaces and interfaces. Starting in 2021, research in these fields was reorganized in new Research Departments, which are supported by Cross-Field Units covering modelling and simulation, tool development, materials analysis and surface characteriza- tion, and technology transfer. This biennial report 2020/2021 presents selected scientific contributions, a brief overview of scientific life and compi- lations of published results. Some highlights in 2020 and 2021 were: After founding the spinoff company “qCoat GmbH“ in 2019, IOM researchers helped in commercializing electron-beam modified polymer membranes for the treatment of drinking and waste water. The lead sci- entist at IOM, Dr. Agnes Schulze was recognized by the 2nd place at the Saxonian Technology Awards in 2021. Development of TiO2 nanotube arrays to be used as biomimetric interfaces to complex biological tissue: This work is also the exploratory phase for forming another spinoff company, the concept of which won the Entrepreneur Prize of the City of Leipzig in 2021. was completed and a second lab for atmospheric pressure plasmas was initiated. The addition of at- mospheric pressure plasmas to the portfolio of surface engineering tools is to strategically support the work on barrier coatings and polymer membrane surface modifications, which, due to cost considerations, are always done at atmospheric pressure. Also with EFRE funds dispersed via the SAB, a new, large ion beam diagnostic platform was installed at the Application Center, enabling the development and characterization of broad beam ion sources. Just to indicate the scale: the system’s weight is 8 tons! Broad beam ion sources are needed, among other applications, for ultra-precision processing of large- scale objects. This is IOM’s contribution to the EU Horizon 2020 joint project “IT2 - IC Technology for the 2 nm node” where 34 partners develop, with total funding of 93.1 M€ (2020–2023), the technological basis for the 2-nm generation of microchips. Besides scientific achievements, IOM made strides in other fields. For example, revised technology transfer guidelines were developed and implemented. Technology transfer —one of the main objectives of research at IOM— is established as a system with many partners, contrib- uting to the success of our partners and representing an important part of our activities and third-party funding. Within its budget, the institute works to renew and up- grade its research equipment. Given the generous in- vestments over the last two decades, the needs to renew and improve are high and increasing. A highlight was the replacement of our well-used but dated high-resolution XRD equipment, now a state-of-the-art instrument with a sensitive 2D-decector. Researchers at IOM continued to be active outside “core research” by engaging in educating the next generation of researchers, especially in the framework of IOM’s Struc- tured Graduate Program. IOM renewed its formal certifi- cation as being “family-supportive” and has developed plans to increase its female staff at all levels. IOM would like to thank the Leibniz Association and all partners who supported its development. Special thanks go to the Board of Trustees, the Scientific Advisory Board, the Ministry of Science and Arts of the Free State of Sax- ony, and the Ministry of Education and Research of the Federal Government of Germany. Last but not least, I would like to thank the staff of the institute for their dedicated efforts and excellent contributions in the last two years. Leipzig, in Spring 2022 With EFRE funding via the Saxonian Development Bank (SAB), the vacuum-based plasma deposition lab Prof. Dr. André Anders Director

PREFACE CENTRAL GERMAN ALLIANCE GRAVOMER FOUNDS ASSOCIATION / With the foundation of the GRAVOmer Association on July 30, 2020, the prerequisites for a permanent establishment of the innovation network for functional surfaces have now been created. The aim of the association is to expand the activities and cooperations of technology providers, material manufacturers and users as well as to specifically design, coordinate and finance them. Jörg Günther, Managing Director of Sächsische Walzengravur GmbH, Stefan first and second chairman, Gramm, Managing Director of Herlac Coswig AG, were elected respectively, and Claudia Kostka, Head of Administration of the Leibniz Institute of Surface Engineering (IOM), was elected treasurer of the association. Other founding members include Sächsische Bildungsgesellschaft für Umweltschutz und Chemieberufe Dresden mbH, ACSYS Lasertechnik GmbH from Kornwestheim, Kaspar Walter GmbH & Co. KG from Krailling, BENEFIT Unternehmensentwicklung GmbH from Dresden and Haus E Werbeagentur from Chemnitz. CENTRAL GERMAN ALLIANCE GRAVOMER FOUNDS ASSOCIATION / In October 2020, IOM hosted the technical committee meeting 'Surfaces and Coatings in Bio- and Medical Technology' (FABM) of the European Thin Films Research Society (EFDS). The event focused on the discussion of current research topics, reporting on the progress of ongoing IGF projects and the presentation of outlines for new project applications. In addition to the exchange of experiences, the participants had the opportunity to get to know selected research areas of the IOM within the framework of a sightseeing visit. SAXON MINISTER OF STATE AND RECTOR OF UNIVERSITY OF LEIPZIG AT IOM / In November 2020, the Saxon Minister of State for Science, Mr. S. Gemkow and the Rector of the University of Leipzig, Prof. Dr. med. B. Schücking met with representatives of the Leipzig Science Network e.V. (LSN) at the Science Park Leipzig to exchange views on the Excellence Strategy of the Federal Government 2025. This was followed by a short tour of the science facilities located on the site, during which the guests were informed about the latest developments at the individual institutes with a view to initiating or continuing joint research projects under the Excellence Initiative. At the IOM, the visitors toured the Leibniz Joint Lab "Single Ion Implantation", which is operated jointly with the Department of Applied Quantum Systems at the University of Leipzig.

PREFACE SAXON TRANSFER AWARD 2021: TWO AWARDS FOR TECHNOLOGY TRANSFER AT THE IOM / At the Saxon Innovation Conference 2021, Dr. Agnes Schulze was awarded the Saxon Transfer Award as runner-up for her transfer performance with model character in the project "Refined membrane filters for sustainable purification of drinking and waste water". The technology of subsequent and permanent modification of polymer membranes in a roll-to-roll process was transferred to the market in May 2019 with the IOM spin-off qCoat GmbH. The Special Award for Technology Mediators was given to Yvonne Bohne, a scientist at the IOM, for her commitment to technology transfer in this project. STUDENTS OF BROCKHAUS-GYMNASIUM LEIPZIG AND OF A GYMNASIUM FROM DRESDEN VISIT IOM / A total of 30 interested 11th grade students and teachers visited the IOM in July and September 2021 to get to know modern measuring and processing techniques as well as various research topics at the IOM in direct dialog with the institute's staff. On tours through the IOM, the guests gained insights into selected laboratories as well as an overview of the specialist areas of membrane modification, film coating, ion beam-assisted structuring and smoothing, laser processing and material characterization, and analytics. „LANGE NACHT DER WISSENSCHAFTEN“ AT THE IOM IN JULY 2021 / The event took place online for the first time and the IOM invited all interested parties to virtually look over the shoulders of the researchers live from home and to participate interactively. Via remote mode, viewers were offered insights into a high-tech ion beam facility, among other things, as well as the experience of an Escape game in the membrane laboratory. With the support of Escape Leipzig, our experts on site, acting as so-called 'avatars' with the camera, made it possible to present science in a different way.

PREFACE STRATEGY DAY AT THE IOM / The first Strategy Day at the IOM took place in November 2021 aimed to inform and involve all employees about the future and strategic direction of the IOM and to provide an opportunity for dialog promoting a common understanding of the IOM's strategy. At various booths, the focus areas of the strategy as well as the procedure for the development of the results were presented by the IOM executives and discussed with the participants in a lively manner and feedback was collected. Finally, there was a summary of the stand discussions, with impulses to further develop the IOM strategy. TRILATERAL WORKSHOP „LEIPZIG-CHEMNITZ-WILDAU“ AT IOM / The first kick-off event with the Leipzig University, TU Chemnitz, Fraunhofer ENAS and TH Wildau took place at the IOM in November 2021. Under the leadership of Dr. Kirill Monakhov, group leader of the IOM working group "Switchable molecularly functionalized surfaces", the scientific exchange of researchers chemical functionalization of surfaces: From basics to applications in nanoelectronics". In doing so, the interdisciplinary consortium set the goal of focusing joint efforts on the exploration of new phenomena at molecule-surface interfaces and on the integration of molecular logic technology into practical devices. "Nanostructuring and focused on the topic IOM RESEARCH TEAM WINS FOUNDER'S PRIZE AT LEIPZIG FOUNDERS' NIGHT / The team 'NanoTubeTEC' around Sabrina Friebe, Astrid Kupferer, Philine Jauch and Suzanne Arnold could successfully prevail against 34 teams and individuals at the idea competition of the Leipzig Founders' Night, in November 2021. They won the Founders' Prize in the category 'Idea', which is endowed with 3,000.00 Euros. In the Founders' Duel, NanoTubeTEC, a start-up project of the Leibniz Institute of Surface Engineering IOM) and the University of Leipzig, convinced the audience with the development of substrates that ensure organotypic long-term culture of different tissues to improve drug research and identify patient-specific therapy options. Photo: Albrecht Voss/ Werbefotografie

PREFACE COMPATIBILITY OF CAREER AND PERSONAL LIFE / The COVID-19 pandemic dominated highly the personal and work life in 2020/21. Many employees had to tackle the challenge of home schooling and day care of their children while working at the same time. The IOM reacted fast and in a professional way. Mobile working and a large investment in the technical infrastructure (laptops, VPN access) allowed us adjusting to the situation. Individual adaptions and regulations to the situation helped parents to master the difficult times, although one cannot deny that the double load for parents may have let to disadvantages for individual careers, especially for mothers as they are often the main caretaker for children. The measures for a better work and personal life balance at the IOM are regularly assessed and implemented within the certification process “auditberufundfamilie” (“audit work and family”). Flexible working, the use of a parents child room, the organization of meetings and scientific colloquia within core working hours and in digital format (online meetings), individualized support in challenging family situations, as well as support of families during working times in other countries are examples for improving the work and personal life at the IOM. Employees who can successfully balance work and personal life are the most valuable asset for the success of the IOM.

Scientific and Technology Results Reports

ULTRA-PRECISION SURFACES REPORTS (a) (b) termined as a function of radial distance, as the plasma‐generated fluorine flux has a characteristic spatial distribution (see Figure 2). The derived model was extended to a dynamic etching process such as line and area etching using a numerical simulation ap- proach, and the outcomes were compared with exper- imental results. By introducing the model, it is possible to account for the effect of the residual layer and sur- face temperature to predict correct etching profiles de- pending on the applied dwell time (see Figure 3). Since standard deconvolution algorithms to calculate correct local dwell times for a deterministic machining process are not applicable as the convolution kernel varies depending on the etching depth, a recursive nu- merical algorithm inspired by the van Cittert deconvo- lution scheme has been developed. Based on a target material removal and an initial estimation of a tool func- tion the resulting dwell time matrix is calculated using the standard deconvolution algorithm. By simulation of the areal removal incorporating the nonlinear tool func- tion, the theoretical machining error is determined. In a next step the target removal is modified according to the machining error yielding the correct dwell times af- ter several iterations. On the example of a mathemati- cal freeform prescription with PV of 1.00 μm the algo- rithm has been tested. In order to validate the devel- oped procedure, the calculated dwell time matrix has been employed in a machining process. The experi- mental result of the etched surface (after wet cleaning to remove the residual layer) yields a PV of 1.01 μm and agrees well with the targeted surface form. Thus, the developed recursive dwell time calculation method has been proven to be feasible for deterministic plasma jet-based surface machining. Figure 4: (a) Target freeform prescription, (b) experimental result, (c) comparison of cross sections of simulated freeform and theoret- ical machining errors (difference) The processing scheme has been further applied for figure error correction of an optical element made of S- BSL7 glass having dimensions of 220 mm x 35 mm. Since a constant surface temperature of 350°C could not be ensured due to inhomogeneous heating and the cooling influence of natural convection, the tempera- ture dependence of the etching rate has been taken into account in the applied etch rate function. Local sur- face temperatures have been simulated by a Finite El- ement Model and successfully implemented in the sur- face figure error correction process. It has been demonstrated that figure error of an S-BSL7 optical el- ement can be reduced by up to 74%. Acknowledgements The authors would like to thank Toni Liebeskind and Dr. Georg Böhm for their valuable support and discus- sions. The work was funded in parts by the BMBF in the framework of initiative (03IPT706X). Innoprofile Transfer the Figure 3: (a) simulated areal etching using constant scan velocity (b) experimental etching result, (c) comparison of simulated and experimental cross sections along x direction, (d) comparison of cross sections along y-direction. Literature [1] F. Kazemi, G. Böhm, T. Arnold, Plasma Process Polym. 17 (2020) 2000016. [2] F. Kazemi, G. Böhm, T. Arnold, Plasma Process Polym. 18 (2021) 2000218. [3] F. Kazemi, G. Böhm, T. Arnold, Precis. Eng. 72 (2021) 205- 214. [4] F. Kazemi, T. Arnold, P. Lorenz, M. Ehrhardt, K. Zimmer, Appl. Surf. Sci. 515 (2021) 149339. 19

ULTRA-PRECISION SURFACES REPORTS density profile measurements as well as individual etching tests over a long test period (figure 3). In addition, ESMS has been used to investigate the ion beam composition and the ion energy distribution within the ion beam. Figure 4 shows an example of the ion energy distribution during operation of the ion source with Ar. Work has currently started on address- ing ion optics erosion and coating effects in the ion source with respect to the stability and reproducibility of the process. Optimization of material removal rates and throughput In this work package, it was demonstrated that an in- crease in removal rates is possible at defined back- ground pressures and/or optimized ion source param- eters with minimal source degradation. In particular, the gas flow rate into the ion source as well as the beam voltage have a significant effect on the increase of the removal rates. Compared to the current baseline process, an increase in the volume removal rate of 65% is possible, although it still must be examined whether the other process specifications are also ful- filled in the process. Studies on the ability to combine etching and smoothing steps An important question was also whether it is possible during the actual etching step not only to achieve a re- moval but also a smoothing of the surface or to realize a smoothing by subsequent ion beam steps. In exten- sive tests, carried out in close cooperation with our partner ZEISS, we were able to demonstrate that the surfaces of both variants can be smoothed using inert gases as well as process gas mixtures. A reduction in roughness by more than a factor of 6 could be achieved. The transfer of the results to the pattern Figure 4: (top) Broad beam ion source pointing at the orifice of the energy-selective mass spectrometer and (bottom) ion energy dis- tribution at M/Z = 40 amu for the use of Ar as process gas. The spectrum shows a low-energy contribution at space charge poten- tial of the ion beam, which can be related to charge exchange pro- cesses outside the ion beam source, and a bimodal high-energetic contribution originating from the plasma discharge inside the ion beam source. transfer process while retaining all other specifications is the subject of further work. Acknowledgements We would also like to thank all colleagues who contrib- uted in this project, especially Ronny Woyciechowski, Jens Knipper, Marco Müller and of course the IOM workshop. This project has received funding from the ECSEL (Electronic Components and Systems for European Leadership) Joint Undertaking (JU) under grant agree- ment No 875999. The JU receives support from the European Union’s Horizon 2020 research and innova- tion program and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. Figure 3: Change of half-width (normalized FWHM) of the ion cur- rent density distribution with ion source operating time and with dif- ferent gases or gas mixtures. A minimum change in tool function is essential for long machining times. [1] https://cordis.europa.eu/project/id/875999. [2] https://www.elektronikforschung.de/projekte/it2. [3] E. Rohkamm, D. Spemann, F. Scholze, F. Frost, Journal of Ap- plied Physics 129 (2021), 223305. Literature 21

ULTRA-PRECISION SURFACES REPORTS i ] n m m µ / [ e t a r h c t E 10 8 6 4 2 0 Ge TiO2 SiC SiO2 ] m µ [ h t p e d i g n h c t E 3.0 1.5 0.0 5 10 Time [min] 15 a) 300 500 400 600 Pulse energy [µJ] lattice constant quartz: 0.5 nm ] m µ [ h t p e d i g n h c t E 4 3 2 1 0 b) 0 100 Temperature [°C] 200 300 67 50 33 17 SiO2 0 c) SiO2 700 ] l e s u p m p / [ e t a r i g n h c t E Figure 3: Selected dependencies of the etching process on the processing parameters. The lines are guide for eyes or fitted functions. Typical characteristics of the etching process in de- pendence on selected experimental parameters are shown in figure 2. First the etching rate from the pro- cess time is shown (a). The decrease of the etching rate can be related to two effects: (i) change of the etching conditions, e.g. the local substrate temperature and (ii) the groove depth that has impact to the species transport. The different etching rates are related to the different reactivity of the laser-activated species for the specific material. It has to be noticed, that different etching rates can be achieved for a material with other gas mixtures and different gas compositions. The plasma activation results by absorbing the laser pho- tons in the gas mixture by multiphoton processes. This suggest an exponential increase of the plasma density with the pulse energy which is not observed in the ex- periments as seen in (b). Hence in addition to the pri- mary laser photon excitation of gas components further processes need to be considered for revealing the whole mechanism. Helpful information is currently gathered by in-situ measurements of the transient plasma parameters and substrate temperatures. These data may allow, after combining them, to feed into the surface reaction mechanism that is governed by an Arrhenius equation. Due to the pulsed laser all involved processes have a high dynamic so that also the etching should be transient. For very long times etching processes can be neglected as the precursor gases are inert. In general, the mechanism involves various physical as well as chemical processes so that the etching rate of a material should show a tempera- ture dependence at a particular set of experimental pa- rameters. Experimental measurements of the etching rate on the temperature shown in (c) reveal clearly an exponential dependence. By fitting to the experimental data an activation energy for the LIP SiO2-etching pro- cess of 18 kJ/mol has been calculated. This rater low activation energy but is typical for plasma etching pro- cesses as comparisons to low pressure ion etching re- veal similar activation energies. It is worth to note, that the calculated average material removal depth per laser pulse of 10 to 50 pm is much less the lattice constant of quartz (roughly 0.5 nm) so that an extremely high depth precision can be achieved that advise laser-induced micro plasma etching pro- cesses for ultraprecise surface machining. Conclusion Laser-induced micro-plasma etching is a new laser- based technique for high quality surface machining of surfaces and fulfills, as demonstrated, the require- ments of ultraprecise machining technologies. In par- ticular atomic level machining precision and the ne- glectable, near-surface material modifications qualify this new machining process for applications in optics, ultraprecise mechanics, and tuning of thin films and surfaces to picometer precision. Acknowledgements We would like to thank all involved IOM colleagues as- sisting the work with measurement, discussions and equipment. The work was funded in parts by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) – No. 392226212 and No. 453925455. Literature [1] M. Ehrhardt, P. Lorenz, B. Han, K. Zimmer, Laser-induced reactive microplasma for etching of fused silica, Appl Phys a- Mater 126 (2020) 9. [2] R. Heinke, M. Ehrhardt, P. Lorenz, K. Zimmer, Dry etching of monocrystalline silicon using a laser-induced reactive micro plasma, Applied Surface Science Advances 6 (2021), 100169. [3] M. Ehrhardt, P. Lorenz, J. Bauer, R. Heinke, M.A. Hossain, B. Han, K. Zimmer, Dry Etching of Germanium with Laser Induced Reactive Micro Plasma, Lasers in Manufacturing and Materials Processing 8 (2021), 237-255. [4] K. Zimmer, M. Ehrhardt, P. Lorenz, X. Wang, P. Wang, S. Sun, Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas, Ceramics International, 48 (2022) 1, 90-95. [5] K. Zimmer, M. Ehrhardt, R. Böhme, Laser-Induced Backside Wet Etching: Processes, Results, and Applications, in: G. Yang (Ed.) Laser Ablation in Liquids, Pan Stanford Publishing Singapore (2012), 1013 - 1132. 23

BARRIER AND PRECISION COATINGS REPORTS Amongst the biobased systems under research, those derived from itaconic acid are extremely inter- esting. Itaconic acid is structurally similar to acrylic and methacrylic acid but provides two acid function- alities instead of one.[3] Thus, next to radical polymerization the molecule can be derivatized via polycondensation reactions, resulting in an even broader tunability of materials properties. These days itaconic acid is mainly produced by fermenta- tion of sugars with molds and is gaining importance in the polymer´s industries. The worldwide produc- tion was estimated to be around 80 000 tons per year with a price of around 2 US$ per kg already in 2015.[4] Despite this versatility only few scientific investiga- tions concerning its use in UV-curable coating formu- lations are public. In first experiments we prepared liquid polymers by polycondensation reactions. The resulting itaconic acid esters were characterized by 1H-NMR spectroscopy, acid value determination and rheometry. The resulting monomers were formulated with biobased reactive diluents and different photoin- itiators. Those formulations were investigated with respect to their influence on the UV-curing process and the material properties, like residual double bond content, free surface energy and indentation hard- ness. We were able to develop a formulation that compares to commercially available fossil fuel-based UV-curables with respect to viscosity and free sur- face energy, allowing first successful replications by the UV-Imprint process in a plate-to-plate mode on laboratory scale (Fig. 2c and d). Based on this work IOM can strengthen its compe- tencies concerning structured functional surfaces and offers interested companies a platform to inves- tigate material-structure relationships in an efficient manner with the goal to stimulate ideas among tech- nology partners and applicants. Acknowledgements Financial Support of the Federal Ministery of Educa- tion and Research (BMBF) for the project “WIR! – GRAVOMER – Ertüchtigung der Technologieplatt- form” (FKZ: 03WIR2003A) is highly acknowledged. Literature [1] Smart Surfaces Global Market Trajectory & Analytics, May 2021, Global Industry Analysts, Inc. [2] a) M. Ehrhardt et al., Appl. Surf. Sci. (2020) 506,144785; b) A. Mayer et al., J. Vac. Sci. Technol., B (2019) 37, 061601; c) C. Elsner et al., Microelectron. Eng. (2011) 88, 60. [3] T. Robert, S. Friebel, Green Chemistry 18 (2016) 2922. [4] Market Report Itaconic Acid, 2015, Transparency Market Re- search. 25 Figure 3: Demonstrator for the effect of the same surface struc- ture on surfaces of different surface energy (original silicon sur- face and hydrophilic coating). Above mentioned flexible masters can be easily im- plemented into our in-house modular roll-to-roll coater in pilot-scale and replicated in continuous manner. Large-area demonstrators can be produced on web-widths up to 500 mm at speeds between 1 and 10 m min-1. State of the art LED-curing systems at different wavelengths are available (Fig. 2b). With this system we were able to prepare demonstra- tors for different surface properties, like hydro- or ole- ophobic, light manipulating drag-reducing surfaces, by choosing appropriate material-structure combina- tions. Exemplarily, Figure 3 shows results demon- strating one approach to hydrophilize silicone sur- faces. Hydrophilic surfaces are of increasing importance, as industrial processes more and more use water-based liquids instead of solvent based systems. As the results demonstrate, only the com- bination of specific structures with a hydrophilic coat- ing led to the desired wetting of silicone. The third component of the development platform is material development. Coating materials in use for UV-Imprint processes comprise of resins based on fossil fuels, e.g. acrylic- or epoxy-based resins. Those are complex mixtures of monomers or oligomers with different functionality and are converted into polymeric coatings via free radical or cationic polymerization processes with the help of photoinitiators. The increasing demand for bio-based and biodegradable products, expected to replace their petrochemical counterparts in the future, has also reached the coatings industry. This is mostly driven by a pile-up of polymeric waste in the environment, raising public awareness and the possibility of reducing dependency on imports of fossil fuels. UV-curable formulations for imprint processes have to meet various criteria: high adhesion to substrate material, low adhesion to the structure master, low viscosity, low brittleness and fast UV-curing.

BARRIER AND PRECISION COATINGS REPORTS Acknowledgements The projects presented here are partially funded by the Leibniz Collaborative Excellence Project No. K128/2018. We gratefully thank the team of the Plasma Engineering Group and, in particular, Uwe Gey, Jens Knipper, and Peter Birtel. Our collaborators in Aachen RWTH, Prof. Jochen M. Schneider, and Soheil Karimi Aghda are acknowledged for fruitful dis- cussions. Literature [1] A. Anders, Cathodic Arcs: From Fractal Spots to Energetic Condensation. Springer, New York, 2008 [2] K. Oh, D. Kalanov, A. Anders, Proc. of 29th Int. Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) (2021) 222-225 [3] K. Oh, D. Kalanov, A. Anders, Plasma Sources Sci. Technol. 30 (2021) 095005 [4] K. Oh, D. Kalanov, P. Birtel, A. Anders, J. Appl. Phys. 130 (2021) 183304 [5] S. Karimi Aghda, D. Music, Y. Unutulmazsoy, H. H. Sua, S.Mràz, M. Hans, D. Primetzhofer, A. Anders, J. M. Schneider, Acta Materialia 214 (2021) 117003 Substrate holder Mass spectrometer Mini gun Macroparticle filter Figure 2: a) Custom designed filtered cathodic arc deposition system, b) Inside of the chamber during a deposition process: Arc plasma transported through the macroparticle filter. generation of multiply charged metal ions, which help to form dense, adherent coatings and macroparticle- free smooth surfaces. The system is comprised of an arc plasma gun, an electromagnetic coil, wrapped around the anode, to enhance the ion charge states, a macroparticle filter to guide the plasma towards a substrate or a mass spec- trometer but without the plasma-contaminating “mac- roparticles”, a sample stage with the capability of bias- ing and heating, and high-current power supplies. The setup is partially shown in Figure 2. The arc plasma source and related components represent a deposition system customized for the goal of depositing cubic metastable ternary nitride films with different micro- structures and studying the similarities and the differ- ences between HiPIMS [5] and arc processes for the properties of deposited films. We have demonstrated that by utilizing a custom-de- signed filtered cathodic arc deposition system, the charge state of ions can be controlled by varying the magnetic field at the cathodic arc source and by chang- ing the nitrogen partial pressure. Energy distribution functions of multiply charged ions were measured in dependence on the magnetic field strength and the ni- trogen partial pressure using a selective mass-energy analyzer (Hiden EQP HE 1000) for cathode materials with different transition metal ratios, in particular V and Al. Using different chemical compositions of cathodes has certain effects not only on the chemical composi- tion of the deposited film but also on the crystal struc- ture of the film. The magnetic field applied at the arc source is found to be the primary tool to manipulate the ion charge state but also to affect the film crystallinity. Detailed surface and microstructural characterization of thin films are performed of by scanning electron mi- croscopy (SEM), energy dispersive X-ray spectros- copy (EDX), X-ray diffraction (XRD), X-ray reflectivity (XRR), atomic force microscopy (AFM) and thickness profilometer which confirms the reproducible film qual- ity, smoothness and high-quality of thin layers. 27

BIOCOMPATIBLE AND BIOACTIVE SURFACES REPORTS related to an Asaro-Tiller-Grinfeld-Srolovitz instabil- ity, emerging from the two-dimensional material flow. In addition, we show that sputtering and relocation effects are of minor importance for the viscous flow. Experimentally, effects of carbon and neon ion bom- bardment have been described by Kupferer et al. [3] It is shown, that not only tube shrinking changes the arrays morphology. Surface relaxation expresses it- self in smoothing on small and large scales, in the change of the carbon species in surface-near regions as well as in decrease of surface free energy upon carbon bombardment. Neon bombardment results in augmented effects due to higher ion mass and higher collision cross-sections. To address the effects of ion implantation on the in- ner surfaces of the tubular structure, scanning trans- mission electron microscopy was deployed. Thereby, the interplay of phenomenological effects were elucidated and published by Kupferer et al. [4]. Sputtering and relocation of atoms lead to plas-tic deformation, which is also connected to the introduc- tion of point defects and radiation-incuded viscous flow mentioned above. Hence, tube walls enlarge, bend and the array height decreases. In addition, amorphization and crystallization compete and result in more amorphous signals in surface-near regions, as well as the formation of rutile nanocrystallites within the tube walls. Moreover, the unique 3D struc- ture of the nanotubes promotes compositional pat- terning of oxide and carbide sub-systems, see Fig. 3. Molecular dynamics simulations, density functional theory calculations as well as an analytical model re- veal the limitation of the compositional patterning upon ion implantation to the particular case of nanostructures. Also, the special chemical composi- tion with native carbon and fluorine impurities is es- sential for the proposed phase separation. In addi- tion, the connected car-bon domains result in en- hanced conductivity. The specific resistance of the nanotube arrays decreases up to four orders of mag- nitude. In order to understand the irradiation-induced nano patterning processes at the atomic level, ab initio mo- lecular dynamics simulations were performed based on experimentally determined atomic compositions in titania nanotubes. Starting from an initial arbitrary disorder, carbon precipitates in chainlike clusters. This process requires high diffusivity, which is in- duced on these time scales by ion implantation. To demonstrate this effect on amorphous titanium diox- ide at the atomic level, collision cascades were sim- ulated using classical molecular dynamics. It was confirmed that thermal-spike-like regions cause tem- peratures significantly above the critical temperature Figure 3: Energy-dispersive X-ray analysis of scanning transmis- sion electron microcopy of carbon implanted titania nanotubes. Oxygen (magenta) and carbon (green) channels are overlaid. The 20 nm × 20 nm zoom-ins show that phase separation is more pronounced in surface-near regions, which were subjected to 1×1016 ions/cm2 at 60 keV followed by 1×1016 ions/cm2 at 150 keV. In contrast, substrate-near regions were only reached by 1×1016 ions/cm2 at 150 keV. Respective 2D Fourier transfor- mation supports the hypothesis of separated oxide and carbide domains. Image adapted from [4]. of the mode coupling theory (TC ~ 1492 K [5]), which was also identified for this system, for a few picosec- onds. In addition, a statistical evaluation showed on which different length scales ballistic and thermal dif- fusion act, which are induced by ion irradiation. An analysis of the emerging electronic ground states us- ing density functional theory simulations explains an increased conductivity of the nanoscale carbon structures due to energetically close states of the electrons associated with the carbon atoms, in com- bination with their spatial proximity. Acknowledgements We acknowledge our large collaboration network, presently in particular A. Weidner and S. Dutz, TU Ilmenau, for their respective contributions (see origi- nal publications for details). These projects were funded by DFG, BMBF, SMWK, EU within various re- search projects. Partly, the project was performed within the Leipzig Graduate School of Natural Sci- ences, Building with Molecules and Nano Objects (BuildMoNa). Literature [1] P. Jauch, A Weidner, S Riedel, N Wilharm, S Dutz, S.G. Mayr, Multifunct. Mater. 3 (2020) 035001 [2] Kupferer, A., Mändl, S., & Mayr, S. G. Materials Research Letters 9(11) (2021) 483-489 [3] Kupferer, A., Mensing, M., Lehnert, J., Mändl, S., & Mayr, S. G. Nanomaterials 11(9) (2021) 2458 [4] Kupferer, A., Holm, A., Lotnyk, A., Mändl, S., & Mayr, S. G., Advanced Functional Materials 31(35) (2021) 2104250 [5] Holm, A., & Mayr, S. G. Physical Review B 103(17) (2021) 174201 29

SURFACES OF POROUS MEMBRANE FILTERS REPORS Figure 2: Reactions of glycine with water radiolysis products. Most important are the highlighted structures. All values in- clude thermodynamic corrections and are given in kJ/mol. [1] addition, less reactive compounds with lower abun- dance such as H2 and H2O2 are formed due to in- spur recombination. Solvated electrons and hydroxyl radicals are considered to be most important for RIGI, while hydrogen radicals play a minor role due to their lower concentration. Computational calcula- tions showed that OH radicals are most important for RIGI at PVDF, but possible reactions with H radicals and solvated electrons were found, too. Reactions of EB-ionized PVDF in the presence of water revealed the formation of mid-chain and end-chain aliphatic radical species, as well as the generation of alkene groups. Thus, experimental data from the literature could be confirmed by theoretical modelling. Further- more, the release of HF (dehydrofluorination) is an essential part of PVDF radiation chemistry. Irradia- tion studies were performed to determine the HF amount released, and by extraction with a buffer, the amount of fluoride was determined using high-perfor- mance ion chromatography. The measurements re- vealed a strong correlation with the irradiation dose, whereby wetted samples had higher concentrations due to synergetic effects induced by water such as solvation of HF. The utilization of radical scavengers indicated that OH radicals produced by water radiol- ysis could slightly increase the dehydrofluorination. However, since the RIGI process uses aqueous im- pregnated PVDF membranes, water facilitates safer handling due to the solvation of HF, which is an ad- vantage over the otherwise occurring emission of HF gas. [1,4] A direct ionization of the model molecules, glycine and taurine, could be dismissed since the proportion of these solutes was overall small (below 1%), and thus, direct ionization and follow-up transformations are of minor importance. By employing DFT calcula- tions complemented by tight-binding MD simulations several reactive species could be proposed as reac- Figure 3: Most likely grafting structures for RIGI and PVDF due to radical recombination and alkene addition reactions, respec- tively. The orange color highlights the formed covalent bond. [1] tive products formed by OH radicals or solvated elec- trons (Figure 2). Primarily, H abstractions seemed to be the main mode of action, as well as elimination of, e.g., CO2 or NH3. The actual grafting as a formation of covalent bonds between PVDF and glycine or taurine can occur in two possible ways (Figure 3): (a) two adjacent radi- cals can recombine; or (b) solute radicals can add to a formed alkene group. The main pathway was found to be the radical recombination since these reactions are strongly exergonic and proceed without a signifi- cant activation energy. The successful grafting was confirmed by XPS with the highest N/C elemental ra- tio being 0.49% for glycine, and 0.57% for taurine, respectively. In both cases, the optimal conditions were an irradiation dose of 150 kGy and a 0.1% so- lution. Furthermore, hydrophobic chains attached to cations seemed to facilitate the binding. This study confirmed for the first time previous experimental re- sults by elucidating the underlying reaction mecha- nism. This enables the adjustment of reaction param- eters and the expansion of the RIGI process to mo- lecular catalysts or functional biomolecules. [1] Acknowledgements This work was supported by the Deutsche Bundes- stiftung Umwelt (DBU). The financial support by the Federal State of Germany and the Free State of Sax- ony, as well as the computational time from the ZIH Dresden is gratefully acknowledged. Literature [1] M. Schmidt, S. Zahn, F. Gehlhaar, A. Prager, J. Griebel, A. Kahnt, W. Knolle, R. Konieczny, R. Gläser, A. Schulze, Poly- mers (2021) 13, 1849. [2] A. Schulze, B. Marquardt, S. Kaczmarek, R. Schubert, A. Prager, M. Buchmeiser, Macromol. Rapid Commun. (2010) 31, 467. [3] M. Schmidt, A. Abdul Latif, A. Prager, R. Gläser, A. Schulze, Front. Chem. (2022) 9, 804698. [4] J. Forsythe, D. Hill, Prog. Polym. Sci. (2000) 25, 101. 31

SENSORY SURFACES AND FUNCTIONAL INTERFACES REPORS Literature [1] M. Moors, J. Warneke, X. López, C. de Graaf, B. Abel, K. Y. Monakhov, Acc. Chem. Res. 54 (2021) 3377–3389. [2] O. Linnenberg, M. Moors, A. Notario-Estévez, X. López, C. de Graaf, S. Peter, C. Bäumer, R. Waser, K.Y. Monakhov, J. Am. Chem. Soc. 140 (2018) 16635–16640. [3] S.K. Petrovskii, V.V. Khistiaeva, A.A. Sizova, V.V. Sizov, A.V. Paderina, I.O. Koshevoy, K.Y. Monakhov, E.V. Grachova, In- org. Chem. 59 (2020) 16122–16126. [4] M. Stuckart, N. V. Izarova, M. Glöß, J. Klose, C. Schmitz-An- toniak, P. Kögerler, B. Kersting, K.Y. Monakhov, Inorg. Chem. 60 (2021) 8437–8441. [5] R. Pütt, P. Kozłowski, I. Werner, J. Griebel, S. Schmitz, J. Warneke, K.Y. Monakhov, Inorg. Chem. 60 (2021) 80–86. distribution in the newly synthesized fully-oxidized hexavanadates decorated by phosphine-derivatized Au(I) moieties in a transoid fashion. An increasing number of V(3d) electrons by the injection of up to 4 electrons in the compounds resulted in a shift of elec- tronic density from the vanadium–oxo core to the outer organogold(I) fragments [3]. The experimental studies are currently underway to validate this find- ing. First promising preliminary results have already been obtained. In reduced metal–oxo structures containing vana- dium centers, vanadyl (VO2+) groups act as electron spin carriers, allowing for cooperative “molecular charge – redox – spin state” effects. Their incorpora- tion in the wheel-like metal–oxo structures, such as a newly synthesized multi-metallic compound con- sisting of the 39-tungsto-4-arsenate(III) unit and four integrated VIV centers [4], provides interesting oppor- tunities to use structurally isolated V(3d) states for multiple-state resistive switching. The intra- and intermolecular ground-state charge transfer observed between the electron-donor phthalocyaninato transition-metal/lanthanide moiety and the electron-acceptor Wells-Dawson-type metal–oxo cluster structure [5], where especially electron hopping may have yet undiscovered effect on the spin dynamics of metal–oxo clusters, empha- sizes again the far-reaching potential of the “molec- ular charge – redox – spin state” interplay. This find- ing shows a need to implement advanced quantum microscopy to shed light on cooperative electron charge–spin processes across the redox-active, mo- lecularly functionalized surfaces. This might lead to the development of nano-spintronic materials that store and transport digital data by means of stable and electrically accessible metal–oxo cluster’s charge/spin states. Studies of the multi-electron charge storage, transfer, and its switching for these donor-acceptor hybrid compounds are underway at present. Acknowledgements KYM acknowledges funding from the Deutsche For- schungsgemeinschaft (DFG) through the Emmy No- ether program. KYM, MM and BA also acknowledge funding from the Leibniz Association through the Leibniz Collaborative Excellence funding program (iMolKit). JW is grateful to the Volkswagen Founda- tion for a Freigeist Fellowship. 33

SENSORY SURFACES AND FUNCTIONAL INTERFACES REPORS Local Structure of Switchable Epitaxial Multilayers Grown by PLD A. Lotnyk, I. Hilmi, M. Behrens, A. Mill, B. Rauschenbach Chalcogenide-based phase change materials along GeTe-Sb2Te3 tine line are promising alloys for recon- figurable optical and photonic devices. Multilayered switchable GeTe-Sb2Te3 thin films have recently be- come a focus of interest due to their improved switch- ing characteristics, including low switching energy [1]. For epitaxial growth of the multilayers on Si(111), sputter deposition method and molecular beam epi- taxy need substrate temperatures (Ts) higher than 230 °C. On the other hand, pulsed laser deposition (PLD) offers a promising alternative since it allows thin film growth at high deposition rate and low Ts [2]. Since microstructure of chalcogenide-based multi- layer systems (MLS) their properties, knowledge of local structure of the MLS is central to understanding their properties and switching mecha- nisms in such artificially produced thin films as well as to further engineering of MLS with optimized mi- crostructure and advanced properties. Thus, this work reports the impact of Ts and the thickness of GeTe layers on local structure changes in epitaxial GeTe-Sb2Te3 multilayers grown on Si(111) sub- strates by PLD. Advanced electron microscopy utiliz- ing a combination of atomic-resolution scanning transmission electron microscopy (STEM) with en- ergy dispersive X-ray spectroscopy (EDX) was ap- plied to unambiguously reveal structure changes in the MLS at the atomic scale [3]. impacts The results showed epitaxial growth of GeTe-Sb2Te3 multilayers at Ts of 100 °C. However, pure GeTe lay- ers were not formed in the multilayers. Instead, Ge- rich Ge-Sb-Te (GST) structures with Te planes rang- ing between 10 and 19 are formed at Ts of 100 °C- 120 °C (Fig. 1(a)). GeTe layers are alloyed with 9% of Sb at Ts of 100°C, regardless of layer thickness. At Ts of 120 °C, thick Ge-rich GST layers are alloyed with up to 19% of Sb, while the composition of thinner GST layers is close to thermodynamically stable Ge2Sb2Te5 (GST225) structure. GST units are inter- calated with SBT building block and connected by van der Waals gaps (vdW), forming 2D-bonded lay- ered structures. In addition, cation layers in the GST units tend to form disordered Ge/Sb layers (Fig. 1(b)). Contrary, various layered vdW-bonded GST structures are formed at high Ts (185 °C - 220 °C). Atomic-resolution EDX showed disordered Ge/Sb cation layers in GST blocks. Thus, GST structures resemble the local atomic arrangement similar to low-energy layered GST crystal structures, where cation layers are Sb-rich in the outer layers and Ge- rich inside the individual building units [4]. Moreover, huge alloying in MLS led to the formation of GeSb2Te4 (GST124) grains Ts of 185 °C, while Ts ex- ceeding 220 °C resulted in the deposition of pure GST124 thin film. Figure 1: (a) Atomic-resolution HAADF-STEM image of the in- terface between Ge-rich Ge-Sb-Te and Sb2Te3 (SBT) building units. The white arrows mark vdW gaps while the red arrow points vacancy layer partially filled with Ge and Sb atoms. The continuous lines mark anion (Te) layers while the dashed lines show cation (mixed Ge/Sb) layers. The dashed box marks bi- layer stacking fault. The dashed arrow shows a Ge/Sb mixed layer to guide the transition from the vdW gap to the mixed layer. (b) Quantitative line profiles for Ge, Sb and Te elements ex- tracted from atomic-resolution EDX map. The insert shows a high-resolution HAADF-STEM image of a TEM specimen area used for the EDX mapping analysis. Atomic-resolution studies of optimized MLS sample with nominal thicknesses of 1 nm for GeTe and 3 nm for SBT layers deposited at Ts=200°C (similar to the reported in the literature MLS) revealed the formation of layered GST124, GST225, 7-Te- and 8-Te layered GST structures. Although average composition of the layered structures tends to be GST124, the struc- tures are off stoichiometry with Sb-deficiency that is compensated by an enrichment with Ge [3]. Moreo- ver, some GST structures contained vacancies. In conclusion, this work shows that the formation of layered GST building blocks towards energetically favorable layered GST structures in GeTe-Sb2Te3 multilayers is thermodynamically driven process, which cannot be prevented at high Ts, regardless of growing methods. However, PLD offers epitaxial growth of the multilayers at low Ts, at which the in- diffusion of Ge into SBT layers is largely restricted. In addition, the results of this work open a venue to further optimize the microstructure of crystalline MLS and should be addressed in the future. Literature [1] J. Feng, A. Lotnyk, H. Bryja, X. Wang, M. Xu, Q. Lin, X. Cheng et. al., ACS Appl. Mater. Interf. 12 (2020) 33397-33407 [2] H. Bryja, J.W. Gerlach, A. Prager, M. Ehrhardt, B. Rauschen- bach, A. Lotnyk, 2D Mater. 8 (2021) 045027 [3] A. Lotnyk, I. Hilmi, M. Behrens, B. Rauschenbach, Appl. Surf. Sci. 536 (2021) 147959 [4] A. Lotnyk, U. Ross, S. Bernütz, E. Thelander, B. Rauschen- bach, Sci. Rep. 6 (2016) 26724 35

MODELLING AND SIMULATION REPORTS Global Modelling of High-power Impulse Magnetron Sputtering Discharges M. Rudolph (IOM Leipzig), N. Brenning (KTH Stockholm), J. T. Gudmundsson (University of Iceland), M. Raadu (KTH Stockholm), H. Hajihoseini (University of Twente), A. Anders (IOM Leipzig), Tiberiu M. Minea (University Paris-Saclay), D. Lundin (Linköping University) High power impulse magnetron sputtering is the workhorse in ionized physical vapor deposition for producing dense and well-adhering thin films for a variety of applications. The parameter space in these pulsed discharges is large, which requires efficient methodologies to understand the link between the externally adjustable parameters and the plasma- physical and -chemical processes of the discharge that shape the growing thin film. Global discharge models can help to shed light on the processes in such a discharge at low computa- tional cost. The ionization region model (IRM) is a time-dependent global discharge model containing the plasma and sputtering physics necessary to de- scribe a HiPIMS discharge. It calculates spatially av- eraged discharge parameters, such as electron den- sity and energy. The latter is approximated by two Maxwellian distributions [1]. Excitation, ionization, penning and charge exchange reactions are de- scribed using rate coefficients. The energy balance from a limited reaction set is taken into account by using effective ionization energies, that include the energy loss from excitation and elastic collisions. The approximations used in this model render it compu- tationally efficient, enabling a quick expansion of the knowledge base. The link between the discharge and the growing film is described by two flux parameters, the deposition rate, normalized by the sputter rate, and the ionized flux fraction, describing the fraction of ions in the flux of film-forming species onto the substrate. These can be expressed analytically as a function of two internal discharge parameters, the probability that an atom sputtered off the target is ionized in the ionization re- gion and the probability that a target ion in the ioni- zation region is back-attracted towards the target. The link between the externally adjustable process parameters and the internal discharge parameters is established via relations that are either found by modelling or using dedicated experiments [2]. An example of an external process parameter is the pulse length of a HiPIMS process. It has been found that shortening the pulse length in a HiPIMS process, while maintaining the peak discharge current, de- creases the probability of target ion back-attraction, while it only has a minor influence on the probability of target species ionization [3,4]. As a result, the dep- Figure 1: Flux of film-forming species from a HiPIMS discharge using a Ti cathode target in an Ar working gas modelled by the Ionization Region Model (IRM). From Rudolph et al. [3]. ositionrate is increased by 40 % without compromis- ing the ionized flux fraction. This illustrates the enor- mous potential that such an analysis offers. This type of analysis is extended to other external process parameters such as the peak discharge cur- rent, the magnetic field strength and the working gas pressure and is summarized in a general flow chart to describe the link between these externally adjust- able parameters and the two flux parameters [4]. These insights into HiPIMS discharges suggest a re- vised approach of operating discharges by combin- ing the pulsed discharge at high power with a low power discharge to fully raise the potential for en- ergy-efficient, high-rate ionized deposition processes [5]. Literature [1] M. Rudolph, A. Revel, D. Lundin, H. Hajihoseini, N. Bren- ning, M. A. Raadu, A. Anders, T. M. Minea, J. T. Gudmunds- son, Plasma Sourc. Sci. Technol 30 (2021) 045011. [2] M. Rudolph, H. Hajihoseini, M. A. Raadu, J. T. Gudmunds- son, N. Brenning, T. M. Minea, A. Anders, D. Lundin, J. Appl. Phys. 129 (2021) 033303. [3] M. Rudolph, N. Brenning, M. A. Raadu, H. Hajihoseini, J. T. Gudmundsson, A. Anders, D. Lundin, Plasma Sources Sci. Technol. 29 (2020) 05LT01. [4] N. Brenning, A. Butler, H. Hajihoseini, M. Rudolph, M. A. Raadu, J. T. Gudmundsson, T. Minea, D. Lundin, J. Vac. Sci. Technol. A 38 (2020) 033008. [5] N. Brenning, H. Hajihoseini, M. Rudolph, M. A. Raadu, J. T. Gudmundsson, T. M. Minea, D. Lundin, Plasma Sources Sci. Technol. 30 (2021) 015015. 37

TOOL DEVELOPMENT REPORTS Laser-induced Fluorescence in the Discharge Chamber of a Gridded Ion Source L. Pietzonka, C. Eichhorn, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann A major application of plasma diagnostics deals with the characterization of ion sources in order to evalu- ate their performance and to collect data that allows for verification of numerical simulations, e.g. aiming at grid erosion and grid lifetime prediction. Extending experimental capabilities dedicated to the measure- ment of atom densities using two-photon absorption laser-induced fluorescence (TALIF) [1,2], a set-up for single-photon laser-induced fluorescence (LIF) spec- troscopy has been installed. LIF spectroscopy is a well-known non-intrusive technique to determine ion or neutral velocity distributions with spatial resolu- tion. At present, investigations focus on the measure- ment of neutral and ion temperatures in the dis- charge chamber of gridded ion sources, which are needed as input data, e.g. in the grid erosion code DYNASIM developed at IOM [3]. The central part of the LIF set-up consists of a grat- ing-stabilized diode laser in conjunction with a ta- pered amplifier, providing output wavelengths in the range of 800 to 840 nm covering appropriate transi- tions in neutral and singly ionized xenon. The laser wavelength is monitored using a highly accurate wavemeter. The detected fluorescence is recorded with a photomultiplier tube and integrated by means of a lock-in amplifier. A vacuum-sided LIF probe has been set up including laser collimation and fluores- cence detection optics (Fig. 1), facilitating the appli- cation of the technique at different vacuum facilities. Figure 1: LIF measurement in the discharge chamber of an HF gridded ion source. The ion beam propagates to the right. The chamber walls are made of UV fused silica, laser beam and flu- orescence detection directions extend between the free spac- ings of the windings of the HF coil [2]. Figure 2: Xenon LIF spectra measured in the center of the dis- charge chamber of the ISQ40HF ion source from IOM for three different operation conditions. The inset shows the correspond- ing projected velocity distribution functions obtained by hyper- fine structure elimination (Fourier deconvolution). A typical LIF signal for excitation of the 6s’ [1/2]1 → 6p’ [3/2]2 transition at 834.7 nm in neutral xenon is shown in Fig. 2. Due to isotope shift and hyperfine splitting, accurate modelling of the 18 components contributing to the spectrum of the absorption line is required in order to extract the velocity distribution. Assuming Maxwellian velocity distributions for the in- vestigated species of interest, the temperature of the xenon atoms can be determined from the linewidth of the spectral components. On that basis, tempera- tures can be studied for various ion source operating conditions, including their temporal evolution as- sessing the source stability. Besides measurements inside the discharge chamber, future measurements will be extended to the plume, where ion velocimetry allows for beam profile characterization, which is of particular interest, e.g. for electric space propulsion. Acknowledgements Financial support during design of the experimental set-up by the Deutsches Zentrum für Luft- und Raumfahrt (DLR) through grant BMWi 50RS1506 is gratefully acknowledged. Literature [1] C. Eichhorn, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann, H. Leiter, J. Propul. Power 35 (2019) 1175. [2] C. Eichhorn, L. Pietzonka, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann, H. Leiter, EPJ Techniques and In- strumentation, in press. [3] M. Tartz, E. Hartmann, H. Neumann, Rev. Sci. Instrum. 79 (2008) 02B905. 39

TOOL DEVELOPMENT REPORTS A Combination of Ion Beam Sputtering and In situ X-Ray Diffraction as a Method for Depth-resolved Phase Analysis D. Manova, S. Mändl IOM is a leader in the development of ion sources and their applications. Recently, it was shown how by combining ion beam sputtering and in situ x-ray diffraction (XRD) it is possible to extract depth-re- solved information from the XRD data for functional surface layers with a depth resolution of 25 – 100 nm. This is even possible for a total layer thickness be- yond 10 – 50 µm [1]. Expertise on the fabrication and modification of ultra- precise and functional surfaces is mandatory for suc- cessful transfer of results from fundamental research into technological applications. For this purpose, it is also essential to employ state-of-the-art techniques for surface characterization. Here, XRD belongs to a powerful class of methods employing scattering and diffraction for gaining information about the structure of thin films. Thus, it is a widely used method. However, the finite information depth between (gen- erally) 5 and 50 µm is simultaneously a blessing and a bane. While data analysis for homogeneous sur- face layers permits the direct determination of the thickness from a direct comparison of the substrate x-ray diffracted intensities and the surface layer in- tensities, the analysis of inhomogeneous films is ex- tremely complicated or even impossible as the ob- tained information is an integrated value across the whole information depth. The analysis of thick layers beyond 5 – 10 µm is obfuscated by the fact that the interface to the substrate is invisible in the XRD data due to the limited information depth. At the same time, analysis of very thin layers is not possible as the weak signal from the very surface is often ob- scured from signals from deeper layers. Thus, a new method was established to permit the extraction of depth-resolved XRD data. While subse- quent sublayer removal by mechanical polishing is known, yielding depth resolutions of less than 500 nm, it is tedious and prone for errors. Now, the com- bination of in situ XRD with low energy ion bombard- ment for sputter removal of surface layers leads to the availability of depth resolved information for very thin and very thick layers. Using a broad beam ion source with low ion energies around 1 keV allows applying high ion current densi- ties and thus a high sputter removal rates. At the same time, the ion range, correlated with the thick- ness of the zone damaged or modified by the incom- ing ions is restricted to less than 5 nm. However, it 160 140 120 100 80 60 40 20 s m a r g o t c a r f f i D l a i t n e r e f f i D g(111) g(200) gN(111) gN(200) 3200 2800 2400 2000 1600 1200 800 400 36 38 40 42 44 46 48 50 52 54 Angle 2q (deg) Intensity (cps) ) m n ( h p e D t 6.100 4.575 3.050 1.525 0.000 -1.525 -3.050 -4.575 -6.100 Figure 1: Differential diffractograms obtained for sputter-depth- profiling of an expanded austenite layer on top of austenitic stain- less steel with γN(111) and γN(200) peaks belonging to the surface layer and γ(111) together with γ(200) to the substrate. The gradi- ent in the peak position, respective lattice expansion is clearly vis- ible. must be ascertained that no diffusion occurs during the sputtering experiment, hence an upper limit of the substrate temperature is imposed. Thus, it was pos- sible to establish a depth resolution of 30 nm in pre- liminary experiments [2]. One weakness of the method is the degradation of the resolution by ion in- duced surface roughening. Furthermore, transforming the XRD diffractograms obtained as a time-series still encompassing infor- mation from the whole information depth into actual, depth-resolved structure information necessitates additional data analysis. Here, Ref. [1] presents de- tails of the data processing essential for meaningful application of the method (cf. Fig. 1). Typical applications of this method include the de- convolution of inhomogeneously broadened XRD dif- fractograms due to concentration gradients within the layer, the separation of concentration and stress gra- dients within layers [3] and gaining information on depth resolved defect densities from the depth-de- pendent scattering intensity. Acknowledgements This work was supported by Deutsche Forschungs- gemeinschaft DFG (Project Nos. MA 4426/2-1, 2-2, and 5-1). Literature [1] D. Manova, P. Schlenz, S. Mändl, Journal of Applied Physics 131 (2022) 025306. [2] D. Manova, S. Mändl, Journal of Applied Physics 126 (2019) 200901. [3] D. Manova, P. Schlenz, J.W. Gerlach, S. Mändl, Coatings 10 (2020) 1250. 41

MATERIAL CHARACTERIZATION AND ANALYTICS REPORTS Infrared Spectral Imaging from Micro to Macro Dimensions O. Daikos, T. Scherzer Infrared spectral imaging offers the possibility to gain information about the spatial distribution of chemical and physical properties on surfaces. Depending on the wavelength range of the probe light (mid- or near- infrared; MIR or NIR) and the experimental design of the measurement process (reflection, transmission, ATR), samples can be analyzed on a broad range of length scales ranging from a few micrometers up to meters. MIR-ATR microspectroscopy is an exceedingly pow- erful imaging technology, in particular if the infrared microscope is equipped with a focal plane array (FPA) detector (IOM: 64x64 pixels). The use of a Ge- based ATR objective leads to low a penetration depth (~500 nm), which allows characterization of the surface layer only. As an example, Fig. 1 shows the spectral images of two electron beam cured hydrogel samples made of polyethylene glycol diacrylate (PEGDA) and gelatin (solids content 87/13 wt/wt). Samples were prepared with increasing content of silver nanoparticles rang- ing from 0 up to 2 wt%. The images clearly show that the nanoparticles affect the homogeneity of the poly- mer network. In particular, PEGDA-rich droplets are formed that are embedded in a gelatin/PEGDA ma- trix. Other analytical investigations by MIR micros- copy were dealing with the characterization of layers deposited by ion soft landing or of electron-irradiated nitrogen-doped HPHT diamonds [1]. 1730 cm-1 ν C=O (PEGDA) 1635 cm-1 Amide I (Gelatin) n o i t p r o s b A 0.20 0.15 0.10 0.05 0.00 3500 3000 1500 Wavenumber [cm-1] 1000 Figure 1: MIR-ATR spectral images of PEGDA/gelatin (87/13 wt/wt) hydrogels without (top left) or with (top right) 2 wt% silver nanoparticles (samples: Tuğçe Şener Raman, IOM). The lower figure shows the IR spectra in red and blue areas with charac- teristic bands of the acrylate and the protein, respectively. 30 g/m² 0 g/m² Figure 2: NIR spectral images of the application weight of an ad- hesion promoter for rubber on polyester fabric (left: 24.2 g/m², right: 3.7 g/m²). Images were recorded with a multiplex spectrom- eter system with individual fiber-optic sensors mounted at inter- vals of 20 mm. NIR spectral imaging in reflection mode is able to characterize large-area surfaces (e.g. coatings) by continuous scanning of moving webs of paper or pol- ymer films. This method allows monitoring of certain parameters of the coating and is consequently used mainly for process control of technical processes. In the past, it has been shown at IOM that NIR imaging can be applied not only for conventional coatings, but also for finished and laminated textiles [2]. Typically, highly efficient NIR cameras are applied for imaging. However, in case of very wide web widths, this approach is much too expensive. Recently, it was shown that competitive multiplex spectrometer systems with some dozens of individual fiber-optic sensors and operating widths of several meters yield results, whose precision is almost the same as that obtained with cameras [3,4]. Fig. 2 shows NIR im- ages of an adhesion promoter for rubber applied to cord fabrics with different application weights. The application weight was determined in-line with a mul- tiplex system resulting in a prediction error of 1.4 g/m², whereas 1.2 g/m² was achieved with a NIR ca- mera. Other investigations were dealing with moni- toring of the drying of textiles after impregnation with functional finishes in order to control and to optimize the drying process. It was shown that even black tex- tiles can be characterized by this optical method in spite of their very low reflectance [5]. Literature [1] A. Setzer, P.D. Esquinazi, O. Daikos, T. Scherzer, A. Pöppl, R. Staacke, T. Lühmann, S. Pessagna, W. Knolle, S. Buga, B. Abel, J. Meijer, Physica Status Solidi B: Basic Solid State Physics 258 (2021) 2100395. [2] T. Scherzer, Applications of NIR techniques in polymer coat- ings and synthetic textiles, in: Y. Ozaki, C. Huck, S. Tsuchi- kawa, S.B. Engelsen (Eds.), Near-Infrared Spectroscopy: Theory, Spectral Analysis, Instrumentation, and Applications, Springer Nature, Singapore, 2021, chap. 21, pp. 475-516. [3] O. Daikos, T. Scherzer, Progr. Org. Coat. 157 (2021) 106334. [4] O. Daikos, A. Volland, T. Scherzer, Progr. Org. Coat. 159 (2021) 106395. [5] O.Daikos, T. Scherzer, Progr. Org. Coat. 163 (2022) 106610. 43

Equipment for Research and Application

FACILITIES REACTIVE ION BEAM ETCHING (RIBE) Reactive ion beam etching (RIBE) is an efficient and well-known technology enabling the fabrication of e.g. optical elements with atomic precision. The RIBE450 facility was established in 2016 as a part of an extended research infrastructure. An integrated 5 axes-motion system enables uniform etching of large workpieces with diameters up to 450 mm and a maximum weight of 50 kg. The RIBE system is equipped with a Kaufman-type ion source, configured for Fluorine-containing etching gases, and can be upgraded with different optical and mass spectroscopic in-situ measurement technologies which guarantee high process stability and reliability. With the RIBE 450 etching plant, sophisticated IOM- developed etching processes for ultraprecise and innovative structured functional surfaces can be further scaled up to industrially relevant sizes. Expertise Ion beam driven self-organization RIBE for pattern transfer IBE/RIBE on large surfaces Ion beam assisted surface smoothing

ELECTRON-BEAM-BASED POLYMER MEMBRANE FUNCTIONLIZATION IN ROLL-TO-ROLL PROCESS Porous polymer membranes are of increasing importance regarding modern separation technologies such as wastewater treatment, sterilization filtration, hemodialysis, dairy industry, etc. To comply with re- quired process conditions, these polymer membranes are predominantly fabricated from synthetic hy-drophobic polymers. However, these materials are prone to fouling. Electron beam technology can be efficiently used for the hydrophilization of polymer membranes by directed grafting of hydrophilic small molecules/polymers or even (bio)catalysts to the membrane surface. This pilot plant enables an upscal-ing (roll-to-roll) of our method using hollow fibres or flat sheet membranes with individual pre- and post-treatment. Furthermore, an inline contact angle measurement system allows permanent control over the functionalized flat sheet membrane surface. Expertise Hydrophilization, functionalization of membrane surfaces Antifouling membrane surfaces Cross-linking of polymer blends/mixtures Permanent immobilization of functional molecules/polymers/nanostructures/proteins/enzymes ✓ Hydrophilization: permanent ✓ Fouling reduction: 60-90% ✓ Permeation flux: +90% ✓ Energy demand for system operation: -50% ✓ Maintenance and cleaning effort: reduced ✓ Available operating time & lifetime: increased

UNIVERSAL DIAGNOSTIC PLATFORM FOR REACTIVE ION BEAM PROCESSES Today, many high-tech applications would be inconceivable without ion beam processes and methods. In this context, highly developed and process-adapted ion sources suitable for reactive gases are essen- tial. Driven by the application-related demands, the development and optimization of process-adapted broad-beam ion sources will be of increasing importance within the R&D work in the future. A prerequisite for such technological developments is the diagnostic platform RISQ-DIAP for the characterization of reactive ion beam processes, which was realized within the framework of the SAB/EFRE infrastructure initiative and which is unique both in Germany and internationally. Expertise Diagnostic capabilities at RISQ-DIAP: Faraday-Probe measurements (single probe, array) Residual gas analysis and energy selective mass spectrometry Thermal probe and thermal camera Quartz microbalances Optical etch rate monitoring, ellipsometry and optical emission spectroscopy Large area RIBE processing

EQUIPMENT The accelerator at the IOM is based on a technological platform providing computer-controlled stable average beam currents up to 1 mA (10 kW beam power) for material modification. The high energy of 10 MeV electrons allows synthesis and modification of 3D-samples up to a thickness of 5 cm (single- sided irradiation). Scanning and transport system provide homogeneous irradiation up to sample sizes of 0.6 m x 1.5 m. A modification of the accelerator for short (15 ns) single pulses of high pulse current (1A) allows state- of-the-art time-resolved spectroscopy (pulse radiolysis) of electron-induced primary processes for basic research in radiation chemistry. Expertise Defect sites design (NV-centers in diamonds, ZnO, SiC, …) Cross-linking (PE, hydrogels, cryogels …) Material modification (e.g. semiconductors, materials in regenerative medicine) Cryo- (> 77K) and HT (<1000°C) irradiation Radiation and radical chemistry Elucidation of structure-property relationships Time-resolved analytics during irradiation Single pulse and pulse train investigations Timescales: ns up to hours The research facility is co-financed by tax funds on the basis of the budget passed by the Saxon state parliament

EQUIPMENT IOM’s laser laboratories are equipped with standard industrial laser sources for materials pro- cessing that are integrated into workstations for the full control of the laser machining processes. IOM completed these workstations with equipment for material processing at specific conditions or with in-process analysis options. Modern workstations with pulsed lasers with wavelengths from UV 193 nm to NIR 1.55 µm and ns, ps and fs pulse length Modules for cylinder machining with UV-ns, fs, and ps laser Off and in process measurement subsystems for process control and optimization Expertise Qualifying laser machining processes (ablation, etching, and surface modification) on state-of- the-art laser workstations including advanced analytics Developing and qualifying laser micro processing techniques for high quality, high precision and low damage machining Developing of enabling technologies for ultrahigh precision machining with pulsed lasers Developing, optimizing and implementing application-specific machining processes including the processing strategy Application of beam-shaping techniques for high speed and/or high quality machining Hybrid processing: combining of laser processing with other beam-based or standard pro- cessing technologies Adapting laser processing to existing process chains

MODULAR RESEARCH PLATFORM FOR PLASMA-BASED THIN FILM DEPOSITION TECHNIQUES IOM provides a new and unique tool to modify surfaces and synthesize new functional materials and thin films by applying different plasma deposition processes. The platform is flexible and modular in design in order to be utilized for different material and research require- ments. First tests with the platform have be carried out on material systems in the fields of switchable layers at temperature phase change materials in film form) and energy conversion and storage (electrochemically active surfaces as needed in solid acid fuel cells). temperatures low (low HIGH RESOLUTION X-RAY DIFFRACTOMETER/REFLEC- TOMETER SYSTEM A new high resolution x-ray diffraction/reflectivity sys- tem offers additional diffraction and scattering tech- niques for the non-destructive characterization of crys- talline and amorphous materials. By means of a high- power rotating anode x-ray source, beam-shaping x- ray optics elements and a highly sensitive area detec- tor, different samples can now be measured by using a highly intense x-ray beam, while the beam shape can be optimized for the respective required measurement task. X-rays diffracted or scattered by a sample can be detected and evaluated even at low intensity. The highly precise 5-axis-goniometer together with various available degrees of freedom in movement thex-ray source, sample attachments and of detector provide a variety of alignment and measurement scenarios. These research facilities are co-financed by tax funds on the basis of the budget passed by the Saxon state parliament

LEIPZIGER nanoANALYTIKUM (LenA) Nanoscale analysis of artificially produced materials is an important prerequisite for understanding the relationship between material structure and material properties. The design of materials with desired functionalities can only be achieved through precise knowledge of their real structure. The research area of LenA focuses on the structural and chemical analysis of thin films, interfaces and nanostructures using advanced methods of transmission electron microscopy (TEM). Expertise Aberration-corrected high-resolution scanning transmission electron microscopy In-situ transmission electron microscopy Nanoscale analysis of nanostructures, interfaces and defects Thin films and heterostructures The research facility is co-financed by tax funds on the basis of the budget passed by the Saxon state parliament

Personnel Activities Graduations Committee Work Honors

GRADUATIONS Diploma and Master Theses 2020 Becker-Jahn, Julia Photoaktive Membranoberflächen zur Abwasseraufbereitung Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Kraft, Nicolas Structural, chemical and optical properties of La-Sr-Mn-O doped Ge Sb-Te thin films Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Lohmann, Jessica Erzeugung von Anti-Biofouling-Membranen durch Hydrogelimmobilisierung Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Rohkamm, Erik Investigation of silicon oxynitride thin films grown by ion beam sputter deposition Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2020 Ronneberg, Sebastian Characterization of cryo-printed microfuidic channels Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Rüdiger, Tom Einfluss der Oberflächenvergrößerung von Mikrofiltrationsmembranen auf die Effizienz immobilisierter Katalysatoren Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Shayestehpour, Omid The influence of urea derivatives on the liquid structure of choline-based deep eutectic solvents - studied by classical molecular dynamics simulations TU Chemnitz, Fakultät für Naturwissenschaften, 2020 Sydow, Stephan Enhanced photolysis of Diclofenac in the presence of polyvinylidene difluoride membranes Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 2021 Birtel, Peter Investigations on the Formation of Metal Dimers in Pulsed Magnetron Sputter Discharges Westsächsische Hochschule Zwickau, Fakultät Physikalische Technik, 2021 Felten, Christian Über die Strahlenchemie von metallischen Nanopartikeln und ihren Stabilisatoren Universität Leipzig, Fakultät für Chemie und Mineralogie, 2021 Gransee, Johannes Radiation Chemical Functionalisation of Reduced Graphene Oxide Universität Leipzig, Fakultät für Chemie und Mineralogie, 2021 65

GRADUATIONS Bachelor Theses 2020 Buchner, Florian Untersuchungen anorganischer Materialien mithilfe der Photoemissions- elektronenmikroskopie (PEEM) Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Dietrich, Paul Untersuchung des Einflusses von Kohlenstoff- oder Neonimplantation auf die Leitfähigkeit von Titandioxid-Dünnschichten Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2020 Pfeiffer, Christopher, Strukturelle Optimierung eines Systems aus einer RGD-Sequenz und Wasser mittels Dichtefunktionaltheorie Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2020 Pfeifer, Nils Dichtefunktionaltheorie Simulation zur Struktur der RGD-Sequenz im Solvationsmodell Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2020 Roth, Kilian Impact of electron beam irradiation on spatial properties of agarose gels and nylon membranes Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2020 Seiß, Maximilian Multimetallische Koordinationskomplexe als Einzelquellen-Präkursoren für die Herstellung neuartiger Oxiddünnfilme Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 Slotosch, Torben Mechanische Untersuchungen an Elastin / Kollagen Hybrid Hydrogelen Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2020 Ueltzen, Katharina Adsorptionsverhalten mehrkerniger Koordinationsverbindungen auf metallischen und nichtmetallischen Oberflächen Universität Leipzig, Fakultät für Chemie und Mineralogie, 2020 2021 Bauer, Leonie Nachweis von reaktiven Sauerstoffspezies bei Bestrahlung von Photokatalysatoren auf PES Membranen Universität Leipzig, Fakultät für Chemie und Mineralogie, 2021 Enke, Alexius Synthese von Eisenoxid-Nanopartikeln mit Elektronenbestrahlung Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2021 67

COMMITTEE WORK Committee Work Prof. Dr. André Anders Editor-in-Chief, Journal of Applied Physics, published by AIP Publishing, New York, USA Chair, The Journals’ Editor Conference, AIP Publishing, New York, USA Treasurer, Symposia on Discharges and Electrical Insulation in Vacuum (ISDEIV), an IEEE-cosponsored series of conferences Member of the Advisory Board, International Conference on Metallurgical Coatings and Thin Films (ICMCTF) Member of the Advisory Board of the International Conference on Plasma Surface Engineering (PSE) Member of Advisory Committee, Plathinium, The Plasma, Thin Films and Related Processing Union Meeting Member of the International Scientific Committee, International Conference on High Power Impulse Magnetron Sputtering (HIPIMS Conf.) Member, Advisory Committee, European Research Society for Thin Films (EFDS) Scientific Chair, Association “Plasma Germany” Prof. Dr. Bernd Abel Co-editor of "Zeitschrift für Physikaische Chemie - International journal of research in physical chemistry and chemical physics", De Gruyter Verlag Reviewers in the Review Board „Physikalische Chemie“ of the DFG Management Board oft the Wilhelm-Ostwald-Gesellschaft Co-Editor of Scientic Reports Elected member of the DFG review panel „Physikalische und Theoretische Chemie“ of the DFG (Fachkollegium 303) Reviewer in various ERC review panels Founder and co-owner of Advanded Microfluidic Systems GmbH (2018) Board of Graduate School BuildMoNa, University Leipzig Board of the CRC TR102 "Polymers under Constraints" Prof. Dr. Thomas Arnold Member of the Nanotechnologie Kompetenzzentrum Ultrapräzise Oberflächenbearbeitung e.V. (CC UPOB e.V.) Member of the Deutsche Gesellschaft für angewandte Optik (DGaO) Member of the Optical Society of America (OSA) Dr. Daniel Breite Reviewer in the Review Board of Polymers Dr. Carsten Bundesmann Fächerübergreifende Arbeitsgemeinschaft Halbleiterforschung Leipzig (FAHL, Interdisciplinary Workgroup on Semiconductor Research Leipzig), Personal member Executive of the Organizing Committee, 8th Russian-German Conference on Electric Propulsion and Their Application, Kaliningrad, 2021 Dr. Christian Elsner Member of EFDS-Fachausschuss „Oberflächen für die Bio- und Medizintechnik“ Advisory Board „Nanotechnology“ IOP Science Dr. Frank Frost Member of the Programm committee „EOS Conferences at the World of Photonics Congress (WPC2019): Conference on Manufacturing of Optical Systems“ Fächerübergreifende Arbeitsgemeinschaft Halbleiterforschung Leipzig (FAHL, Interdisciplinary Workgroup on Semiconductor Research Leipzig), Personal member 69

HONORS Honors Dr. Stefanie Riedel PhD Prize of the Research Academy Leipzig 2020 Dr. Paul Räcke and Dr. Torsten John Young Scientist Award 2020 (Award of the IOM) Andrea Prager Non-Scientist Award 2020 (Award of the IOM) Astrid Kupferer Young Scientist Award 2021 (Award of the IOM) Yvonne Bohne Non-Scientist Award 2021 (Award of the IOM) Georg Böhm, Gregor Dornberg, Christoph Eichhorn, Annemarie Finzel, Stephan Görsch, Jan Henke, Helmut Herrnberger, Pierre Lorenz, Heike Müller, Mirko Naumann, Katrin Ohndorf and Frank Scholze Special Award 2021 (Award of the IOM) Prof. Dr. André Anders R.F. Bunshah Award 2021 Dr. Agnes Schulze Saxon Transfer Award 2021, Second Place Yvonne Bohne Saxon Transfer Award 2021, Special award for technology mediators Sabrina Friebe, Astrid Kupferer, Philine Jauch and Suzanne Arnold Founders' Prize of the Leipzig Founders' Night 2021 in the category 'Idea' 71

Scientific Events Scientific Meetings Institute Colloquia Lecture Series Seminar Series

SCIENTIFIC EVENTS Oberflächentechnik durch massenselektive molekulare Ionendeposition Dr. Jonas Warneke Wilhelm-Ostwald-Institut, Fakultät für Chemie und Mineralogie, Universität Leipzig 25.11.2021 Lecture Series Prof. Dr. Bernd Abel Allgemeine Chemie für das Nebenfach Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2019/20 Prof. Dr. André Anders Plasmas Physics, Thin Film Deposition and Characterization Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2019/20, Summer 2021, Winter 2021/22 Prof. Dr. Thomas Arnold Mikro- und Ultrapräzisionsbearbeitung Technische Universität Dresden, Fakultät Maschinenwesen Winter 2019/20, Winter 2020/21 Dr. Jens Bauer (with support from Dr. Frank Frost Dr. and Dr. Jürgen W. Gerlach) Analytik und Spektroskopie: Oberflächen- und Dünnschichtanalytik (Aufbaustudium) Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2019/20, Winter 2020/21 Dr. Ulrike Helmstedt Modul “Thin Films" in "Function Control at Complex Surfaces“ Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2019/20, Winter 2020/21 Dr. Stephan Mändl Plasmas Physics, Thin Film Deposition and Characterization Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2019/20, Summer 2021, Winter 2021/22 Prof. Dr. Stefan G. Mayr Experimentalphysik 5 Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2019/20, Winter 2020/21, Winter 2021/22 Dr. Agnes Schulze Funktionskontrolle an komplexen Oberflächen Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2019/2020, Winter 2020/2021 Dr. Daniel Spemann Kernphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2020 75

SCIENTIFIC EVENTS Friedrich Schütte and Johannes Dietrich Übungen zu Experimentalphysik 5 Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2021/22 Catharina Krömmelbein and Johannes Dietrich Übungen zu Experimentalphysik 5 Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2020/21 Nils Wilharm, Alexander Holm, and Astrid Kupferer Übungen zu Experimentalphysik 5 Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2019/20 Dr. Agnes Schulze Funktionskontrolle an komplexen Oberflächen Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2019/2020, Winter 2020/2021 Dr. Daniel Spemann Kernphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2020 Teilchenphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2020, Summer 2021 Experimentalphysik VII – Kern- und Teilchenphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2019/20, Winter 2020/21, Winter 2021/22 Dr. Patrick With Modul "Photochemistry basics and thin film preparation“ in "Function Control at Complex Surfaces“ Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2019/20, Winter 2020/21 Dr. Stephan Zahn Vertiefende Theoretische Chemie Universität Leipzig, Fakultät für Chemie und Mineralogie Summer 2020 77

Publications and Presentations Publications in Journals and Books Conference Proceedings Talks Posters Patents

PUBLICATIONS IN JOURNALS AND BOOKS K.R. Asmis, B.B. Beele, C. Jenne, S. Kawa, H. Knorke, M.C. Nierstenhöfer, X.-B. Wang, J. Warneke, Z. Warneke, Q. Yuan Synthesis, electronic properties and reactivity of [B12X11(NO2)]2- (X=F-I) dianions Chem. Eur. J. 26 (2020) 14594 K. Batra, S. Zahn, T. Heine Benchmark of simplified time-dependent density functional theory for UV-Vis spectral properties of porphyrinoids Adv. Theory Simul. 3 (2020) 1900192 J. Bauer, F. Frost Orientation-dependent nanostructuring of titanium surfaces by low-energy ion beam erosion Surf. Interface Anal. 52 (2020) 1071-1076 M. Behrens, A. Lotnyk, J.W. Gerlach, B. Rauschenbach Strain-induced phase selection in epitaxial Ge2Sb2Te5 thin films Phys. Rev. Materials 4 (2020) 015001 M. Behrens, A. Lotnyk, H. Bryja, J.W. Gerlach, B. Rauschenbach Structural transitions in Ge2Sb2Te5 phase change memory thin films induced by nanosecond UV optical pulses Materials 13 (2020) 2082 P. Benettoni, J.-Y. Ye, T.R. Holbrook, F. Calabrese, S. Wagner, M. Zarejousheghani, J. Griebel, M.K. Ullrich, N. Musat, M. Schmidt, R. Flyunt, T. Reemtsma, H.-H. Richnow, H. Strykanyuk Surface cleaning and sample carrier for complementary high-resolution imaging techniques Biointerphases 15 (2020) 02100 L. Botsch, N. Raatz, S. Pezzagna, R. Staacke, R. John, B. Abel, P.D. Esquinazi, J. Meijer, S. Diziain Vectorial calibration of superconducting magnets with a quantum magnetic sensor Rev. Sci. Instrum. 91 (2020) 125003 M. Boujnah, H. Ennaceri, A. El Kenz, A. Benyoussef, E. Chavira, M. Loulidi, H. Ez-Zahraouy The impact of point defects on the optical and electrical properties of cubic ZrO2 J. Comput. Electron. 19 (2020) 940-946 D. Breite, M. Went, A. Prager, M. Kühnert, A. Schulze Reduction of biofouling of a microfiltration membrane using amide functionalities - hydrophilization without changes in morphology Polymers 12 (2020) 1379 N. Brenning, A. Butler, H. Hajihoseini, M. Rudolph, M.A. Raadu, J.T. Gudmundsson, T. Minea, D. Lundin Optimization of HiPIMS discharges: the selection of pulse power, pulse length, gas pressure, and magnetic field strength J. Vac. Sci. Technol. A 38 (2020) 033008 H. Bryja, C. Grüner, J.W. Gerlach, M. Behrens, M. Ehrhardt, B. Rauschenbach, A. Lotnyk Impact of interfaces on bipolar resistive switching behavior in amorphous Ge-Sb-Te thin films J. Phys. D.: Appl. Phys. 53 (2020) 184002 C. Bundesmann, A. Hellmich Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide J. Vac. Sci. Technol. B 38 (2020) 064002 81

PUBLICATIONS IN JOURNALS AND BOOKS K. Fischer, S. Sydow, J. Griebel, S. Naumov, C. Elsner, I. Thomas, A. Abdul Latif, A. Schulze Enhanced removal and toxicity decline of Diclofenac by combining UVA treatment and adsorption of photoproducts to polyvinylidene difluoride Polymers 12 (2020) 2340 M. Fuchs, S. Schmitz, P.M. Schäfer, T. Secker, A. Metz, A.N. Ksiazkiewicz, A. Pich, P. Kögerler, K.Yu. Monakhov, S. Herres-Pawlis Mononuclear zinc(II) Schiff base complexes as catalysts for the ring-opening polymerization of lactide Eur. Polym. J. 122 (2020) 109302 Y.-F. Gao, C.-Y. Yu, B. Han, M. Ehrhardt, P. Lorenz, L.-F. Xu, R.-H. Zhu Picosecond laser-induced periodic surface structures (LIPSS) on crystalline silicon Surf. Interfaces 19 (2020) 100538 M. Golizadeh, A. Anders, F. Mendez Martin, S. Kolozsvári, R. Franz Insights into surface modification and erosion of multi-element arc cathodes using a novel multilayer cathode design J. Appl. Phys. 127 (2020) 113301 B. Göttel, H. Lucus, F. Syrowatka, W. Knolle, J. Kuntsche, J. Heinzelmann, A. Viestenz, K. Mäder In situ gelling amphotericin B nanofibers: a new option for the treatment of keratomycosis Front. Bioeng. Biotechnol. 8 (2020) 600384 S. Gozem, R. Seidel, U. Hergenhahn, E. Lugovoy, B. Abel, B. Winter, A.I. Krylov, S.E. Bradforth Probing the electronic structure of bulk water at the molecular length scale with angle-resolved photoelectron spectroscopy J. Phys. Chem. Lett. 11 (2020) 5162-5170 M. Gronbach, F. Mitrach, S. Möller, S. Rother, S. Friebe, S.G. Mayr, M. Schnabelrauch, V. Hintze, M.C. Hacker, M. Schulz-Siegmund A versatile macromer-based glycosaminoglycan (sHA3) decorated biomaterial for pro-osteogenic scavenging of Wnt antagonists Pharmaceutics 12 (2020) 1037 A. Hans, C. Küstner-Wetekam, P. Schmidt, C. Ozga, X. Holzapfel, H. Otto, C. Zindel, C. Richter, L.S. Cederbaum, A. Ehresmann, U. Hergenhahn, N.V. Kryzhevoi, A. Knie Core-level interatomic Coulombic decay in van der Waals clusters Phys. Rev. Res. 2 (2020) 012022 T. Heisig, J. Kler, H. Du, C. Baeumer, F. Hensling, M. Glöß, M. Moors, A. Locatelli, T.O. Mentes, F. Genuzio, J. Mayer, R.A. De Souza, R. Dittmann Antiphase boundaries constitute fast cation diffusion paths in SrTiO3 memristive devices Adv. Funct. Mater. (2020) 2004118 A. Hodes, S. Hamblyn, M. Schmidt, U. Käppeler, A. Berlich, A. Prager, L. Engisch The use of infrared and Raman microscopy to characterise the absorption of offset ink in paper J. Print Media Technol. Res. 9 (2020) 31-39 B. Hoffmann, T.K. Esser, B. Abel, K.R. Asmis Electronic action spectroscopy on single nanoparticles in the gas phase J. Phys. Chem. Lett. 11 (2020) 6051-6056 83

PUBLICATIONS IN JOURNALS AND BOOKS S. Lai, M. Ehrhardt, P. Lorenz, D. Hirsch, J. Zajadacz, J. Lu, B. Han, K. Zimmer Submicron bubbles/voids formation in the subsurface region of soda-lime glass by single pulse fs laser-induced spallation Appl. Surf. Sci. 502 (2020) 144134 R.P. Lamba, A.M. Hossain, A. Agarwal, R. Prakash Investigations of discharge sustenance in a dielectric barrier-based microhollow cathode IEEE Trans. Plasma Sci. 48 (2020) 3679-3685 C. Laube, J.A. Taut, J. Kretzschmar, S. Zahn, W. Knolle, S. Ullmann, A. Kahnt, B. Kersting, B. Abel Light controlled oxidation by supramolecular Zn(II) Schiff-base complexes Inorg. Chem. Front. 7 (2020) 4333-4346 X. Li, M. Ehrhardt, P. Lorenz, B. Han, S. Lai, K. Zimmer, L. Xu, P. Nan, X. Ni Influence of surface treatment with infrared nanosecond laser on adhesion performance of adhesion-bonded carbon fiber/epoxy composite J. Adhes. Sci. Technol. 34 (2020) 1399-1425 S. Liedtke-Grüner, C. Grüner, A. Lotnyk, J.W. Gerlach, B. Rauschenbach Biaxially textured titanium thin films by oblique angle deposition: conditions and growth mechanisms Phys. Status Solidi A 217 (2020) 1900636 N. Liu, S. Mohajernia, N.T. Nguyen, S. Hejazi, F. Plass, A. Kahnt, T. Yokosawa, A. Osvet, E. Spiecker, D.M. Guldi, P. Schmuki Long-living holes in grey anatase TiO2 enable noble-metal-free and sacrificial-agent- free water splitting ChemSusChem 13 (2020) 4937-4944 X.B. Lu, X. Yang, M. Tariq, F. Li, M. Steimecke, J. Li, A. Varga, M. Bron, B. Abel Plasma-etched functionalized graphene as a metal-free electrode catalyst in solid acid fuel cells J. Mater. Chem. A 8 (2020) 2445-2452 D. Manova, P. Schlenz, J.W. Gerlach, S. Mändl Depth-Resolved Phase Analysis of Expanded Austenite formed in Austenitic Stainless Steel Coatings 10 (2020) 1250 Y. Mindarava, R. Blinder, C. Laube, W. Knolle, B. Abel, C. Jentgens, J. Isoya, J. Scheuer, J. Lang, I. Schwartz, B. Naydenov, F. Jelezko Efficient conversion of nitrogen to nitrogen-vacancy centers in diamond particles with high-temperature electron irradiation Carbon 170 (2020) 182-190 Y. Mindarava, R. Blinder, Y. Liu, J. Scheuer, J. Lang, V. Agafonov, V.A. Davydov, C. Laube, W. Knolle, B. Abel, B. Naydenov, F. Jelezko Synthesis and coherent properties of 13C-enriched sub-micron diamond particles with nitrogen vacancy color centers Carbon 165 (2020) 395-403 K.Yu. Monakhov, W. Wernsdorfer A cubane-type nickel single-molecule magnet with exchange-biased quantum tunneling of magnetization Mendeleev Commun. 30 (2020) 168-170 85

PUBLICATIONS IN JOURNALS AND BOOKS M. Rohdenburg, V.A. Azov, J. Warneke New perspectives in the noble gas chemistry opened by electrophilic anions Front. Chem. 8 (2020) 1015 M. Rohdenburg, Z. Yang, P. Su, E. Bernhardt, Q. Yuan, E. Apra, S. Grabowsky, J. Laskin, C. Jenne, X.-B. Wang, J. Warneke Properties of gaseous closo-[B6X6]2- dianions (X = Cl, Br, I) Phys. Chem. Chem. Phys. 22 (2020) 17713-17724 M. Rudolph, N. Brenning, M.A. Raadu, H. Hajihoseini, J.T. Gudmundsson, A. Anders, D. Lundin Optimizing the deposition rate and ionized flux fraction by tuning the pulse length in high power impulse magnetron sputtering Plasma Sources Sci. Technol. 29 (2020) 05LT01 C.-M. Saak, C. Richter, I. Unger, M. Mucke, C. Nicolas, U. Hergenhahn, C. Caleman, M. Huttula, M. Patanen, O. Björneholm Proton dynamics in molecular solvent clusters as an indicator for hydrogen bond network strength in confined geometries Phys. Chem. Chem. Phys. 22 (2020) 3264-3272 O. Shayestehpour, S. Zahn Molecular features of reline and homologous deep eutectic solvents contributing to nonideal mixing behavior J. Phys. Chem. B 124 (2020) 7586-7597 R. Staacke, R. John, R. Wunderlich, L. Horsthemke, W. Knolle, C. Laube, P. Glösekotter, B. Burchard, B. Abel, J. Meijer Isotropic scalar quantum sensing of magnetic fields for industrial application Adv. Quantum Technol. 3 (2020) 2000037 M. Stiller, A.T. N'Diaye, H. Ohldag, J. Barzola-Quiquia, P.D. Esquinazi, T. Amelal, C. Bundesmann, D. Spemann, M. Trautmann, A. Chassé, H. Ben Hamed, W.A. Adeagbo, W. Hergert Titanium 3d-ferromagnetism with perpendicular anisotropy in defective anatase Phys. Rev. B 101 (2020) 014412 M. Streiter, T.G. Fischer, C. Wiebeler, S. Reichert, J. Langenickel, K. Zeitler, C. Deibel Impact of chlorine on the internal transition rates and excited states of the thermally delayed activated fluorescence molecule 3CzClIPN J. Phys. Chem. C 124 (2020) 15007-15014 M. Ulitschka, J. Bauer, G. Dornberg, F. Frost, T. Arnold Local smoothing of optical aluminum surfaces by reactive ion beam etching Opt. Eng. 59 (2020) 035108 M. Ulitschka, J. Bauer, F. Frost, T. Arnold Ion beam planarization of optical aluminum surfaces J. Astron. Telesc. Instrum. Syst. 6 (2020) 014001 S. Ullmann, P. Hahn, P. Mini, K.L. Tuck, A. Kahnt, B. Abel, M.E. Gutierrez Suburu, C.A. Strassert, B. Kersting Mixed-ligand lanthanide complexes supported by ditopic bis(imino-methyl)- phenol/calix[4]arene macrocycles: synthesis, structures, and luminescence properties of [Ln2(L2)(MeOH)2] (Ln = La, Eu, Tb, Yb) Dalton Trans. 49 (2020) 11179-11191 87

PUBLICATIONS IN JOURNALS AND BOOKS H. Zhu, H. Zhang, X. Ni, Z. Shen, J. Lu, P. Lorenz, K. Zimmer Erratum: “Picosecond laser lift-off method for fracture and debonding of copper oxide layer grown on copper substrate” [J. Laser Appl. 31, 042015 (2019)] J. Laser Appl. 32 (2020) 019902 A. Zieleniewska, X. Zhao, S. Bauroth, C. Wang, A.S. Batsanov, C. Krick Calderon, A. Kahnt, T. Clark, M.R. Bryce, D. M. Guldi Resonance-enhanced charge delocalization in carbazole-oligoyne-oxadiazole conjugates J. Am. Chem. Soc. 142 (2020) 18769-18781 S. Ziganshyna, A. Guttenberger, N. Lippmann, S. Schulz, S. Bercker, A. Kahnt, T. Rüffer, A. Voigt, K. Gerlach, R. Werdehausen Tetrahydroporphyrin-tetratosylate (THPTS)-based photodynamic inactivation of critical multidrug-resistant bacteria in vitro Int. J. Antimicrob. Agents 55 (2020) 105976 K. Zimmer, J. Zajadacz, P. Lorenz, A. Mayer, M. Papenheim, H.C. Scheer Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical PDMS pattern J. Micromech. Microeng. 30 (2020) 025008 S. Zöhrer, M. Golizadeh, N. Koutná, D. Holec, A. Anders, R. Franz Erosion and cathodic arc plasma of Nb-Al cathodes: composite versus intermetallic Plasma Sources Sci. Technol. 29 (2020) 025022 2021 S.K. Aghda, D. Music, Y. Unutulmazsoy, H.H. Sua, S. Mraz, M. Hans, D. Primetzhofer, A. Anders, J.M. Schneider Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V, Al)N thin films Acta Mater. 214 (2021) 117003 S. Altmayer, S. Jähnigen, L. Köhler, C. Wiebeler, C. Song, D. Sebastiani, J. Matysik Hydrogen bond between a tyrosine residue and the C-ring propionate has a direct influence on conformation and absorption of the bilin cofactor in red/green cyanobacteriochromes J. Phys. Chem. B 125 (2021) 1331-1342 A. Anders Meeting today’s needs in applied physics publishing J. Appl. Phys. 129 (2021) 090401 C. Baeumer, J. Li, Q. Lu, A.Y.-L. Liang, L. Jin, H.P. Martins, T. Duchon, M. Glöß, S.M. Gericke, M.A. Wohlgemuth, M. Giesen, E.E. Penn, R. Dittmann, F. Gunkel, R. Waser, M. Bajdich, S. Nemsák, J.T. Mefford, W.C. Chueh Tuning electrochemically driven surface transformation in atomically flat LaNiO3 thin films for enhanced water electrolysis Nature Materials 20 (2021) 674-682 A. Banari, C. Henry, R.H.F. Eidt, P. Lorenz, K. Zimmer, U. Hampel, G. Lecrivain Evidence of collision-induced resuspension of microscopic particles from a monolayer deposit Phys. Rev. Fluids 6 (2021) L082301 89

PUBLICATIONS IN JOURNALS AND BOOKS O. Daikos, T. Scherzer Monitoring of the residual moisture content in finished textiles during converting by NIR hyperspectral imaging Talanta 221 (2021) 121567 O. Daikos, A. Volland, T. Scherzer In-line monitoring of the application weight of an adhesion promoter and the residual moisture content in textile finishing by hyperspectral imaging using a NIR multiplex spectrometer system Prog. Org. Coat. 159 (2021) 106395 R. Das, P. Solís-Fernández, D. Breite, A. Prager, A. Lotnyk, A. Schulze, H. Ago High flux and adsorption based non-functionalized hexagonal boron nitride lamellar membrane for ultrafast water purification Chem. Eng. J. 420 (2021) 127721 M. Ehrhardt, P. Lorenz, J. Bauer, M.A. Hossain, B. Han, K. Zimmer Dry etching of germanium with laser induced reactive micro plasma Lasers Manuf. Mater. Process. 8 (2021) 237-255 H. Eliasson, M. Rudolph, N. Brenning, H. Hajihoseini, M. Zanáaka, M.J. Adriaans, M.A. Raadu, T.M. Minea, J.T. Gudmundsson, D. Lundin Modeling of high power impulse magnetron sputtering discharges with graphite target Plasma Sources Sci. Technol. 30 (2021) 115017 H. Ennaceri, A. Taleb, M. Boujnah, A. Khaldoun, J. Ebothé, A. Ennaoui, A. Benyoussef Theoretical and experimental studies of Al-doped ZnO thin films: optical and structural properties J. Comput. Electron. 20 (2021) 1948-1958 K. Evert, T. Kocher, A. Schindler, M. Müller, K. Müller, C. Pink, B. Holtfreter, A. Schmidt, F. Dombrowski, A. Schubert, T. von Woedtke, S. Rupf, D.F. Calvisi, S. Bekeschus, L. Jablonowski Repeated exposure of the oral mucosa over 12 months with cold plasma is not carcinogenic in mice Sci. Rep. 11 (2021) 20672 S. Glass, M. Kühnert, N. Lippmann, J. Zimmer, R. Werdehausen, B. Abel, V. Eulenburg, A. Schulze Photosensitizer-loaded hydrogels for photodynamic inactivation of multirestistant bacteria RSC Adv. 11 (2021) 7600-7609 M. Golizadeh, F. Mendez Martin, S. Kolozsvári, A. Anders, R. Franz Cathode spot behavior in nitrogen and oxygen gaseous atmospheres and concomitant cathode surface modifications Surf. Coat. Technol. 421 (2021) 127441 I. Gómez, A. Claver, J.A. Santiago, I. Fernandez, J.F. Palacios, C. Díaz, S. Mändl, J.A. García Improved adhesion of the DLC coating using HiPIMS with positive pulses and plasma immersion pretreatment Coatings 11 (2021) 1070 B.W. Grau, M. Dill, F. Hampel, A. Kahnt, N. Jux, S.B. Tsogoeva Four-step domino reaction enables fully controlled non-statistical synthesis of hexaarylbenzene with six different aryl groups Angew. Chem. Int. Ed. 60 (2021) 22307-22314 91

PUBLICATIONS IN JOURNALS AND BOOKS U. Kapprell, S. Friebe, S. Grüner, C. Grüner, A. Kupferer, B. Rauschenbach, S.G. Mayr Fibroblast response to nanocolumnar TiO2 structures grown by oblique angle sputter deposition Adv. Mater. Interfaces 8 (2021) 2100646 F. Kazemi, T. Arnold, P. Lorenz, M. Ehrhardt, K. Zimmer Combined reactive plasma jet-laser etching method for technical optical glass containing metal oxides Appl. Surf. Sci. 515 (2021) 149339 F. Kazemi, G. Böhm, T. Arnold A novel deal-grove-inspired model for fluorine-based plasma jet etching of borosilicate crown optical glass Plasma Process Polym. 18 (2021) 2000218 F. Kazemi, G. Böhm, T. Arnold Recursive algorithm for modeling non-linear etching rates in reactive plasma jet based optical surface machining of borosilicate crown glass Precis. Eng. 72 (2021) 205-214 N. Kraft, G. Wang, H. Bryja, A. Prager, J. Griebel, A. Lotnyk Phase and grain size engineering in Ge-Sb-Te-O by alloying with La-Sr-Mn-O towards improved material properties Mater. Des. 199 (2021) 109392 C. Krömmelbein, M. Mütze, R. Konieczny, N. Schönherr, J. Griebel, W. Gerdes, S.G. Mayr, S. Riedel Impact of high-energy electron irradiation on mechanical, structural and chemical properties of agarose hydrogels Carbohydr. Polym. 263 (2021) 117970 A. Kupferer, A. Holm, A. Lotnyk, S. Mändl, S.G. Mayr, Compositional patterning in carbon implanted titania nanotubes, Adv. Func. Mater. 35 (2021) 2104250 A. Kupferer, S. Mändl, S.G. Mayr, Tailoring morphology in titania nanotube arrays by implantation: experiments and modeling on pore closure - and beyond, Mater. Res. Lett. 9 (2021) 483-489 A. Kupferer, M. Mensing, J. Lehnert, S. Mändl, S.G. Mayr, Carbon and neon ion bombardment induced smoothing and surface relaxation of titania nanotubes, Nanomaterials 11 (2021) 2458 C. Küstner-Wetekam, X.Q. Hu, L. Marder, Ph. Schmidt, C. Ozga, Ch. Zindel, H. Otto, Y.G. Peng, J.G. Wang, C. Richter, N. Sisourat, U. Hergenhahn, A. Knie, A. Ehresmann, Y. Wu, A. Hans Nature and impact of charge transfer to ground-state dications in atomic and molecular environments Phys. Rev. A 104 (2021) 042802 E. Lehner, A. Liebau, F. Syrowatka, W. Knolle, S.K. Plontke, K. Mäder Novel biodegradable round window disks for inner ear delivery of dexamethasone Int. J. Pharm. 594 (2021) 120180 T. Lenz, A. Wickenbrock, F. Jelezko, G. Balasubramanian, D. Budker Magnetic sensing at zero field with a single nitrogen-vacancy center Quantum Sci. Technol. 6 (2021) 034006 93

PUBLICATIONS IN JOURNALS AND BOOKS V. Nikolaou, G. Charalambidis, G. Landrou, E. Nikoloudakis, A. Planchat, R. Tsalameni, K. Junghans, A. Kahnt, F. Odobel, A.G. Coutsolelos Antenna effect in BODIPY-(Zn)porphyrin entities promotes H2 evolution in dye- sensitized photocatalytic Systems ACS Appl. Energy Mater. 4 (2021) 10042-10049 K. Oh, D. Kalanov, A. Anders High-resolution observation of cathode spots in a magnetically steered vacuum arc plasma source Plasma Sources Sci. Technol. 30 (2021) 095005 K. Oh, D. Kalanov, A. Anders Streak image observations of vacuum arc spots in a magnetically steered arc plasma source Proc. 29th Int. Symposium on Discharges and Electrical Insulation in Vacuum (2021) 222-225 K. Oh, D. Kalanov, P. Birtel, A. Anders High-resolution observation of cathodic arc spots in a magnetically steered arc plasma source in low pressure argon, nitrogen, and oxygen atmospheres J. Appl. Phys. 130 (2021) 183304 E. Oswald, A.-L. Gaus, J. Kund, M. Küllmer, J. Romer, S. Weizenegger, T. Ullrich, A. K. Mengele, L. Petermann, R. Leiter, P. R. Unwin, U. Kaiser, S. Rau, A. Kahnt, A. Turchanin, M. von Delius, C. Kranz Cobaloxime complex salts: synthesis, patterning on carbon nanomembranes and heterogeneous hydrogen evolution studies Chem. Eur. J. 27 (2021) 16896-16903 C. Ozga, C. Honisch, Ph. Schmidt, X. Holzapfel, C. Zindel, C. Küstner-Wetekam, C. Richter, U. Hergenhahn, A. Ehresmann, A. Knie, A. Hans Photon-electron coincidence experiments at synchrotron radiation facilities with arbitrary bunch modes Rev. Sci. Instrum. 92 (2021) 045110 I. Papadopoulos, A. Menon, F. Plass, D. Molina, C. Harreiß, A. Kahnt, E. Spiecker, A. Sastre- Santos, D.M. Guldi Efficient charge-transfer from diketopyrrolopyrroles to single-walled carbon nanotubes Nanoscale 13 (2021) 11544-11551 F. Plass, S. Bönisch, F. Held, T. Ullrich, F. E. J. Fischer, A. Guryev, A. Görling, A. Kahnt, S. B. Tsogoeva Controlling and fine-tuning charge-transfer emission in 2, 6-dicyanoaniline multichromophores prepared through domino reactions: entry to a potentially new class of OLEDs J. Org. Chem. 86 (2021) 6111-6125 R. Pütt, P. Kozlowski, I. Werner, J. Griebel, S. Schmitz, J. Warneke, K.Y. Monakhov {P2V3W15}-polyoxometalates functionalized with phthalocyaninato Y and Yb moieties Inorg. Chem. 60 (2021) 80-86 L. Qian, F.-D. Kopinke, T. Scherzer, J. Griebel, A. Georgi Enhanced degradation of perfluorooctanoic acid by heat-activated persulfate in the presence of zeolites Chem. Eng. J. 429 (2021) 13200 P. Räcke, L. Pietzonka, J. Meijer, D. Spemann, R. Wunderlich Vacancy diffusion and nitrogen-vacancy center formation near the diamond surface Appl. Phys. Lett. 118 (2021) 204003 95

PUBLICATIONS IN JOURNALS AND BOOKS S. Schmorl, S. Naumov, B. Abel, M. Börner, A. Pöppl, B. Kersting Metalloligands based on Robson-type amino-thiophenolato macrocycles for assembly of heterotrimetallic complexes Dalton Trans. 50 (2021) 5784-5788 A. Schulze, L. Drößler, S. Weiß, M. Went, A. Abdul Latif, D. Breite, K. Fischer Membranfunktionalisierung im Pilotmaßstab: Rolle-zu-Rolle-Elektronenstrahlsystem mit Inline-Kontaktwinkelbestimmung Chem. Ing. Tech. 93 (2021) 1383-1388 M. Seiss, S. Schmitz, M. Börner, K.Y. Monakhov Synthesis and crystal structure of a one-dimensional chain-like strontium(II) coordination polymer built of N-methyldiethanolamine and isobutyrate ligands Acta Cryst. E 77 (2021) 703-707 A. Setzer, P.D. Esquinazi, O. Daikos, T. Scherzer, A. Pöppl, R. Staacke, T. Lühmann, S. Pezzagna, W. Knolle, S. Buga, B. Abel, J. Meijer Weak electron irradiation suppresses the anomalous magnetization of N-doped diamond crystals Phys. Status Solidi B 258 (2021) 2100395 K.S. Stroh, H.J. Risselada Quantifying membrane curvature sensing of peripheral proteins by simulated buckling and umbrella sampling J. Chem. Theory Comput. 17 (2021) 5276–5286 M. Stuckart, N. V. Izarova, M. Glöß, J. Klose, C. Schmitz-Antoniak, P. Kögerler, B. Kersting, K.Y. Monakhov Insertion of VIV ions into the polyoxotungstate archetype {As4W40} Inorg. Chem. 60 (2021) 8437-8441 K. Ueltzen, S. Schmitz, M. Moors, M. Glöß, M. Börner, I. Werner, Z. Warneke, J. Warneke, B. Abel, K.Yu. Monakhov Synthesis, Structure, and Surface Adsorption Characteristics of a Polynuclear MnII,IV– YbIII Complex Inorg. Chem. 60 (2021) 10415-10425 M. Ulitschka, J. Bauer, F. Frost, T. Arnold Improvement of the optical properties after surface error correction of aluminium mirror surfaces J. Eur. Opt. Soc. Rapid Publ. 17 (2021) 1 S. Ullmann, M. Börner, A. Kahnt, B. Abel, B. Kersting Green-emissive Zn2+ complex supported by a macrocyclic Schiff-base/calix[4]arene- ligand: crystallographic and spectroscopic characterization Eur. J. Inorg. Chem. 2021 (2021) 3691-3698 R.D. Urban, T.G. Fischer, A. Charvat, K. Wink, B. Krafft, S. Ohla, K. Zeitler, B. Abel, D. Belder On-chip mass spectrometric analysis in non-polar solvents by liquid beam infrared matrix-assisted laser dispersion/ionization Anal. Bioanal. Chem. 413 (2021) 1561-1570 K. Vogel, R. Wei, L. Pfaff, D. Breite, H. Al-Fathia, C. Ortmann, I. Estrela-Lopis, T. Venus, A. Schulze, H. Harms, U.T. Bornscheuer, T. Maskow Enzymatic degradation of polyethylene terephthalate nanoplastics analyzed in real time by isothermal titration calorimetry Sci. Total Environ. 773 (2021) 145111 97

PUBLICATIONS IN JOURNALS AND BOOKS Y. Yun, L. Mühlenbein, D.S. Knoche, A. Lotnyk, A. Bhatnagar Strongly enhanced and tunable photovoltaic effect in ferroelectric-paraelectric superlattices Sci. Adv. 7 (2021) eabe4206 99

CONFERENCE PROCEEDINGS M. Schmidt, S. Zahn, A. Prager, W. Knolle, R. Gläser, A. Schulze Electron-beam-induced grafting of polymer membranes Proc. 23rd JCF Frühjahrssymposium (2021) 125 M. Schmidt, A. Abdul Latif, A. Prager, R. Gläser, A. Schulze One-step grafting of bovine serum albumin protein on polymer embranes Paper Nr. P 439, Euromembrane 2021, Copenhagen, Denmark, 28.11.-02.12. (2021) 356 A. Schulze Electron beam engineering of polymer membranes: high performance, antifouling, long-term stability Paper Nr. 313, Euromembrane 2021, Copenhagen, Denmark, 28.11.-02.12. (2021) 159 A. Schulze, L. Drößler, S. Weiß, M. Went, A. Abdul Latif, D. Breite, K. Fischer Membranfunktionalisierung im Pilotmaßstab: Rolle-zu-Rolle-Elektronenstrahlsystem mit Inline-Kontaktwinkelbestimmung Proc. DGMT Tagung 2021 'Membranen zum Schutz von Klima und Ressourcen', Deutsche Gesellschaft für Membrantechnik (2021) 12-19 T. Sener Raman, C. Krömmelbein, S. Mayr, B. Abel, A. Schulze Tailoring the material properties of gelatin/PEGDA hybrid hydrogels by high energy electron irradiation Proc. 23rd JCF Frühjahrssymposium (2021) 160 101

TALKS O. Daikos, M. Naumann, C. Bundesmann, U. Helmstedt, T. Scherzer* Monitoring the thickness distribution of ultrathin printed PEDOT:PSS layers by NIR hyperspectral imaging 21st European Symposium on Polymer Spectroscopy, Linz, Austria, 13.-15.01.2020 T. John*, H.J. Risselada, L.L. Martin, B. Abel Impact of nanostructured surfaces on the aggregation of amyloidogenic peptides ACS Fall 2020 Virtual Meeting, 17.-20.08.2020 T. John* Interaction and aggregation mechanisms of peptides at biologically relevant interfaces Seminar, Institut für Theoretische Physik, Georg-August-Universität Göttingen, Göttingen, Germany, 13.01.2020 A. Kahnt*, F. Plass, V. Nikolaou, A. Planchat, A. Charisiadis, G. Charalambidis, P.A. Angaridis, F. Odobel, A.G. Coutsolelos Charge transfer processes in zinc porphyrin-fullerene dyads on NiO surfaces Central European Conf. on Photochemistry, Bad Hofgastein, Austria, 09.-13.02.2020 A. Lotnyk* Phase change thin films for non-volatile memory applications: growth, structure and properties Virtual Seminar, Key Laboratory of In-Fiber Integrated Optics of Ministry of Education, Harbin Engineering University, Harbin, China, 03.11.2020 A. Lotnyk*, M. Behrens, M. Ehrhardt, B. Rauschenbach Interfacial crystallization of epitaxial Ge2Sb2Te5 phase change thin films 2020 MRS Virtual Spring/Fall Meeting & Exhibit, 27.11.-04.12.2020 S. Mändl*, P. Schlenz, J.W. Gerlach, D. Manova In situ XRD for details on expanded austenite formation 17th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 07.-10.09.2020 S. Mändl*, D. Manova Time-resolved OES measurements during pulsed plasma processes 4th Int. Workshop Diagnostic Systems for Process Monitoring, Oederan, Germany, 14.10.2020 S. Mändl*, P. Schlenz, J.W. Gerlach, D. Manova New insights into the structure of expanded austenite Material Science and Engineering Congress, Virtual Meeting, 22.-25.09.2020 S.V. Muley, A.C.A. Martínez, Z. Yang, X. Wang, Q. Ji, A. Anders Self-regulation of current sharing in high-temperature superconducting cables by temperature-dependent resistivity switching in vanadium oxide coatings 2020 MRS Virtual Spring/Fall Meeting & Exhibit, 27.11.-04.12.2020 M. Rudolph*, N. Brenning, M.A. Raadu, H. Hajihoseini, J.T. Gudmundsson, A. Anders, D. Lundin Optimizing the deposition rate and ionized flux fraction by tuning the pulse length in high power impulse magnetron sputtering 17th Int. Conf. on Plasma Surface Engineering, Erfurt, Germany, 07.-10.09.2020 P. Schlenz*, S. Mändl, D. Manova Nitrogen marker experiments in austenitic stainless steel for identification of trapping/detrapping processes Material Science and Engineering Congress, Virtual Meeting, 22.-25.09.2020 103

TALKS T. Arnold*, M. Ulitschka, J. Bauer, F. Frost Ion beam finishing of optical aluminium surfaces 11th HLEM 2021 - High Level Expert Meeting Asphere Metrology, Nanotechnologie Kompetenzzentrum Ultrapräzise Oberflächenbearbeitung, Braunschweig, Germany, Online, 16.-18.03.2021 J. Bauer*, A. Prager, D. Hirsch, J. Gerlach, M. Ehrhard, C. Bundesmann XPS at the Leibniz-Institute of Surface Engineering (IOM) Kratos German Users Meeting, Eppstein, Germany, Online, 26.-27.05.2021 J. Becker-Jahn*, A. Schulze Durch Sonnenlicht anregbare photoaktive Polymermembranen zum Abbau von Mikroschadstoffen 14. Aachener Tagung Wassertechnologie, Aachen, Germany, Online, 02.-03.11.2021 E. Bez*, M. Himmerlich, A.K.R. Portilla, L. Baudin, P. Lorenz, K. Zimmer, M. Taborelli, A. Anders Laser-induced surface structuring for electron cloud mitigation in particle accelerators 12. Mittweidaer Lasertagung, Mittweida, Germany, 10.-11.11.2021 C. Bundesmann*, C. Eichhorn, L. Pietzonka, F. Scholze, D. Spemann EP activities at the Leibniz Institute of Surface Engineering in Leipzig (IOM) 8th Russian-German Conf. on Electric Propulsion and Their Application, Kaliningrad, Russia, Online, 11.-15.04.2021 O. Daikos, M. Naumann, C. Bundesmann, U. Helmstedt, T. Scherzer* Hyperspectral imaging of the thickness distribution of thin printed layers of PEDOT:PSS 20th Int. Conf. on NIR, Beijing, China, online, 18.-21.10.2021 M. Ehrhardt*, P. Lorenz, B. Han, K. Zimmer Laser-induced reactive micro plasma as an advanced tool for high quality surface engineering 2021 EMRS Spring Meeting, Online, 31.05.-03.06.2021 D. Kalanov*, C. Bundesmann Ion beam sputtering of gallium oxide XXV Int. Conf. on Ion-Surface Interactions, Yaroslavl, Russia, Online, 23.-27.08.2021 D. Kalanov*, M. Rudolph, W. Diyatmika, A. Anders Spoke-less sputtering at high working gas pressures in HiPIMS discharges Plasma Thin film International Union Meeting, Antibes, France, Online, 13.-17.09.2021 A. Kühne*, O. Lorenz, M. Rudolph, A. Anders, B. Abel Tailored electrodes for solid acid fuel cells via sputtering: Improved platinum utilization via optimized layer microstructure Plasma Thin film International Union Meeting, Antibes, France, Online, 13.-17.09.2021 A. Kupferer*, M. Mensing, J. Lehnert, A. Lotnyk, S. Mändl, S. G. Mayr Relaxation reduces stress: effects of low energy ion implantation on amorphous TiO2 nanotube arrays 13th Annual BuildMoNa Conf., Leipzig, Germany, Online, 08.-09.03.2021 A. Lotnyk* Nanoscale characterization of phase-change memory thin films and heterostructures by aberration-corrected STEM 11th Int. Conf. on 'Nanomaterials: Applications & Properties', Odessa, Ukraine, 05.-11.09.2021 105

TALKS A. Schulze*, I. Thomas, M. Went, D. Breite, K. Fischer, M. Schmidt, J. Becker-Jahn, A. Prager Tailored surface design of polymer membranes for real applications Chemiedozententagung 2021, Gesellschaft Deutscher Chemiker, Online, 15.-17.03.2021 A. Schulze*, M. Schmidt, J. Becker-Jahn, D. Breite, K. Fischer Surface engineering of polymer membranes for use in water treatment 13th Annual BuildMoNa Conf., Leipzig, Germany, Online, 08.-09.03.2021 A. Schulze* Membranfunktionalisierung im Pilotmaßstab: Rolle-zu-Rolle-Elektronenstrahlsystem mit Inline-Kontaktwinkelbestimmung Jahrestreffen der Processnet-Fachgruppen Extraktion und Membrantechnik, Online, 04.- 05.02.2021 D. Spemann*, P. Räcke, J.W. Gerlach, J. Meijer Development of deterministic ion implantation for applications in quantum technologies Online workshop: 'Nanoengineering: Lithography and Patterning' WP13 - JA3 - Nano- Engineering and pattern transfer methods, NFFA-Europe PILOT, Lausanne, Switzerland, Online, 10.12.2021 107

POSTERS R. Heinke*, P. Lorenz, J. Zajadacz, M. Ehrhardt, K. Zimmer Observation of anisotropic dry etching of silicon using a laser-induced reactive microplasma 2021 EMRS Spring Meeting, Online, 31.05.-03.06.2021 M. Himmerlich*, P. Lorenz, M. Ehrhardt, K. Bogdanowicz, M. Taborelli and K. Zimmer Wavelength dependence of ps-laser surface roughening for secondary electron yield reduction of copper 2021 EMRS Spring Meeting, Online, 31.05.-03.06.2021 A.M. Jakob*, S.G. Robson, H.R. Firgau, V. Schmitt, V. Mourik, M. Posselt, D. Spemann, A. Morello, D.N. Jamieson High-confidence single ion implantation for scalable donor arrays in silicon 25th Int. Conf. on Ion Beam Analysis & 17th Int. Conf. on Particle Induced X-ray Emission & Int. Conf. on Secondary Ion Mass Spectrometry, London, UK, online, 11.-15.10.2021 F. Kazemi, J. Bauer, T. Arnold, P. Lorenz, M. Ehrhardt*, K. Zimmer Mechanism for sequential etching of technical glass by combining reactive plasma jet and laser ablation 2021 EMRS Spring Meeting, Online, 31.05-03.06.2021 C. Krömmelbein*, M. Mütze, R. Konieczny, S. Riedel, S.G. Mayr Impact of high-energy electron irradiation on mechanical, structural and chemical properties of agarose hydrogels 13th Annual BuildMoNa Conf., Leipzig, Germany, Online, 08.-09.03.2021 A. Kupferer*, M. Mensing, J. Lehnert, A. Lotnyk, S. Mändl, S. G. Mayr Relaxation reduces stress: effects of low energy ion implantation on amorphous TiO2 nanotube arrays 13th Annual BuildMoNa Conf., Leipzig, Germany, Online, 08.-09.03.2021 P. Lorenz*, Y. Yu, J. Zajadacz, C. Petersen, M. Ehrhardt, R. Kirchner, K. Zimmer Folding of laser-cut templates with plasmonic functionalized surfaces into micro cubes 47th Int. Conf. on Micro and Nano Engineering, Torino, Italy, online, 20.-23.09.2021 Z. Niavarani*, D. Breite, B. Abel, A. Schulze Estradiol removal by adsorber membranes Biennial Meeting of the GDCh Division of Macromolecular Chemistry, Frankfurt, Germany, Online, 13.-14.09.2021 Z. Niavarani*, D. Breite, B. Abel, A. Schulze Estradiol removal by amide functionalized microfiltration membrane Euromembrane 2021, Copenhagen, Denmark, 28.11.-02.12.2021 Z. Niavarani*, D. Breite, B. Abel, A. Schulze Estradiol removal by adsorptive coating on a microfiltration membrane 23rd JCF Frühjahrssymposium 2021, Leipzig, Germany, Online, 29.03.-01.04.2021 T. Rüdiger*, M. Mitzschke, A. Prager, A. Schulze, F. Frost Nanopatterning of AZ® 4562 with Ar+ ion beam etching 23rd JCF Frühjahrssymposium 2021, Leipzig, Germany, Online, 29.03.-01.04.2021 M. Schmidt*, A. Abdul Latif, A. Prager, R. Gläser, A. Schulze One-step grafting of bovine serum albumin protein on polymer membranes Euromembrane 2021, Copenhagen, Denmark, 28.11.-02.12.2021 109

PATENTS Granted Patents 2020 M. Ehrhardt, K. Zimmer, P. Lorenz, J. Zajadacz, A. Anders Verfahren zur Behandlung einer Festkörperoberfläche DE 10 2019 006 322.8 F. Pietag, T. Arnold Vorrichtung und Verfahren zum Schalten einer Ionenstrahlquelle DE 20 2020 100 668.1 2021 C. Elsner, B. Abel, A. Charvat Verfahren zur Herstellung eines Mikrosystembauteils DE 10 2017 130 947.0 G. Böhm, K. Zimmer, T. Arnold, H. Paetzelt, M. Ehrhardt Verfahren zur 3D-Strukturierung und Formgebung von Oberflächen aus harten, spröden und optischen Materialien DE 10 2012 010 635.1 111