Tailored Surfaces

Members of the Board of Trustees Free State of Saxony, Ministry of State of Science and Art represented by RD’in Cathrin Liebner (Chairwoman) Federal Republic of Germany, Federal Ministry of Education and Research represented by MinR Dr.-Ing. Joachim P. Kloock Association of the Leibniz Institute of Surface Engineering (IOM) represented by Dr. Karsten Otte and Prof. Dr. Konrad Samwer Members of the Scientific Advisory Board Prof. Dr. Roger Gläser (Chairman) University Leipzig, Institute of Chemical Technology Dr. Klaus-Friedrich Beckstette Carl-Zeiss Oberkochen Dr. Kurt Dietliker ETH Zürich and BASF Schweiz AG, Switzerland Prof. Dr.-Ing. Dr. h. c. Ralf Eckhardt Beyer Fraunhofer Institute for Material and Beam Technology and Technical University Dresden Prof. Dr. Marius Grundmann University Leipzig, Felix Bloch Institute of Solid State Physics PD Dr. Bernd Herzog BASF SE, Ludwigshafen a. R. Prof. Dr. Hans-Gerd Löhmannsröben Potsdam University Tino Petsch 3D-Micromac AG, Chemnitz Prof. Dr. Christina Trautmann GSI Darmstadt Prof. Dr. Karl-Michael Weitzel Philipps University of Marburg

Contents 7 Preface 17 Scientific and Technology Results 18 Reports xx 18 22 26 30 34 38 Reactive Ion Beam Etching for Ultraprecise Fabrication of Optical Elements: A Brogress Report Low Temperature Bhotochemical Conversion of Metal-organic Brecursor Layers to Metal Oxide Thin Films Secondary Electron Emission during BIII Bulses as Measured by Bassive Calorimetric Brobe High Berformance Electrodes for Intermediate Temperature Fuel Cells Laser Ablation Studies for all Laser Scribed Monolithically Integrated Interconnected Berovskite Modules Imaging the Morphology of Semiconducting Bolymer Films on the Nanoscale 41 Selected Results 41 42 43 44 45 46 47 48 49 50 50 Systematics in Reactive Ion Beam Sputter Deposition of TiO2 Tailoring Membrane Surface Charges: How Electrostatic Interactions Dominate Membrane Fouling Blasma Jet-based Deterministic Thin Film Deposition for Additive Surface Figure Error Correction New Battern Transfer Techniques for the Amplification of Microstructures Novel Setup for Investigation of Ion Energy and Ion Mass Selective Hyperthermal Ion-Beam Assisted Deposition Brocesses Efficient Chlorine Atom Functionalization at Nanodiamond Surfaces by Electron Beam Irradiation High Energy Electron Irradiation of Gelatin Ferrogels for Bioapplications Near-Infrared Chemical Imaging of Functional Finishes on Textiles Real Structure and Electron Beam Induced Modification of GeSbTe-based Bhase Change Thin Films Molecular Modeling of the Bhotoinitiator-free Bhotopolymerization Molecular Dynamics Simulations on Martensitic Transformations in Iron-Balladium 53 Equipment for Research and Application 61 Personal Activities 62 63 65 Doctoral Theses Diploma and Master Theses Activities in Scientific Organisations 67 Honours and Awards 69 70 Scientific Events Scientific Meetings co-organized by IOM 70 Institute Colloquia 73 Lectures 75 Seminars 79 Publications and Presentations 80 93 96 96 110 120 Bublications in Journals and Books Conference Broceedings Bresentations Talks Bosters Batents

PREFACE Preface The Leibniz Institute of Surface Engineering (IOM), a member of the Leibniz Association, celebrated its 25 anniversary in 2017. It was established after German unification based on the recommendation of Germany’s Science Council. It evolved from a “Blue List Institute” to a widely recognized research institution. Its research focuses on modification of surfaces and thin films by ion beam, electron, laser and plasma techniques. According to its constitution, the institute performs “application- oriented fundamental research”, which allows it to oper- ate at the interesting and rewarding interface of funda- mental and applied research with the goal of creating modified surfaces and new materials in economically relevant technology fields. The research activities include Ultra-precision smoothing and shaping by ion beam and plasma technologies Structuring of surfaces by laser beams and analysis of thin films Deposition of thin films and nanostructures by ion, laser and plasma technologies Modification of surfaces by electron and photon tech- nologies Development of nanocomposites and cross-linked polymer films Preparation of bio-functional films and modification of membranes. This biennial report 2016/2017 presents selected scientific contributions, a general overview of the scientific life and compilations of published results, talks and patents. Particular highlights in 2016 and 2017 were: The Leibniz Joint Lab for Single Ion Implantation, a collaboration between the IOM and the University of Leipzig, made progress in an unexplored field. Determin- istic single ion implantation could contribute to the devel- opment of quantum computers and quantum-based sen- sors. In the presence of SMWK State Minister Dr. E.-M. Stange and Prof. Dr.-Ing. M. Kleiner, President of the Leibniz Association, IOM’s new Application Center was inaugurated. The Application Center presents an invest- ment, about 2M€ for the building and 3.6M€ for equip- ment, including an electron accelerator, a system for ion beam etching, a roll-to-roll coater, and various material analysis devices. The institute also enjoyed the acquisition of other major pieces of equipment need to perform leading edge research and development such as a focused ion beam (FIB) sample preparation device and a Raman spectrome- ter, a device giving information on material’s structure and bonding. breaking research on the definition of the new system of units, the “new SI”. In the reporting period, two EU projects were success- fully concluded, one assessing laser-based manufacturing, and the other producing coatings with extreme barrier properties on flexible substrates. 2017 was also the year when the baton of directorship was handed over from Prof. B. Rauschenbach to Prof. A. Anders. Prof. Rauschenbach can look back to 17 years of leadership marked by continuous growth in size, im- portance and reputation of the institute. His accomplish- ments were honored at several events, including a cele- bratory scientific colloquium on the 1st of September, 2017, the date of transition. As a Leibniz Institute, IOM receives its basic funding from the Free State of Saxony and the German federal gov- ernment in equal parts. An important indicator of scien- tific quality is the amount of additional third party fund- ing, which in 2016 /2017 reached a total of 8.8 Mio Euro. The IOM is increasingly attractive for international col- leagues who, from various countries, come to visit or work at IOM. The number of the PhD and master students working at IOM continues to be high, more than 40 each year, which shows IOM’s commitment to training of the next generation of scientists and engineers. IOM continued to put strong emphasis on collaboration with industry, small and medium enterprises, universities and other research laboratories. All of these points are evident by the detailed research contributions compiled in this report. IOM would like to thank the Leibniz Association and all partners and friends who supported its development. Special thanks go to the Board of Trustees, the Scientific Advisory Board, the Ministry of Science and Arts of the Free State of Saxony, and the Ministry of Education and Research of the Federal Government of Germany. Our partners from research institutes, universities and indus- try all around the world contributed to the success of IOM and play a crucial role for its ongoing development. Last but not least, the outgoing and incoming directors would like to thank the staff of the institute for their dedicated efforts and excellent contributions in the last two years. Leipzig, in Spring 2018 Prof. Dr. Dr. h. c. Bernd Rauschenbach Outgoing Director In the series of Gustav Hertz Colloquia, particularly noteworthy was the presentation of Nobel Laureate Klaus von Klitzing who discussed the implications of his ground- Prof. Dr. André Anders Incoming Director

PREFACE GERMAN UNITY DAY 2016 – CITIZENS PARTY IN DRESDEN / The IOM joined other Leibniz Institutes and research facilities of the “Saxon Scientific Mile” in showcasing its research and scientific results. NOBEL LAUREATE PROF. DR. KLAUS VON KLITZING VISITS IOM / Attendees of the series of Gustav Hertz Colloquia could enjoy a special guest speaker from the Max Planck Institute for Solid State Research. Prof. Dr. Klaus von Klitzing Nobel Laureate of 1985, gave an insightful lecture on implications of his research to the new system of units. In 1985, the Nobel Prize in Physics was awarded to him "for the discovery of the quantized Hall effect".

PREFACE CELEBRATORY FAREWELL OF THE IOM-DIRECTOR PROF. DR. DR. H.C. BERND RAUSCHENBACH / In September 2017 the IOM celebrated the retiring director in the presence of many guests from politics, science, industry, personal friends and staff of the IOM. His achievements in his term of 17 years were appreciated in celebratory colloquia. NEW DIRECTOR AT THE IOM / A warm welcome to our new colleague Prof. Dr. André Anders. Since September 2017 he is the new director of the IOM Leipzig and head of the Physical Department. We are glad that he joint us and wish him success and good luck for his future.

PREFACE AWARDS OF THE INSTITUTE / Science and Technology Award 2016 Dr. Agnes Schulze For her contribution to the topic “Entwicklung neuer Membranen für die Wasserreinigung” “Development of new membranes for water purification” / Young Scientist Award 2016 Dr. Marcel Hennes For his doctoral thesis “Synthese, Charakterisierung und Modellierung von magnetischen Kern-Schale-Clustern” „Synthesis, characterisation and modelling of magnetic core-shell-clusters“ / Special Award for Technical Staff 2016 Sven Arnold For his contribution to “Ausbau der elektronischen Datenverarbeitung (EDV) am IOM” „Upgrading of the electronic data processing (EDP) at the IOM”

Scientific and Technology Results Reports Selected Results

Reports RIBE facility (RIBE 450), belonging to the IOM application centre, was also realized (Figure 1). The integrated 5 axis-motion system enables sophisticated motion algorithms for, e.g., a large workpieces with uniform etching of diameters up to 450 mm and a maximum weight of 50 kg. With the RIBE 450 etching plant newly developed IOM etching processes for ultraprecise and innovative structured functional surfaces can be further scaled up for industrial relevant sizes, as will be examined below. Process simulation and validation to generate a highly uniform or a rotationally symmetric removal on large workpieces or smoothing In many ion beam related processes like pattern transfer, a homogeneous removal is necessary. The sample dimensions are often larger than the beam size of the ion source. This usually leads to various motion strategies like meander or spiral paths. planarization is to rotate Our approach for the realization of a rotationally symmetric removal the sample relatively to the ion source and shift the centre of the sample relative to the centre of the ion source (see Figure 2) the homogeneous removal depends on the given sample radius, the standard deviation of the removal function σ (or full width at half maximum FWHM) and the offset of the ion source Rj. [5]. The quality of Based on footprint data the parameters of the removal function must be determined. Possible estimators are Gaussian and error functions or a combination of both. To reflect the rotation of the sample, the removal function is integrated in circles to determine the dependency of etch rate and radius. This dependency is used to calculate the optimal set of shifts Rj (j = 0…n) of the sample centre and the centre of the ion source. In the discrete case the optimal shifts Rj and the Figure 2: Process scheme for two radii etching R0 ≠ 0 and R1 ≠ 0. etch rates rji (i-circle number) are obtained separately. For n = 1, the relative dwell times ̀ for R0 and

Reports a) b) c) Figure 4: Experimental results from the manufacturing of 1700 l/mm monolithic transmission gratings in fused silica. (a) Representative focused ion beam scan of sample #1, measured in the center of the grating. (b) Same as (a) for sample #2 (early stage of profile optimization). (c) Spectral efficiency measurements for sample #1 and #2 in comparison to RCWA simulation based on FIB-profile of Sample 1. result inside low-density plasma higher divergences can in unwanted shadowing effects. For the applied etching recipe, the divergence was therefore minimized by using a the discharge chamber of the ion source. Moreover, the voltage applied at the acceleration grid was optimized. For the current setup and parameters, a divergence below 5° can be assumed. Different realized grating profiles the estimated diffraction efficiencies are shown in Figure 4. together with To the best of our knowledge, higher efficiencies for comparably highly-dispersive transmission gratings using monolithic profiles in fused silica were not reported in the literature up to today. Therefore, it is believed that the versatile and robust manufacturing chain using a simple, to even more the advantageous window of scalable and flexible recording setup combined tolerance with compared sophisticated technologies is of high interest for industrial applications, especially in high-end short pulse lasers where classical gold gratings reach their limits. Further work has to be devoted to achieve an even better level of uniformity and more reproducible profiles for serial manufacturing. Conclusion the the improvement of One main activity in the reporting period are aimed on technical infrastructure of research core unit Ion Beam assisted Technologies. Overall three new RIBE facilities (ISA 200, SHAPION, RIBE 450) could be taken into operation. Due do the integration of aligned in-situ measurement technologies, both optical and mass spectroscopic, a significantly improved process control the (RIBE) of diffractive functionalized surface has been achieved. Additionally, the newly developed tools for the removal simulation of RIBE processes, together with the integrated motion systems in the new machines, especially in the RIBE 450 plant, enables now a uniform etching of large workpieces with diameters up to 500 mm. Furthermore, RIBE procedures for patterning of very deep gratings as well as ultra-shallow gratings have been developed. for Acknowledgement The authors would like to thank all colleagues involved, especially K. Ohndorf and T. Liebeskind. Moreover, we acknowledge Detlef Schelle from IAP Jena for preparing FIB-scans. We kindly thank BMBF, EFRE, Free State of Saxony and Carl Zeiss Jena GmbH for the generous financial support. Literature [1] F. Koch, M. Burkhardt, D. Lehr, M. Schnabel, M. Helgert, R. Fechner, F. Frost, T. Glaser, Asian J. Phys. 25, 881 (2016). [2] F. Koch, D. Lehr, O. Schönbrodt, T. Glaser, R. Fechner, F. Frost, Microelectronic Engineering 191, 60–65, DOI: 10.1016/j.mee.2018.01.031 (2018). [3] Y. Li, H. Takino, F. Frost, Opt. Express 25, 7828-7838, DOI: 10.1364/OE.25.007828 (2017). [4] R. Fechner, A. Nickel, I. Bucsi, K. Ohndorf, M. Emmrich, F. Frost, Schlussbericht Verbundprojekt „Effiziente Produktion ultrapräziser innovativ strukturierter funktioneller Oberflächen mittels adaptiver Plasmatechnik – (SHAPION)“, DOI: 10.2314/GBV:867464763. [5] F. Frost, A. Nickel, C. Alvermann, S. Görsch, Verfahren und Vorrichtung zur Erzeugung eines gewünschten Oberflächenprofils, German patent DE 10 2017 130 797.4, Filed December 2017. 21

Reports precursor gravimetrically. thin films was determined cleavage Precursor UV irradiation was carried out in a homemade chamber [1.2 m3 h-1 nitrogen gas flow, * excimer 0.25 % oxygen], equipped with a Xe2 lamp having a continuous emission in the VUV wavelength range at 160 nm < λ < 195 nm [photon energy 7.75 > EPh > 6.36 eV, 614 kJ mol-1 < ȂE < 748 kJ mol-1], enough for photoinitiated radical bond reactions of C-C (348 kJ mol-1), C-O (358 kJ mol-1) and C-H (413 kJ mol-1) bonds in the organic ligands of [Ti(OEt)4] as precursor. titanium(IV) ethoxide During irradiation the temperature at sample surface did not exceeded 34 °C. ATR-FTIR spectra on pristine and irradiated Ti(OEt)4 thin recorded under films were flowing nitrogen atmosphere in absorbance mode. Gaseous reaction products were enriched on a solid phase microextraction fiber assembly and analyzed using a gas chromatography system coupled with a mass selective detector (GC-MS). Film morphology was obtained by scanning electron microscopy (SEM) at an acceleration voltage of 1 kV. Thin film depth profiles were produced by multiple X-ray photoelectron spectroscopy (XPS) analysis cycles together with material removal via sputtering using argon ions (0.5 kV). The thin films structure was investigated using X-ray diffraction (XRD) in Bragg-Brentano geometry with Cu Kα1 radiation (λ = 0.15406 nm), in the 2θ range of 20°-70° and a step width of 0.05°. X-ray reflectivity (XRR) measurements were performed using a combined high-resolution reflectometer/diffractometer setup with parallel- beam geometry. X-ray radiation was collimated by a multilayer-gradient X-ray mirror. Cu Kα1 radiation was exclusively obtained by passing a 2- bounce Ge(220) crystal monochromator. Measurements were carried out in the range between 0°-1.25° (step widths of 0.002°). The intensity of the radiation which was reflected from the sample was determined by a scintillation detector. UV-Vis transmittance of thin films onto quartz was measured in the range of 300-1000 nm. Film thicknesses of the spin-coated and VUV irradiated by spectroscopic ellipsometry (SE) in the spectral range from 400-1700 nm at three angles of incidence (65°, 70° and 75°). Water vapour transmission rates of TiOx covered PET films were determined at 38 °C and 90 % relative humidity. was measured samples chemical calculations transformations of employing Quantum Density Functional Theory (DFT, B3LYP, Jaguar program package) helped us to understand the underlying molecular mechanisms. Structures and energies of possible the molecules were calculated at B3LYP/LACVP* level of theory. The frequency analysis was done at the same level of theory to characterize the stationary points on the potential surface and to obtain total enthalpy (H) and Gibbs free energy (G) at a standard temperature of 298.15 K using unscaled vibrations. ∆H and ∆G were calculated as the difference of the calculated H and G between reactants and products. For better understanding of observed experimental IR- spectra, frequency analysis was done on possible structures, which during transformations of studied geometries after UV (EPhoton = 7.2 eV). The electronic excitation excitation energies were calculated using the Time Dependent (TD) DFT method at the B3LYP/LACVP* level of theory. could be built Results and Discussion Ti(OEt)4 conversion and decomposition kinetics (Fig. 1) for different precursor layer thicknesses were obtained under the assumption that ATR- FTIR peak areas of C-O-based vibrations between 1200-980 cm-1 represent the remaining precursor contents. Measured data of the initial C- O bond scission initiated by VUV photons can be fit by a first-order law (correlation r2 > 0.97) with 2.4x10-2 s-1, apparent 1.6x10-2 s-1, 0.6x10-2 s-1 film thicknesses of 270, 550 and 1060 nm, for precursor constants rate of Fig. 1: Area of normalized ATR-FTIR peaks for C-O based vibrations in the range of 1200-980 cm-1 (AIR1200-980 cm-1) after VUV irradiation (tirradiation) and different radiant exposure (He) and a logarithmic plot of the initial reaction rates (kapp) for different precursor thin film thicknesses (dTi(OEt)4) (inset) [average radiant exposure per minute (He/t) = 0.31 J cm-2 min-1]. 23

Reports generated as can be seen in SEM images (Fig. 3). Conversion of Ti(OEt)4 can be compared to PHPS[1] and to a polymeric hexanoato aluminium complex[3] regarding the applied photon energy of 7.2 eV (Fig. 4). For these, the reaction temperatures were close to ambient conditions. Clearly, it can be seen that the radiant exposure necessary for widely complete photochemical conversion of Ti(OEt)4 is one order of magnitude smaller the polymeric hexanoato aluminium complex and close to PHPS (He of 36 vs. 2.3 and 1.3 J cm-2, respectively). than for foils by R2R for single gas barrier layers. Typical metal oxide First results regarding the use of photochemically obtained TiOx on cost effective PET film [having high surface roughness] as gas barrier; especially to reduce water vapour transmission rates (Fig. 5), show an increased gas barrier as compared to sol-gel film thicknesses films are between 20-150 nm. For PHPS, its suitability for the preparation of SiOx-based gas-barriers on polymer technologies was demonstrated previously. [2] The needed radiant exposure of He = 1.3 J cm-1 for SiOx thin film formation from PHPS to obtain 60 nm SiOx is close to the value He = 2.3 J cm-2 needed for synthesis of a ca. 76 nm TiOx thin film from Ti(OEt)4 as precursor. Therefore, an application of Ti(OEt)4 for the mentioned aspired R2R process could be achieved either by reducing the curing speed, by increasing the amount of VUV lamps or by installing lamps with a higher powers. In addition with transmittance >80 %, the crack free smooth surface and the low reaction temperature are advantageous for an the high optical Fig. 5: Water vapor transmission rates (WVTR) of PET films coated with different TiOx thin film thicknesses from VUV conversion and from hydrolysis of Ti(OEt)4, as well as for a pristine and a VUV irradiated PET film (He = 10 J cm-2). application of TiOx thin films on polymers as gas barrier films. Conclusion are insight to Photochemical conversion of titanium(IV) ethoxide represents a new way to prepare titanium(IV) oxide close to room temperature, atmospheric pressure and different substrates, i.e. silicon wafers, quartz and thermally sensitive PET films. An the photochemical conversion process from experimental side, indicated the formation of intermediate Ti-OCO-structures. Moreover, DFT calculations suggested that 4- and 6-ring Ti-OCO-structures in energetically favoured photochemical reaction paths of Ti(OEt)4. Obtained TiOx films showed homogeneous free compositions and stoichiometry close to TiO2, from which thermal synthesis at 600 °C. Furthermore, low needed radiant exposures of He = 1-5 J cm-2 together with smooth and crack free TiOx surface topographies possible implementation into roll-to-roll coating processes. In addition, first attempts are promising regarding the usage of TiOx thin films as flexible and transparent gas barrier layers. to TiO2 obtained is comparable included carbon nearly and are ideal for a Literature [1] L. Prager, A. Dierdorf, H. Liebe, S. Naumov, S. Stojanovic, R. Heller, L. Wennrich, M.R. Buchmeiser, Chemistry 13 ( 2007) 8522. [2] L. Prager, U. Helmstedt, H. Herrnberger, O. Kahle, F. Kita, M. Münch, A. Pender, A. Prager, J.W. Gerlach, M. Stasiak, Thin Solid Films 570 (2014) 87. [3] L. Wennrich, H. Khalil, C. Bundesmann, U. Decker, J.W. Gerlach, U. Helmstedt, D. Manova, S. Naumov, L. Prager, Mater. Chem. Phys. 137 (2013) 1046. [4] P.C. With, U. Helmstedt, S. Naumov, A. Sobottka, A. Prager, U. Decker, R. Heller, B. Abel, L. Prager, Chem. Mater. 28 (2016) 7715. * excimer Fig. 4: Comparison of VUV induced (using Xe2 irradiation, EPh ≈ 7.2 eV) decomposition of different metalorganic precursors (XPrecursor) thin films depending on the applied radiant exposure (He) close to ambient temperature and pressure in an oxygen enriched nitrogen atmosphere (dTi(OEt)4 = 550±60 nm, d[H2SiNH]n = 120±20 nm, d[Al(OH){O2C(CH2)4CH3}]n = 79±0.2 nm, 0.25 vol.-% O2). 25

Reports pressure of 0.5 Pa (N2 gas flow 150 sccm, purity 5.0; Ar gas flow 100 sccm, purity 5.0) with a rather low electron temperature of about 1.0 – 1.5 eV and corresponding low self-bias. The plasma density near the substrate is about 6 × 109 cm-3. As substrates, cylinders with a height of 50 mm and diameter of 50 mm, capped with a hemispherical top made of stainless steel 304, aluminium and copper respectively, were inserted into the centre of the vacuum chamber. Thus, the substrates are surrounded by the homogenous plasma forming a plasma sheath. The negative high voltage (HV) pulses were applied using a tetrode switch with a rise time of 10 ns/kV. The total pulse length was varied between 2.5 and 30 µs with a voltage of 2 – 5 kV and a pulse repetition rate of 1 – 5 kHz. The power density measurements were obtained with a calorimetric probe using a substrate dummy made of copper (diameter 20 mm). The sensor area was shielded by a ceramic Macor® block mounted at the backside of the copper disc, which was spot welded to a thermocouple (type- K) for temperature recording and an additional copper wire current measurements, although all measurements presented here were performed with a grounded probe. A schematic drawing of the experimental set-up is presented in Fig. 1. biasing and for The basic idea of the PTP is to be able to observe and calculate the change in the enthalpy of the probe. The incoming power density can be determined due to the relation between the time derivative of the enthalpy and the time derivative of the temperature during the heating (energy source on, i.e. HV pulses on) and the cooling (energy source off, i.e. HV pulses off) phase at the substrate dummy. Assuming that the power density leaving the substrate during the heating N2, Al 15 µs, 5 kV distance 26 cm total energy flux including ECR plasma pure PIII effect 400 ) 2 m c / W m 300 ( y t i s n e D r e w o P 200 100 0 0 1 2 3 4 5 6 Pulse Frequency (kHz) the same phase equals the power density leaving the probe during cooling at temperatures, for heating and cooling can be equations combined to calculate the additional power density during the HV pulses. As the ECR plasma source is operating at constant power and interactions of the emitted secondary electrons are nearly negligible, the heat flux from the plasma is provided as a constant background. Hence, only the temperature changes of the PTP in a short time frame around the transition from HV off to HV on and HV on to HV off are evaluated with less than 10 seconds of heating and cooling phase necessary to obtain data with a low noise. Results and Discussion for Fig. 2 presents data for nitrogen gas and an Al substrate (with the probe at a fixed distance of 26 cm) when varying the pulse frequency from 0 to 5 kHz for 15 µs pulse length and 5 kV pulse amplitude. The downward triangles present the total measured energy power density by the probe and the upward triangles the PIII data when corrected the plasma background of 43 mW/cm2. Fitting these data points yields an additional flux density during the PIII pulses at the calorimetric probe of 53 mW/(cm2 kHz). Hence, the time-averaged power density to the probe during the pulses exceeds the flux from the background plasma even at a pulse frequency of 1 kHz. In the following figures, the background flux is already deducted from the measured data, i.e. the values present only the additional power density during the HV pulses. To ascertain that the additional power density is actually caused by the secondary electrons emitted from the substrate (neutral secondary particles or negative secondary ions are either 100 Distance 26 cm Probe Acceptance Angle Experiment 75 50 large small Simulation 180° 130° y t i s n e D r e w o P e v i t l a e R 25 0 -180 -120 0 -60 60 Angle (degree) 120 180 Figure 2: Time averaged measurements of the additional power density measured by the PTP during HV pulses before and after correcting for offset by plasma background as function of pulse frequency. Figure 3: Power density during the HV pulses as function of angle for probe rotation for two probes with different acceptance angles. 0° implies the probe facing directly the substrate. 27

Reports instantaneous drop after 45 minutes. are necessary to complement the measurements. The original surface should consist of a mixture of hydrocarbons and hydroxides, which recede after the sputtering of the initial monolayers to reveal the thermal oxide layer, which is removed during 40 – 45 minutes. It has to be noted that the power density is indicative of a small substrate area facing the PTP while the primary current is integrated across the substrate and includes primary and displacement currents due to the moving sheath edge. Nevertheless, the transition from oxide to metal is completed within 60 – 90 seconds for both primary current and power density at the PTP. secondary electrons ions, After the oxide layer is removed, a kink in the temperature, as measured by an IR pyrometer, is observed. This clearly indicates a change in the optical emissivity. At the same time, the beginning evaporation of magnesium from the substrate and its excitation in the plasma is observed, which may cause additional processes the discharge and influence the determination of the power flux by the thermal probe. inside Finally, Fig. 6. presents an overview of the results for the secondary electron emission for selected metals and oxidized metal surfaces. All oxides depict a higher SE coefficient compared to the metals (sputter cleaned by Ar ion bombardment) with the oxide of Mg (and the Mg alloy AZ91) having the highest value (as known from plasma displays). can be While the change of the secondary electron emission no corresponding data on the actual surface composition is available from the experiment. Here, ex-situ measurements using SEM or EDX followed in-situ, ) 2 m c / W m ( y t i s n e d r e w o P 100 10 1 Ar sputtering, 3 kV, 5 kHz, 15 µs oxide metal Mg AZ91 Al AlMg3 Ti Cu Zn Mo V2A Metals Figure 6: Sputtering of various oxidized materials with Ar in a 3 kV, 5 kHz and 15 µs PIII pulse. The power density values at the end of the treatment (metal) are plotted in orange to visualize the change in the power density. the is nearly collisionless as Before ending the discussion, some aspects of the ongoing quantification of power density into a value of secondary electrons per impinging ion will be mentioned. The transit of the high energy secondary electrons through the plasma onto the PTP initial acceleration towards the 3 keV used in the present experiments occurs in the plasma sheath with a width of less than 1 cm. At the same time, the cross sections the background gas decrease considerably with increasing energy of the secondary electrons, however, still depending on the gas species. Energy-dependent secondary electron yields and comparisons for different gas precursor are required to account for this effect. for collisions with for molecular gases On the other hand, the incident ion flux is well known and established from flux measurements including retained fluence, sputter yield and thermal balance of the substrate while the ion species composition is accessible from direct plasma measurements, e.g. employing a plasma monitor, without HV pulses. The open question more critical to achieving a quantification the angular distribution of the emitted electrons, respective its potential variation with the surface composition, structure and topography. is Conclusion Using a calorimetric probe in a PIII system, it is possible to detect time-dependent changes in the surface composition of the substrates during sputtering processes. The advantages of the present method are (i) direct access to dynamic changes induced by the impinging ions or the plasma, (ii) no surface charging for insulating materials, (iii) no artefacts from other materials near the substrate, (iv) a fast measurement time with a time resolution of 1 minute or even less, and (v) a large accessible ion energy range from 0.1 to 20 keV. Literature [1] M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing 2005 (Hoboken, NJ, USA: John Wiley & Sons, Inc.). [2] K. Nakamura, S. Mändl, J. Brutscher, R. Günzel, W. Möller, Surf. Coatings Technol. 93 (1997) 242. [3] J.A. Thornton, Thin Solid Films 54 (1978) 23. [4] F. Haase, D. Manova, S. Mändl, H. Kersten, Eur. Phys. J. D 70 (2016) 186. [5] D. Depla, X.Y. Li, S. Mahieu, R. De Gryse J. Phys. D. Appl. Phys. 41 (2008) 202003. 29

Reports In subsequent experiments, a degradation tests were conducted with 4000 CV scans and the change in the electrochemically active surface area recorded. Pt-foil electrodes were used to validate results due to the ease of surface area characterization imaging methods, such as SEM, AFM as well as hydrogen underpotential deposition experiments using diluted sulphuric acid as the electrolyte. alternative using For the thin foil electrodes, a total surface area of 2.1 ± 0.21 cm2 for the electrochemically active platinum was determined, in good agreement with the reference measurements. A much larger 450 ± 6 cm2 electrochemically active surface area was determined the nanocomposite powder electrodes. for Next generation SAFC electrodes for high permitting Nanostructured electrodes promise low catalyst loadings while electrode electrochemical performance energy conversion devices in general. Maximizing specific surface area, i.e. the relevant parameter for surface reactions allows efficient utilization of precious metal catalysts. [3] Unfortunately, a large surface area on the nanometer scale is most often paired with low stability. Agglomeration, Ostwald ripening, surface diffusion are processes that are undesired and lead to a rapid decrease of the electrode performance. the above- A viable strategy described problem is to utilize catalyst support materials that can simultaneously act as current to circumvent a) b) Figure 3: a) Transmission electron micrograph of platinum nanoparticles (~3 nm diameter) on surface functionalized multiwalled carbon nanotubes showing uniform size distribution. b) Scanning electron micrograph of Pt on MWCNT powder electrode showing the distribution of the catalyst on the CsH2PO4 electrolyte microparticles. Figure 4: Nyquist plot of electrode impedance measured under SAFC anode conditions (240°C, hydrogen gas, 0.4 atm water partial pressure and 10 mV voltage perturbation amplitude), corrected for ohmic resistance. collectors. Carbon nanomaterials, such as carbon nanotubes (CNTs), graphene or carbon black have been demonstrated to be highly suitable. CNTs are especially attractive due to the high geometrical aspect ratio, enabling porous, 3- dimensional electrode structures. In addition, CNTs are electronically conducting and relatively stable under fuel cell operating conditions. on surface chemical vapor deposition Metal organic to deposit platinum (MOCVD) was used functionalized nanoparticles multiwalled carbon nanotubes. [4] Pt(acac)2 was employed as a precursor and dissolved in acetone. The MOCVD process yielded Pt nanoparticles of ca. 3 nm diameter, considered ideal for electrocatalytic applications, figure 3. Composite electrodes of the new catalyst material were fabricated by mixing Pt-on-MWCNTs with CsH2PO4 and naphthalene poreformer and uniaxially pressing with a pure CsH2PO4 electrolyte layer. The electrochemical cells were analyzed via AC impedance spectroscopy and in direct fuel cell measurements at 240°C and humidified gas environment. The obtained electrode impedance results show remarkably high electrochemical performance values, as low as 50 mΩ cm2, figure 4. hydrogen oxygen and/or Even more remarkable is the extremely low area normalized platinum loading calculated as 0.01 mg cm-2 as the upper limit from the Pt precursor loading used during MOCVD process. The mass normalized catalyst activity, calculated from the inverse of the electrode impedance divided by the platinum loading is 49 S mg-1, representing a 22- fold the art electrodes. The stability was measured over a 17 h time period, with a degradation rate of about 0.1 % h-1. The combined aspects of 95 % reduction of catalyst electrode improvement over state-of-the-art the state of loading, b) 31

Reports Figure 7: Possible reaction pathways for the removal of pyridinic nitrogen during the interaction of hydrogen atoms with nitrogen doped graphene flake. is groups generally the calculation show that reduction of the surface oxygen energetically favorable, rendering the material less active, since the electrochemically active sites are associated with surface term experiments with a DC bias during AC impedance spectroscopy, i.e. with a net current flowing through the system shows rapid decline of the current density over a time period of several days, figure 6. functional groups. Long before XPS measurements after electrochemical the computational results, also showing a significantly reduced concentration of surface functional groups, table 1. corroborate analysis and Long term measurements thus show that precious metal-free catalyst consisting of plasma treated MWCNTs are indeed catalytically active, however degradation is a significant challenge that needs to be overcome before large scale technological application can be reached. Degradation mechanisms is fundamental reaction mechanisms investigated. For example, To find new ways of preventing rapid degradation of catalytically active precious metal free fuel cell multiwalled carbon nanotubes at operating conditions, a better understanding of the is necessary. In a combined experimental and computational study, the reaction pathways for the removal of nitrogen functional groups from MWCNTs the reaction pathway for the removal of pyridinic nitrogen is considered, figure 7. In the presence of protons, reactive intermediates, the Gibbs free energy change for each reaction step is calculated using DFT calculations as detailed in the previous section. For all possible reaction pathways calculated for the solid acid fuel cell electrode conditions, ammonia desorption and hence a deactivation of the nitrogen functional group is the most likely final degradation step, figure 8. electrons other and is necessary Further experiments with gas phase reactant detection the computational results as well as novel doping or surface functionalization strategies, e.g. with sulphur, boron that may potentially be more stable. confirm to Figure 8: Gibbs free energy diagram of the calculated reaction pathways for the removal of nitrogen dopants from MWCNT surfaces at solid acid fuel cell operating conditions. Literature [1] S.M. Haile, C.R.I. Chisholm, K. Sasaki, D.A. Boysen, T. Uda, Faraday Disc., 134 (2006) 17-39. [2] F.P. Lohmann-Richters, B. Abel, A. Varga, J. Mat. Chem. A 6 (2018) 2700-2707. [3] A. Varga, N.A. Brunelli, M.W. Louie, K.P. Giapis, S.M. Haile, J. Mat. Chem., 20, 2010, 6309-6315. [4] F.P. Lohmann, P.S.C. Schulze, M. Wagner, O. Naumov, A. Lotnyk, B. Abel, A. Varga, J. Mat. Chem. A, 5 (2017) 15021-15025. [5] O. Naumov, S. Naumov, R. Flyunt, B. Abel, A. Varga, ChemSusChem, 9 (2016) 3298-3306. 33

Laser ablation and scribing of perovskite films The PV films for all studies were fabricated by deposition of the perovskite thin-film stacks on FTO- coated glass substrates (Pilkington TEC15). After wet cleaning of the FTO/glass the substrate was coated with a 70 nm compact TiO2 layer deposited by DC sputtering at 300°C. Then 100 µL of PCBM solution (10 mg/mL in chlorobenzene) was spin- coated on top of TiO2 at 2000 rpm for 45 s in a nitrogen-filled glovebox. The perovskite absorber layer was deposited according to Ref. [3]. Briefly, PbI2 was thermally evaporated (140 nm) at a base pressure below 1·10-7 mbar and then converted to CH3NH3PbI3 by spin coating of CH3NH3I solution (50 mg/mL in 2-propanol) at 2500 rpm for 45 s in the glovebox. The as-prepared films were annealed at 50°C for 2 h on a hotplate inside the glovebox. The experimental set-up sketched in figure 2 was used basic laser ablation experiments. In particular the impact of the most important laser irradiation parameters, such as • • the laser wavelength (λ), the pulse length (tp) (used are: fs, ps, ns pulses), the laser fluence (F), and the pulse number (N), and the irradiation direction • • • to the film removal process and the morphology of the pit was studied. For the laser ablation/scribing experiments the beam of the utilized laser is shaped, subsequently the samples surface. For the scribing experiments the laser spot is scanned across the sample surface by means of scanner or stages with a speed vs. Laser spot sizes are in the range of 20 to 40 µm for Gaussian beams and 100 µm for the Excimer laser providing a top-hat profile. Different laser sources with pulses duration in the range from nanosecond (ns) to picosecond (ps) and different wavelengths were used. Within the studies of the laser ablation process the mechanism of material removal, threshold fluences for the applied laser sources and the damage of the remaining perovskite and TCO films are investigated. /imaged focused the to Reports Single pulse modification thresholds pulse/wave- length film side [mJ/cm²] ns, 1064 nm 8500 substrate-side [mJ/cm²] 5700 ns, 248 nm ps, 355 nm ps, 532 nm ps, 1064 nm fs, 780 nm fs, 515 nm 16 40 45 133 98 30 - 10 18 154 60 10 Table 1: Measured thresholds fluences for single laser pulse modification of perovskite films on a TCO film for film and substrate side irradiation conditions. low rather feature also laser pulses The thresholds for single pulse modification that can be melting, local ablation or partially thin film delamination with a single laser pulse are given in table 1. In general, a clear correlation to the linear absorption coefficient of perovskites can be observed for long ns-laser pulses. Laser ablation with ultrashort low thresholds for laser wavelengths larger than the band gap of perovskites (~830 nm) (see [4]). Therefore, nonlinear absorption processes in the perovskite films can be expected for ultrashort laser thresholds of pulses. The usually perovskite modification are related low decomposition temperatures (~200°C) and the low thermal conductivity of this material. The dominating mechanisms of perovskite thin film removal can be related to the interaction of the laser photons with the perovskite film itself but can originate also from interface driven processes related to matching layers (PCBM, TiO2) or the near-film surface material alterations, such as defects or composition alterations. The mechanism, and therefore the final morphology, of the ablated/scribed film are often dominated by a particular process. Providing strong laser photon absorption due to linear absorption at laser wavelengths shorter than the band gap or nonlinear absorption resulting in multiphoton driven processes at ultrashort laser pulses an almost complete absorption of the laser the to 1a 2a 1b 2b Figure 2: Sketch of the thin film stack and the laser irradiation configuration including the expected interaction ranges. Figure 3: SEM images of typical laser ablation a) as well as scribe morphologies b) that are related to laser ablation (1) and delamination lift-off (2) processes. 35

Reports a) b) Figure 5: All-laser scribed monolithically integrated interconnected perovskite mini-module: a) SEM images of laser scribes P1 and P3 for the mini modules; b) Image of the opaque module (gold back contact) as well as the J-V curve of the champion module with an aperture steady-state efficiency of 10.7%. lead and iodine. The formation of such remaining smooth structures or droplets has been observed rarely for ultrashort pulse laser ablation or scribing near the modification threshold. These features usually form when ns laser ablation is used [4]. for An interesting effect has been observed ultrashort pulse laser irradiation: the lift-off of single grains of the MAPbI3 film due to laser irradiation at IR wavelengths near threshold [4]. Possible reasons of this grain lift-off effect can be the thermal expansion (below 200 °C to avoid MAPbI3 decomposition) of the film providing a mechanical stress or the preferential ablation of a particular material near the interface – e.g. different composition or segregated components of MAPbI3 and respectively – which provides the energy for lifting off the grans. remaining solvents, the ablation All laser-scribed perovskite mini-modules the found In addition to the perovskite film scribing studies, all laser-scribed perovskites minimodules have been demonstrated. After optimization of the scribing parameters a complete insulation (>> 10 kOhm) has been achieved for P1 and P3. The best conditions for 1064 nm ps laser P1 scribing (e.g. IZO) were determined to be vs ≈ 2 m/s and F ≈ 3.5 J/cm². Similar scribing characteristics were for 355 nm ps laser. For P2, laser scribing parameters were determined from the morphological studies and verified by measuring the contact resistance from the gold film (BC) to the TCO (FC). The contact resistance were measured with the transfer length measurement (TLM) technique. For P2 scribes of perovskites on IZO coated glass samples the impact of the laser power (PL ≈ 0.3 W) and the number of overlaying scribes (3 to 5) were varied. After gold deposition, a contact resistance of 0.2 Ohm/mm² has been found within the investigated parameter range. For the mini-modules all scribes were performed with 355 nm ps laser focused with a 100 mm scanner lens in front of an intelliSCAN system to realize a high precision of the adjacent scribes for integrated interconnection in particular to keep the dead area low but also to avoid overlap of those scribes. Scan speeds in the range of 1 m/s were applied for scribing the films with a repetition rate of 100 kHz. One of the fabricated monolithically interconnected perovskite mini-module on a 5 by 5 cm² glass sample is shown in figure 5 that comprises the mini- module area (3x3 cm²) and in addition reference solar cells scribed by laser and mechanically. The mini-modules were measured in ambient air. The J-V characteristics of the perovskite solar mini- module with an aperture area of 6.7 cm2 (re- calculated from image) show a Voc of 5.3 V, Jsc of 2.9 mA/cm2, and a FF of 72.8%, yielding a power conversion efficiency of 11.1% measured in forward direction, while a Voc of 5.1 V, Jsc of 2.8 mA/cm2, FF of 71.0%, yielding an efficiency of 10.2% when measured in backward direction. The steady-state power conversion efficiency (η) at operating conditions was measured by tracking the maximum power point (MPP) under continuous illumination and was determined for the champion mini-module to be 10.7%. The J-V characteristics of the mini- modules and the solar cells (mechanically/laser scribed) are comparable within the expected experimental deviations. Acknowledgment Parts of this work supported by the European Community's Seventh Framework Program (FP7/2007-2013) under APPOLO project (grant agreement No. 609355). Literature [1] W. S. Yang, B. W. Park, E. H. Jung, N. J. Jeon, Y. C. Kim, D. U. Lee, S. S. Shin, J. Seo, E. K. Kim, J. H. Noh, S. I. Seok, Science 356 (2017) 1376. [2] A. Walter, S. J. Moon, B. A. Kamino, L. Löfgren, D. Sacchetto, F. Matteocci, B. Taheri, J. Bailat, A. Di Carlo, C. Ballif, S. Nicolay, IEEE Journal of Photovoltaics 8 (2018) 151. Fan Fu, Thomas Feurer, Timo Jager, Enrico Avancini, Benjamin Bissig, Songhak Yoon, Stephan Buecheler, Ayodhya N. Tiwari, Nat Commun 6 (2015). Lukas Bayer, Xinyuan Ye, Pierre Lorenz, Klaus Zimmer, Applied Physics A 123 (2017) 619. Lukas Bayer, Martin Ehrhardt, Pierre Lorenz, Stefano Pisoni, Stephan Buecheler, Ayodhya N. Tiwari, Klaus Zimmer, Appl. Surf. Sci. 416 (2017) 112. [3] [4] [5] [6] Anja Wehrmann, Stefan Puttnins, Lars Hartmann, Martin Ehrhardt, Pierre Lorenz, Klaus Zimmer, Optics & Laser Technology 44 (2012) 1753. 37

Reports Angele of polarisation/deg Figure 2: a) and b) PEEM images taken at the same spot of a P3HT film but at different polarization directions (indicated by the arrows in the upper right corners of the images) of the incident laser pulses. c) Dependence of the photoelectron intensity on the polarization direction for the central pixels of the corresponding red and green circles in a) and b). While the green curve shows strong variation with the polarization angle, the red one remains virtually constant. Dashed black lines are cos2-fits to the data. Copyright (2017) Wiley. Used from Ref. [1]. the images). The gray scale of images corresponds to the photoelectron intensity. The brighter a pixel the more photoelectrons are incident on the detector. Both images exhibit an almost inverted contrast, since only domains with polymers aligned with the polarization direction will result in a large photoelectron intensity. Varying the polarization direction in steps of 5° and acquiring an image for each step results in an image stack. Figure 2 c) depicts the dependence of the photoelectron intensity on the polarization direction for the central pixels of the respective red and green circles in a) and b). The green curve exhibits a strong dependence on the polarization angle, hence the polymer chains in this region are well aligned and share a common orientation. In contrast, no such preferred orientation can be found for the red curve, which remains virtually constant. Hence, we deduce that for the red circle, the polymer chains are much more disordered than for the green one. To analyze the results in more detail, we fit every pixel of the image stack with the expected dependence Ȃ

Selected Results Systematics in Reactive Ion Beam Sputter Deposition of TiO2 T. Lautenschläger, D. Spemann, C. Bundesmann influenced by Ion beam sputter deposition (IBSD) is a versatile physical vapour deposition (PVD) technique that allows for the deposition of high-quality thin films. The properties of the film-forming particles and, consequently, the properties of the deposited films can be the process parameters: ion species, ion energy, ion incidence and emission angle, and target material. This work was devoted to the systematic investigation of the IBSD process of TiO2, because there is a gap related to the knowledge on the systematics in the correlation between process parameters, properties of the secondary particles and the film properties. two The experiments were performed with process gasses (Ar or Xe) and target materials (Ti or TiO2) at several ion energies, ion incidence and polar emission angles. two After characterizing the primary ion beam, the mass and energy distribution of the secondary ions was measured [1]. The experiments revealed that the mean energy of the sputtered Ti and O ions, and of the backscattered Ar or Xe ions increases with decreasing scattering angle. The energy depends also on the mass ratio of primary to target particle. Simulations of the energy distributions of the secondary particles did show good agreement with measurements. The TiO2 films were investigated regarding their structural surface roughness, mass density, and optical properties. The TiO2 films were found to be amorphous and composition, properties, Figure 2: Refractive index at λ = 550 nm versus mass density of the TiO2 films grown by sputtering with Ar or Xe ions from a Ti or TiO2 target. stoichiometric. But an increasing amount of implanted primary Ar or Xe particles with a decreasing scattering angle was measured. The films are very smooth and the surface roughness decreases slightly with decreasing scattering angle [2,3]. A closer look on the optical data shows that the scattering angle has also an impact on the refractive index (see Figure 1). The refractive index increasing scattering angle and, after reaching a maximum, falls off again. These changes are correlated with mass density date as illustrated in Figure 2. increases considerably with linked the energy distributions of The sketched systematic variations in the film to systematic properties are strongly variations of the sputtered and backscattered particles. In summary, the systematics in the IBSD process has been unravelled. This illustrates the great potential of IBSD for tailoring thin film properties. Financial support by the DFG within project BU2625/1-2 is gratefully acknowledged. Literature [1] T. Lautenschläger, C. Bundesmann, J. Vac. Sci. Technol. A 35 (2017) 041001. [2] C. Bundesmann, T. Lautenschläger, D. Spemann, A. Finzel, E. Thelander, M. Mensing, F. Frost, Appl. Surf. Sci. 421 (2017) 331. [3] C. Bundesmann, T. Lautenschläger, D. Spemann, A. Finzel, M. Mensing, F. Frost, Eur. Phys. J. B 90 (2017) 187. Figure 1: Refractive index at λ = 550 nm versus scattering angle of the TiO2 films grown by sputtering with Ar or Xe ions from a Ti target with an ion energy of 1000 eV and an incidence angle of 60°. 41

Selected Results Plasma Jet-based Deterministic Thin Film Deposition for Additive Surface Figure Error Correction Th. Arnold, G. Böhm, J.-B. Abadie ultra-precision surface Figure 1: Processing scheme for combined plasma jet and ion beam figure error correction. 43 the mid-spatial An additive figure correction method has been investigated utilizing a combination of plasma jet machining (PJM) [1] and ion beam processing [2]. In a first step a shape adapted polymer layer is locally deposited on the surface compensating the figure error (see Fig. 1 (a) and (b)). That way, the figure error even in frequency range can be cancelled out. A subsequent step involves broad ion beam etching to transfer the masking layer to the substrate (see Fig. 1(c) and (d)). In order to establish a surface error correction technique plasma deposition rates, film micro-roughness, homogeneity of film properties, and etch selectivity in the ion beam transfer process in dependence on the process parameters have been investigated. Plasma jet assisted deposition has been performed by argon as carrier gas and acetylene (C2H2) as layer forming precursor. Plasma is excited by microwave at 2.45 GHz, applying short pulses of 6.5 µs at a repetition rate of 650 Hz and peak power of 650 W. On average, a power of 3 W is dissipated, which maintains a surface room temperature. The jet width (FWHM) was 1.2 mm. This basic parameter set has been determined by systematic variation of each parameter in order to find stable plasma conditions. Chemical analysis of deposited layers revealed a CxHyNz-polymer. It has been the working distance between the plasma nozzle and the substrate is an important parameter for the deposition rate and the resulting layer roughness, since the convective and diffusive gas flow pattern and power coupling determines dissociation and slightly above temperature found that Figure 2: (a) Initial surface figure error, (b) Figure error after layer deposition and ion beam etching of the layer. polymerization. Roughness of the deposited layers have shown values of approx. 2 nm. Transfer of the layer has been done utilizing a scanning Ar+ ion beam. Beam energy was 0.7 keV at a beam diameter of 22 mm and current density of 40 mA/cm². With these parameters an etching rate of 8 nm/s on Zerodur is obtained. Etch rate selectivity between layer and substrate has been determined to be 1.4. A successful surface correction on a flat Zerodur sample is shown in Fig. 2. A polymer layer with variable thickness compensating the topography was deposited on the surface shown in Fig. 2 (a) by deterministic plasma jet deposition, regarding the selectivity as a thickness scaling factor. Subsequently, uniform ion beam etching was performed where the masking layer was removed completely. The resulting surface is shown in Fig. 2 (b). A significant improvement of the figure error even for small error features such as the vertical line defect in the lower semicircle has been achieved. This experiment proves the principle of additive correction of optical surfaces by the proposed two-step method. Literature [1] Th. Arnold, G. Böhm, H. Paetzelt, J. Eur. Opt. Soc. Rapid 11 (2016) 16002. [2] Th. Arnold, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Haensel, A. Schindler, Nucl. Instrum. Meth. A 616 (2010) 147.

Selected Results Novel Setup for Investigation of Ion Energy and Ion Mass Selective Hyperthermal Ion-Beam Assisted Deposition Processes J.W. Gerlach, P. Schumacher, M. Mensing, B. Rauschenbach in collaboration with S. Rauschenbach, MPI-FKF Stuttgart / University of Oxford, UK, I. Cermak, CGC Instruments, Chemnitz thin In contrast Ion-beam assisted deposition (IBAD) is a highly effective hybrid physical film deposition technique which on the one hand offers the opportunity to investigate fundamental processes involved in ion-assisted film growth and on the other hand provides manifold possibilities to intentionally modify the properties of the prepared thin films [1]. The technique is characterized by simultaneous irradiation of the growing thin film with energetic ions during deposition with the aim to significantly influence the growth processes themselves. to other physical deposition methods like e.g. magnetron sputtering or pulsed laser deposition, IBAD is mainly defined by the separability of the involved material fluxes, which are directed towards the sample, as well as by the possibility to adjust the parameters vapor flux and ion flux highly accurate, the latter generated in form of a broad ion beam. As for nitrogen ion beams however, nitrogen plasma based ion-beam sources counteract the demand to choose the ion-beam parameters as freely as possible, because (i) the resulting ion beam +) and consists of a blend of both molecular (N2 atomic nitrogen ions (N+) and (ii) both species can possess differing kinetic energy distributions. Particularly ion energies ranging from several 10 eV to a few 100 eV this creates great difficulties to input the ion energy into the growing film surface in a well- defined and well-controlled way. Therefore, in the case of hyperthermal in Figure 2: Demonstration of ion-beam mass separation by the quadrupole setup using a nitrogen plasma-based source [2]. order to create a hyperthermal, broad nitrogen ion beam with selectable ion mass and variable ion in recent years a compact, custom energy, prototype quadrupole setup (Fig. 1) was developed, built, implemented into the system for ion-beam assisted molecular-beam epitaxy (IBA- MBE) at the IOM and characterized (for details see Ref. [2]). For this purpose, a constricted glow- discharge plasma beam source or instead a Kaufman-type ion-beam source was combined with the novel setup consisting of a quadrupole mass filter (Fig. 2), equipped with entry and exit ion optics, ion-beam deflection, as well as ion- beam current monitoring facilities. As a model system for hyperthermal ion-beam assisted growth with energy and mass selected ions (EMS-IBAD), thin films of gallium nitride (GaN) for optoelectronics and high power electronics devices - were deposited epitaxially on single- crystalline substrates at elevated temperatures. The influences of ion mass and ion energy on growth mode, topography, crystalline quality, defect structure and luminescence properties of these GaN thin films have been investigated. - well known as base material Literature Figure 1: Design of the quadrupole mass filter setup for the creation of an energy and mass selective hyperthermal nitrogen ion beam [2]. [1] B. Rauschenbach, A. Lotnyk, L. Neumann, D. Poppitz, J.W. Gerlach, Materials 10 (2017) 690. [2] J.W. Gerlach, P. Schumacher, M. Mensing, S. Rauschenbach, I. Cermak, B. Rauschenbach, Rev. Sci. Instrum. 88 (2017) 063306. 45

Selected Results High Energy Electron Irradiation of Gelatin Ferrogels for Bioapplications E. Wisotzki, A. Weidt, S. G. Mayr Ferrogels are emerging responsive materials that consist of a hydrogel matrix embedded with magnetic nanoparticles (MNP). Through coupling of the particles to the polymer network, ferrogels can deform, change rheology and alter swelling fields. With behavior significant biocompatible hydrogels and MNP, ferrogels have gained attention for potential bioapplications such as soft actuators, drug delivery devices and tissue engineering scaffolds. in applied magnetic development in [1], high energy electron irradiation was In demonstrated to crosslink gelatin hydrogels, resulting in thermal stability and a range of available mechanical properties, dependent on the irradiation dose. This reagent-free technique has the additional advantage of not requiring any (potentially toxic) chemical crosslinkers and has demonstrated low cytotoxicity in cell culture [2]. 10 MeV electron beam irradiation was extended to gelatin ferrogels to investigate the ability to locally stabilize and confine such nanostructures into the gel network [2]. Using emerging methods of magnetic particle spectroscopy (MPS) and magnetorelaxometry (MRX) at the PTB Berlin, the thermal stability of these ferrogels was examined. In Fig. 1 at point c), the magnetic response of the nanoparticles in untreated gelatin showed strong changes near 34˚C in both MRX and MPS. This response clearly stemmed from the macroscopic sol-gel transition in native gelatin, as illustrated by the vanishing storage modulus in Fig. 2. In general, as the network transitioned from a (a) gel to (d) solution, it was easier to magnetize the particles in the applied magnetic fields. Therefore, (̀ Ȃ times decreased Figure 2: (left) Storage modulus (G’) showing macroscopic changes to the viscoelasticity across the native sol-gel transition. (right) Effective relaxation times from 0 kGy and 5 kGy ferrogels. was magnified by 6 and shifted right by 2.8˚C. (bottom) Four distinct regimes observed in the native sol-gel transition (0 kGy) correspond to a) magnetization of small particles, b) onset of local softening, c) magnetization of larger aggregates now possible in softening matrix, d) sharp decrease in magnetization times due to liquefied network. relaxation Ȃ ), while magnetization (M3) increased. Even a small dose of 5 kGy irradiation largely stabilized this thermal transition, indicating confinement of the particles in the network. However, MRX was sensitive to changes in the nanorheology of the gelatin, shown in Fig. 2. Nanoparticles appeared sensitive to a local softening across the sol-gel transition, leading to reduced effective relaxation times at higher temperatures. With a dose of 5 kGy, this effect was approximately 1/6th of that observed in native gelatin and occurred several degrees later, as a direct result of the irradiation crosslinking. Overall, high energy electron irradiation is a viable method to sufficiently stabilized gelatin ferrogels for a wide range of future bioapplications. Literature Figure 1: (left) Effective relaxation times determined by MRX with increasing temperatures, for unirradiated (0 kGy) and 5 kGy irradiated ferrogels. (right) Temperature dependence of the nonlinear magnetization (3rd harmonic, M3) using MPS for untreated (0 kGy) and 20 kGy irradiated ferrogels. [1] E. I. Wisotzki, M. Hennes, C. Schuldt, F. Engert, W. Knolle, U. Decker, J. A. Käs, M. Zink, S. G. Mayr, J. Mater. Chem. B 2 (2014) 4297. [2] E. I. Wisotzki, R. P. Friedrich, A. Weidt, C. Alexiou, S. G. Mayr, M. Zink, Macromol. Biosci. 16 (2016) 914. [3] E. I. Wisotzki, D. Eberbeck, H. Kratz, S. G. Mayr, Soft Matter 12 (2016) 3908. 47

Selected Results Real Structure and Electron Beam Induced Modification of GeSbTe-based Phase Change Thin Films A. Lotnyk, U. Roß, X. Sun, I. Hilmi, B. Rauschenbach Phase change materials, such as GeSbTe-based (GST) alloys, are of high interest due to their technologically eminent optical and electronic properties. In this view, a detailed knowledge of local structure in such materials is of particular importance from a fundamental point of view and for data storage applications. In this work, local structure of GST thin films with composition Ge2Sb2Te5 (GST225) are studied. The outcomes revealed the existence of distinct GST225 phases, namely phase I, II and III. The structure of GST225 phase I is described by a distorted rock-salt like structure with random distribution of vacancies (Figure 1) [1]. However, repeated line scanning of the focused electron beam along mixed cation layers of the phase I resulted in the ordering of vacancies into vacancy layers (VLs), while no such VLs can be created by scanning the electron beam along the Te layers (Figure 1). Most notably, these VLs disappeared after repeated scanning of the focused electron beam over a scanning window covering these VLs. Moreover, the Te-Te distance is reduced in these newly formed VLs [2]. The crystal structure of newly produced GST225 phase II consists of distorted type building units with alternating Te and mixed GeSb layers separated by VLs. The distortions of crystal lattice of phase II are found to be larger than of phase I. The observed ordering of vacancies into VLs is due to energy transfer by inelastic interactions of the electron beam with the GeSb layers and takes place by diffusion of Ge and Sb atoms towards vacancies located in the nearest neighbouring rock-salt Figure 2: (a) High-resolution HAADF-STEM image of GST phase III. The intense dots correspond to Te atomic columns whereas the less intense dots represent GeSb atomic columns. Dark lines result from vdW gaps (arrows). GST building blocks with 4Te and 5Te layers correspond to GeSb2Te4 and GST225 crystal structures, respectively. (b) Scanning of focused electron beam along GeSb layers (marked by crosses in (a)) results in the formation of BSF. local layers with pronounced layers [1]. Thin films consisting of trigonal GST phase III are prone to the formation of building blocks with different local composition (Figure 2) [3]. The comparison with image simulations based on various theoretical models revealed intermixed cation lattice distortions. In situ experiments showed that the Te and GeSb bilayers close to the van der Waals (vdW) gaps can be easily reconfigured into bilayer stacking faults (BSFs) with subsequent formation of a new vdW gap, directly showcasing the ability of mixed GeSb and Te layers for fast atomic reconfiguration (Figure 2). Depending on the beam dose, the BSF can either reconfigure back to the initial state or move in later direction within the faulty plane. In conclusion, the formation of at least three disordered GST225 crystalline structures is reported. The structures should be considered during phase transformations in GST systems. In addition, a structural modification of GST phases using a focused electron beam is possible. It offers a novel approach to control the disorder in such alloys in the end which might enable the realization of multilevel resistance states. controlled, targeted Literature Figure 1: Atomic-resolution MAADF-STEM images of (a) GST225 phase I with randomly distributed vacancies and (b) GST225 phase II with ordered vacancies into layers. The GST225 phase II was created from phase I by line scanning of electron beam along cation layers. [1] A. Lotnyk, S. Bernütz, X. Sun, U. Roß, M. Ehrhardt, B. Rauschenbach, Acta Materialia 105 (2016) 1-8. [2] A. Lotnyk, U. Roß, S. Bernütz, E. Thelander, B. Rauschenbach, Scientific Reports 6 (2016) 26724. [3] A. Lotnyk, U. Roß, T. Dankwort, I. Hilmi, L. Kienle, B. Rauschenbach, Acta Materialia 147 (2017) 92-96. 49

Equipment for Research and Application

Pilot-scale coating machine for advanced flexible gas-barrier films for encapsulation of sensitive Development of cost-efficient flexible gas-barrier films thin-film photovoltaics is currently a challenge facing industry when aiming on higher quota of renewable energy production. Recently, a photochemical process working at normal pressure and low temperature has been developed at IOM. The process involves UV- initiated conversion of a thin polysilazane layer into silica. A pilot-scale coating machine has been designed and constructed with the aim to further develop gas-barrier films and their production technology. The machine enables scale-up to wider substrates, demonstrations in true technical scale, and resilient economical evaluation of the production process. System implantation for deterministic single ion ion implantation, i.e. ions with a Deterministic lateral accuracy of a the implantation of a pre-defined, counted number of single few nanometers, is a promising technique to realize a functionalization of single atoms in a solid state material. In the framework of a collaborative project, the Leibniz Joint-Lab “Single Ion Implantation” of the IOM and the Nuclear Solid State Physics Department of Leipzig University was equipped with an advanced high resolution focused ion beam system containing a high precision laser interferometer stage for accurate and reproducible sample positioning. This development system has been equipped with an electron ion source and will be extended with a sophisticated single ion detector in order to fabricate quantum devices or sensors based on functionalized single atoms.

Reactive ion beam etching facility for substrates with 450 mm diameter Reactive (RIBE) ion beam etching is a sophisticated technology enabling the fabrication of e.g. optical elements with sub-atomic precision. Within the extended research infrastructure a new state-of- the-art RIBE facility was realized. The integrated 5 axis-motion system enables now uniform etching of large workpieces with diameters up to 450 mm and a maximum weight of 50 kg. The RIBE system is equipped with a Kaufman-type ion source, configured for Fluorine-containing etching gases, and can be upgraded with different optical and masspectroscopic in-situ measurement technologies which guarantee high process stability and reliability. With the RIBE 450 etching plant, newly developed IOM etching processes for ultraprecise and innovative structured functional surfaces can be further scaled up to industrially relevant sizes. NIR Laser workstation Laser microprocessing of bulk materials and thin films is a key technology for future industrial production processes. The new NIR laser workstation for micro material processing is equipped with two laser sources addressing the question of perfect wavelength and optimized pulse duration for specific laser material interactions processes. Nanosecond pulses of near infrared (NIR) laser radation of 1.55 µm wavelength allows a optimized penetration into semiconductor materials in order to study for instance interface-related interaction mechanisms. The pulse-shape-adjustable laser (λ = 1.06 µm) enables the optimization of thermally driven laser processes. In addition to new physical capabilities the workstation allows researchers to study processes at almost industrial conditions due to the build-in fast scanner and stage technologies enabling processing speeds up to 20 m/s.

White light interferometer microscope White light interferometer microscopes are standard tools for measurement of surface profiles and roughness. The system is equipped with five different objectives for magnifications from 2.5X up to 115X covering a wide range of lateral fields of view. The microscope features non-contact techniques, open-access sample loading, and intuitive analysis software finish, roughness, curvature, slope, and numerous other characteristics with angstrom-level accuracy. to characterize surface texture, High-resolution Raman spectrometer The growth of thin films with tailored properties and patterns on surfaces are major fields of work of the institute. Optimizing the performance of the thin films and structures requires the use of suitable characterization techniques. Therefore, a high- resolution Raman spectrometer was installed, which extends the portfolio of characterization techniques and allows reseachers to determine thin film and structural parameters that could not be accessed before. The spectrometer is equipped with three excitation lasers (λ = 473 nm, 532 nm, 632 nm), a high-resolution spectrograph (f = 800 mm), a microscope (magnification 10 or 100), a polarization option, and a computer-controlled three-axes translation stage. Thus, it allows researchers to characterize a large number of materials, thin films or even monolayer films, structures of nm-size, and mapping of samples with a size of up to 75 mm x 50 mm.

Personal Activities Doctoral Theses Diploma and Master Theses Activities in Scientific Organisations Honours and Awards

Doctoral, Diploma and Master Theses Stolz, Ferdinand Liquid micro jets in interaction with intense infrared laser beams for chemical analysis and novel applications“ Universität Leipzig, Fakultät für Chemie und Mineralogie, 2017 Sun, Xinxing Phase transformations and switching of chalcogenide phase-change material films prepared by pulsed laser deposition Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2017 Wisotzki, Emilia I. High energy electron irradiation of gelatin hydrogels: towards the development of a magnetically- driven bioactuator Universität Leipzig, Fakultät für Physik und Geowissenschaften, 2017 Diploma and Master Theses 2016 Hammad, Ahmad Ultra-short pulsed laser ablation of Nickel and Copper City University of Applied Sciences, Faculty of Electronics Engineering, Bremen, 2016 Heyart, Benedikt Modifizierung elektronenbestrahlter Gelatine für biomedizinische Anwendungen Universität Leipzig und TU Braunschweig, 2016 Mitzschke, Martin Optisches in-situ-Monitoring von reaktiven Ionenstrahlätzprozessen Hochschule Merseburg, Fachbereich Ingenieur- und Naturwissenschaften, 2016 Pan, Yunxiang The mechanism of pulse laser interaction with transparent optical materials and application in laser machining Nanjing University of Science and Technology, China, 2016 Schulze, Patricia High resolution spectroscopy on metal-carbon composite electrocatalysts for solid acid fuel cells Universität Leipzig, Fakultät für Chemie und Mineralogie, 2016 Zhou, Jieying Functionalization of nanodiamond’s surface: A radiation chemistry approach Universität Leipzig, Fakultät für Chemie und Mineralogie, 2016 2017 Bergmann, Ingo Peptide fibril templated platinum nanoparticles as solid acid fuel cell electrocatalyst TU Bergakademie Freiberg, 2017 Bulano, Paul Photochemisch-basierte Herstellung von Mischmetalloxid-Dünnfilmen aus Zink und Aluminium bei Normaldruck und nahe Raumtemperatur Universität Leipzig, Fakultät für Chemie und Mineralogie, 2017 63

Activities in Scientific Organisations Activities in Scientific Organisations Abel, Bernd Mitherausgeber der Zeitschrift für Physikalische Chemie, De Gruyter Verlag Fachgutachter im Fachkollegium „Physikalische Chemie“ der DFG Vorstand Wilhelm-Ostwald-Gesellschaft Co-Editor of Scientic Reports Anders, André Editor-in-Chief, Journal of Applied Physics, published by AIP Publishing, New York, USA Designated Chair, The Journals’ Editor Conference, AIP Publishing, New York, USA Treasurer, Symposia on Discharges and Electrical Insulation in Vacuum (ISDEIV), an IEEE- co-sponsored series of conferences Member of the Advisory Board, International Conference on Metallurgical Coatings and Thin Films (ICMCTF) Member of the Advisory Board of the International Conference on Plasma Surface Engineering (PSE) Designated Chair, Plathinium, The Plasma, Thin Films and Related Processing Union Meeting Member of the International Scientific Committee, International Conference on High Power Impulse Magnetron Sputtering (HIPIMS Conf.) Member, MPEX Advisory Board, Oak Ridge National Laboratory, Oak Ridge, TN, USA Arnold, Thomas Mitgliedschaft im Nanotechnologie Kompetenzzentrum Ultrapräzise Oberflächenbearbeitung e.V. (CC UPOB e.V.) Bundesmann, Carsten Arbeitskreis Ellipsometrie – Paul Drude e.V., Mitglied des erweiterten Vorstandes Elsner, Christian Member of EFDS-Fachausschuss „Oberflächen für die Bio- und Medizintechnik“ Advisory Board „Nanotechnology“ IOP Science Frost, Frank Member of the Programm committee „EOS Conferences at the World of Photonics Congress (WPC2017): Conference on Manufacturing of Optical Systems“ Knolle, Wofgang Member of the Editorial Board “Radiation Physics and Chemistry” 65

Honours and Awards Honours and Awards Allenstein, Uta BuildMoNa Award for outstanding scientific results 2016 Arnold, Sven Speciel Award for Technical Staff 2016 (Award of the IOM) Hennes, Marcel Young Scientist Award 2016 (Award of the IOM) Schulze, Agnes Science and Technology Award 2016 (Award of the IOM) Apel, Katharina Saxon native winner at the trainee contest “Jugend forscht” 2017 John, Thorsten Endeavor Research Fellowship, SciFinder Future Leaders 2017 Lotnyk, Andriy Best Oral Award at the European Phase Change and Ovonics Symposium 2017 (E\PCOS) 67

Scientific Events Scientific Meetings Institute Colloquia Lectures Seminars

Scientific Events PD Dr. H. Hoppe (26.05.2016) Friedrich-Schiller-Universität Jena, Germany Organic photovoltaics: Upscaling, imaging and stabilizing Prof. Dr. H. Gnaser (02.06.2016) Technische Universität Kaiserslautern, Germany Atom probe tomography of nanostructures Prof. Dr. D. Hinderberger (09.06.2016) Martin-Luther-Universität Halle-Wittenberg, Germany Hydrophobins: Small fungal proteins that self assemble at interfaces Dr. S. Pissadakis (16.06.2016) Institute of Electronic Structure & Laser, Heraklion, Greece Towards the optical fiber-Lab concept Dr. W. Grählert (20.06.2016) Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden, Germany Hyperspectral imaging for large area and high-resolution analysis Prof. Dr. W. Widdra (23.06.2016) Martin-Luther-Universität Halle-Wittenberg, Germany Single polythiophene adsorption and thiophene polymerization at noble metal surfaces: Structure, reactions and electronic properties Prof. Dr. I. Abdulhalim (01.07.2016) Ben Gurion University of the Negev Beer, Sheva, Israel Tailoring plasmonic structures for ultrahigh enhancement of electromagnetic fields and penetration depths for ultralow detection limits Prof. Dr. J. Fassbender (07.07.2016) Helmholtz-Zentrum Dresden-Rossendorf e.V., Germany Nanomagnets, created and tailored by ions Prof. Dr. K. von Klitzing (15.09.2016) Max-Planck-Institut für Festkörperforschung, Stuttgart, Germany Gutstav-Hertz Lecture: a new international system of units in 2018!? How my Nobel Prize contributed to this development Prof. Dr. R. Marks (14.10.2016) Ben Gurion University of the Negev Beer, Sheva, Israel Development of medical and environmental biosensors: From academic pursuit to start-up endeavors Dr. P. Saikia (20.10.2016) Pontificia Universidad Católica de Chile, Santiago, Chile A study of dual-frequency capacitively coupled plasma: Analytical treatment with experimental validation Prof. Dr. G. Balasubramanian (27.10.2016) Max-Planck-Institut für Biophysikalische Chemie, Göttingen, Germany Towards molecular structure microscopy using nitrogen-vacancy spins in diamond PD Dr. D. Sander (10.11.2016) Max-Planck-Institut für Mikrostrukturforschung, Halle/S., Germany New insights into nanomagnetism and superconductivity by low-temperature scanning tunneling microscopy Prof. Dr. H. Kersten (24.11.2016) Christian-Albrechts-Universität zu Kiel, Germany Non-conventional diagnostics for plasma processing 71

Scientific Events Prof. Dr. J. Janek (30.05.2017) Justus-Liebig-Universität Giessen, Germany Elektrochemische Energiespreicherung: Im Spannungsfeld zwischen Grundlagen und Anwendungen (Jost-Lecture) Dr. A. Anders (15.06.2017) Lawrence Berkeley National Laboratory, Berkeley, USA How does the sputtering magnetron really work? News from an old plasma device Prof. A. Jesorka (22.06.2017) Chalmers University of Technology, Göteborg, Sweden Novel microfluidic probes Univ.-Prof. Dr. F. Aumayr (29.06.2017) Technische Universität Wien, Austria Surface modifications induced by strong electronic excitations Prof. Dr. J. Kneipp (06.07.2017) Humboldt-Universität zu Berlin, Germany Probing the interaction of organic molecules with surfaces of nanostructures by plasmon- enhanced vibrational spectroscopy Dr. C. B. Gopal (12.10.2017) Stanford University, USA Nanoengineering of oxide materials to improve catalytic efficiency for energy conversion and storage PD Dr. F. Ludwig (09.11.2017) Technische Universität Braunschweig, Germany Magnetische Nanopartikel in viskoelastischen Matrices und deren Untersuchung mit Hilfe dynamischer magnetischer Messmethoden Prof. Dr. S. Eigler (16.11.2017) Freie Universität Berlin, Germany Oxo-addends on graphene Prof. T. Booth (07.12.2017) Technical University of Denmark, Lyngby, Denmark Large-scale graphene devices Prof. E. M. Oks (14.12.2017) Tomsk State University of Control Systems and Radio-Electronics, Russia Some activities in Tomsk related to electron and ion beams as well as plasma flows based on hollow cathode glow and cathodic arc Lectures Abel, Bernd Physikalische Chemie für Fortgeschrittene Universität Leipzig, Fakultät für Chemie und Mineralogie Summer 2016/17 Aktuelle Themen der Physikalischen Chemie Universität Leipzig, Fakultät für Chemie und Mineralogie Summer 2016/17 Allgemeine Chemie Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2016/17, Winter 2017/18 73

Scientific Events Thin Film Analysis Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2016/17 Schulze, Agnes Funktionskontrolle an komplexen Oberflächen Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2015/16, Winter 2016/17 Spemann, Daniel Kernphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2015/16, Summer 2017 Experimentalphysik VII – Kern- und Teilchenphysik Universität Leipzig, Fakultät für Physik und Geowissenschaften Summer 2016, Winter 2016/17, Winter 2017/18 Varga, Áron Recent Trends in Chemistry Universität Leipzig, Fakultät für Chemie und Mineralogie Summer 2016/17 Funktionskontrolle an komplexen Oberfläche Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2016 With, Patrick Funktionskontrolle an komplexen Oberflächen, Part „Thin Films II“ Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2016/17 Zimmer, Klaus Lasermikrobearbeitung Hochschule Merseburg, Fachbereich Ingenieur- und Naturwissenschaften Summer 2017 Seminars Elsner, Christian Funktionskontrolle an komplexen Oberflächen, Part „Biofunktionale Oberflächen“ Universität Leipzig, Fakultät für Chemie und Mineralogie Winter 2016/17 Lorenz, Pierre Lasermikrobearbeitung Hochschule Merseburg, Fachbereich Ingenieur- und Naturwissenschaften Summer 2017 Mayr, Stefan G. Materialwissenschaftliches Seminar Universität Leipzig, Fakultät für Physik und Geowissenschaften Winter 2015/16, Winter 2017/18 75

Publications and Presentations Publications in Journals and Books Conference Proceedings Talks Posters Patents

Publications in Journals and Books C. Bundesmann, C. Eichhorn, F. Scholze, D. Spemann, H. Neumann, D. Pagano, S. Scaranzin, F. Scortecci, H.J. Leiter, S. Gauter, R. Wiese, H. Kersten, K. Holste, P. Köhler, P.J. Klar, S. Mazouffre, R. Blott, A. Bulit, K. Dannenmayer An advanced electric propulsion diagnostic (AEPD) platform for in-situ characterization of electric propulsion thrusters and ion beam sources Eur. Phys. J. D 70 (2016) 212 (1-11) J. Y. Cheng, W. C. Kao, H. F. Chang, W. C. Hsu, M. H. Yen, M. Ehrhardt, K. Zimmer High-Quality Surface Micromachining on Polymer Using Visible-LIBWE J. Laser Micro/Nanoeng. 11 (2016) 117-123 M. D`agostino, H. J. Risselada, A. Mayer Steric hindrance of SNARE transmembrane domain organization impairs the hemifusion-to- fusion transition EMBO Rep. 17 (2016) 1590-1608 O. Daikos, S. Naumov, W. Knolle, K. Heymann, T. Scherzer Peculiarities of the Photoinitator-Free Photopolymerization Reactions of Pentabrominated and Pentfluorinated Aromatic Acylates and Methacrylates Phys. Chem. Chem. Phys. 18 (2016) 32369-32377 M. Ehrhardt, P. Lorenz, L. Bayer, I. Zagoranskiy, K. Zimmer Laser Patterning of CIGS thin Films with 1550 nm Nanosecond Laser Pulses Physics Procedia 83 (2016) 74-82 C. Elsner, B. Abel Mass Spectrometric Imaging of Gold Nanolayer Coated Latent Fingermarks: Deciphering Overlapping Features by Statistical Analysis Advances Chem. Eng. Scien. 6 (2016) 584-599 R. Flyunt, W. Knolle, A. Kahnt, C. E. Halbig, A. Lotnyk, T. Haupl, A. Prager, S. Eigler, B. Abel High quality reduced graphene oxide flakes by fast kinetically controlled and clean indirect UV- induced radical reduction Nanoscale 8 (2016) 7572-7579 M. Foerstel, M. Mucke, T. Arion, U. Hergenhahn, E. Fasshauer Long-Range Interatomic Coulombic Decay in ArXe Clusters: Experiment and Theory J. Phys. Chem. C 120 (2016) 22957-22971 S. Germer, F. Pietag, J. Polak, and Th. Arnold Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens Rev. Sci. Instrum. 87 (2016) A. Gladytz, T. John, T. Gladytz, R. Hassert, M. Pagel, H. J. Risselada, S. Naumov, A. G. Beck-Sickinger, B. Abel Peptides@mica: From affinity to adhesion mechanism Phys. Chem. Chem. Phys. 18 (2016) 23516-23527 A. Gladytz, B. Abel, H. J. Risselada Gold-Induced Fibril Growth: The Mechanism of Surface-Facilitated Amyloid Aggregation Angew. Chem. Int. Ed. 55 (2016) 11242-11246 S. Grawe, S. Augustin-Bauditz, S. Hartmann, L. Hellner, J.B.C. Pettersson, A. Prager, F. Stratmann, H. Wex The immersion freezing behavoir of ash particles from wood and brown coal burning Atmos. Chem. Phys. 16 (2016) 13911-13928 F. Haase, D. Manova, H. Kersten, S. Mändl Evidence of Secondary Electron Emission during PIII Pulses as Measured by Calorimetric Probe Eur. Phys. J. D 70 (2016) 186 81

Publications in Journals and Books A. Lotnyk, S. Bernütz, X. Sun, U. Ross, M. Ehrhardt, B. Rauschenbach Real-space imaging of atomic arrangement and vacancy layers ordering in laser crystallised Ge2Sb2Te5 phase change thin films Acta Materialia 105 (2016) 1-8 D. Manova, A. Lotnyk, S. Mändl, H. Neumann, B. Rauschenbach CrN Precipitation and Elemental Segregation During the Decay of Expanded Austenite Mater. Res. Express 3 (2016) 066502 S. Mayazur Rahman, A. Reichenbach, M. Zink, S. G. Mayr Mechanical spectroscopy of retina explants at the protein level employing nanostructured scaffolds Soft Matter 12 (2016) 3431-3441 G. Mirschel, O. Daikos, T. Scherzer, C. Steckert Near-Infrared Chemical Imaging Used for In-line Analysis of Inside Adhesive Layers in Textile Laminates Anal. Chem. Acta 932 (2016) 69-79 O. Naumov, S. Naumov, R. Flyunt, B. Abel, A. Varga Fast Degradation for High Activity: Oxygen- and Nitrogen-Functionalized Carbon Nanotubes in Solid-Acid Fuel-Cell Electrodes Chem.Sus.Chem. 9 (2016) 1-10 A. Neff, K. R. Siefermann Die Zukunft der ultraschnellen Spektroskopie Nachrichten aus der Chemie-GDCh Trendberichte 64 (2016) 316-319 R.G. Nikov, N.N. Nedyalkov, P.A. Atanasov, D. Hirsch, B. Rauschenbach, K. Grochowska, G. Sliwinski Characterization of Ag nanostructures fabricated by laser-induced dewetting of thin films Appl. Surf. Sci. 374 (2016) 36-41 M. Pagel, R. Hassert, T. John, K. Braun, M. Wießler, B. Abel, A. G. Beck-Sickinger Multifunctional Coating improves cell adhesion on Titanium by using cooperatively acting peptides Angew. Chem. Int. Ed. Engl. 55 (2016) 4826-4830 Y. X. Pan, M. Ehrhardt, P. Lorenz, B. Han, B. Hopp, C. Vass, X. W. Ni, K. Zimmer Influence of the confinement on laser-induced dry etching at the rear side of fused silica Appl. Phys. A 122 (2016) 365 P. Piechulla, J. Bauer, G. Böhm, H. Paetzelt, Th. Arnold Etch Mechanism and Temperature Regimes of an Atmospheric Pressure Chlorine-Based Plasma Jet Process Plasma Process. Polym. 13 (2016) 1128-1135 C. Precker, P. Esquinazi, A. Champi, J. Barzola-Quiquia, M. Zoraghi, S. Muinos-Landin, A. Setzer, W. Böhlmann, I. Lorite, D. Spemann, J. Meijer, T. Münster, O. Bähre, G. Klöss, H. Beth Identification of a possible superconducting transition above room temperature in natural graphite crystals New J. Phys 18 (2016) 113041 B. Rauschenbach, F. Frost Constructive and destructive routes to prepare nanostructures on surfaces by low-energy ion beam sputtering Proc. SPIE (9929) Nanostructured thin Films IX (2016) 99290A M. Redzheb, L. Prager, M. Krishtab, S. Armini, K. Vanstreels, A. Franquet, P. Van Der Voort, M. R. Baklanov UV cure of oxycarbosilane low-k films Microlelectron. Eng. 156 (2016) 103-107 83

Publications in Journals and Books E. I. Wisotzki, R. P. Friedrich, A. Weidt, C. Alexiou, S. G. Mayr, M. Zink Cellular Response to Reagent-Free Electron-Irradiated Gelatin Hydrogels Macromolecular Bioscienc 16 (2016) 914–924 E. I. Wisotzki, D. Eberbeck, H. Kratz, S. G. Mayr Magnetic response of gelatin ferrogels across the sol-gel transition: the influence of high energy crosslinking on thermal stability Soft Matter 12 (2016) 3908-3918 E. I. Wisotzki, R. P. Friedrich, A. Weidt, C. Alexiou, S. G. Mayr, M. Zink Cellular response to reagent-free electron-irradiated gelatin hydrogels Macromol. Biosci. 6 (2016) 914-924 P. S. With, U. Helmstedt, S. Naumov, A. Sobottka, U. Decker, A. Prager, R. Heller, B. Abel, L..Prager Low Temperature Photochemical Conversion of Organometallic Precursor Layers to Titanium(IV) Oxide Thin Films Chem. Mater. 28 (2016) 7715-7724 S. Zernia, F. Ott, K. Bellmann-Sickert, R. Frank, M. Klenner, H.-G. Jahnke, A. Prager, B. Abel, A. Robitzki, and A. G. Beck-Sickinger Peptide-Mediated Specific Immobilization of Catalytically Active Cytochrome P450 BM3 Variant Bioconjugate Chem. 27 (4) (2016) 1090-1097 J. Zhao, R. Ma, X. Chen, B. Kang, X. Qiao, J. Du, X. Fan, U. Ross, C. Roiland, A. Lotnyk, L Kienle, X. Zhang From Phase Separation to Nanocrystallization in Fluorosilicate Glasses: Structural Design of Highly Luminescent Glass-Ceramics J. Phys. Chem. C 120 (2016) 17726-17732 2017 A. Abdelrahman, B. Abel, A. Varga Towards rational electrode design: quantifying the triplephase boundary activity of Pt in solid acid fuel cell anodes by electrochemical impedance spectroscopy J. Appl. Electrochem. 47 (2017) 327-334 U. Allenstein, E. I. Wisotzki, C. Gräfe, J. H. Clement, Y. Lui, J. Schroers, S. G. Mayr Binary Fe-Pd submicron structures fabricated through glancing angle deposition (GLAD) for bioapplications Mater. Des. 131 (2017) 366-374 D. J. As, M. Deppe, J.W. Gerlach, D. Reuter Optical properties of germanium doped cubic GaN MRS Advances 2 (2017) 283-288 P.A. Atanasov, N.N. Nedyalkov, R.G. Nikov, N. Fukata, W.Jevasuwan, T. Subramani, D. Hirsch, B. Rauschenbach SERS analyses of thiamethoxan assisted by Ag films and nanostructures produced by laser techniques J. Raman Spectrosc. (2017) 1-7 P.A. Atanasov, N.N. Nedyalkov, R. Nikov, N. Fukata, W. Jevasuwan, T.Subramani, D. Hirsch, B. Rauschenbach SERS of insecticides and fungicides assisted by Au and Ag nanostructures produced by laser techniques Intern. J. of Environmental & Agriculture Research 3 (2017) 61-69 M. Balkenhol, F. P. Nothdurft, M. Hannig, A. Schindler, A. Lehmann, Th. Arnold, A. Knauber, S. Rupf Bonding to zirconia ceramic: The effect of cold plasma treatment and 4-META Clin. Plasma Med. 5 (2017) 8-13 85

Publications in Journals and Books M. D`Agostino, H.J. Risselada, A. Lurick, C. Ungermann, A. Mayer A tethering complex drives the terminal statge of SNARE-dependent membrane fusion Nature 551 (2017) 634–638 R. Das, C. D. Vecitis, A. Schulze, B. Cao, A. F. Ismail, X. Lu, J. Chen, S. Ramakrishna Recent Advances of Nanomaterials for Water Protection and Monitoring Chem. Soc. Rev. 46 (2017) 6946-7020 M. Deppe, J.W. Gerlach, D. Reuter, D. J. As Incorporation of germanium for n-type doping of cubic GaN Phys. Status Solidi B 254 (2017) 1600700 M. Ehrhardt, P. Lorenz, P. Yunxiang, L. Bayer, B. Han, K. Zimmer Laser-induced back-side etching with liquid and the solid hydrocarbon absorber films of different thicknesses Appl. Phys. A 123 (2017) 251 C. Elsner, A. Prager, A. Sobottka, A. Lotnyk, B. Abel Coated triangular Ag nanoprisms as optical sensors: control of stability and spectral response with a thermo-responsive polymer Anal. Methods 9 (2017) 4663-4672 N. Engel, S.I. Bokarev, A. Moguilevski, A.A. Raheem, R. Al-Obaidi, T. Mohle, G. Grell, K.R. Siefermann, B. Abel, S.G. Aziz, O. Kuhn, M. Borgwardt, I.Y. Kiyan, E.F. Aziz Light-induced relaxation dynamics of the ferricyanide ion revisited by ultrafast XUV photoelectron spectroscopy Phys. Chem. Chem. Phys. 19 (2017) 14248-14255 E. Fasshauer, M. Foerstel, M. Mucke, U. Hergenhahn Theoretical and Experimental Investigation of Electron Transfer Mediated Decay in ArKrClusters J. Chem. Phys. 482 (2017) 226-238 M. Fazio, D. Manova, D. Hirsch, E. Valcheva, A. Kleiman, S. Mändl, A. Márquez Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel Diam. Rel. Mater. 74 (2017) 173-181 K. Fischer, A. Gawel, D. Rosen, M. Krause, A. Abdul Latif, J. Griebel, A. Prager, A. Schulze Low-Temperature Synthesis of Anatase/Rutile/Brookite TiO2 Nanoparticles on a Polymer Membrane for Photocatalysis Catalysts 7 (2017) 209-222 P. Frach, D. Gloess, T. Goschurny, A. Drescher, U. Hartung, H. Bartzsch, A. Heisig, H. Grune, L. Leischnig, S. Leischnig, C. Bundesmann Large area precision optical coatings by pulse magnetron sputtering Proceed. SPIE (10181) Advanced Optics for Defense Applications: UV through LWIR II (2017) 101810K J.W. Gerlach, P. Schumacher, M. Mensing, S. Rauschenbach, I. Cermak, B. Rauschenbach Ion mass and energy selective hyperthermal ion-beam assisted deposition setup Rev. Sci. Instrum. 88 (2017) 063306 N.S. Gunning, T. Dankwort, M. Falmbigl, U. Ross, G. Mitchson, D.M. Hamann, A. Lotnyk, L. Kienle, D.C. Johnson Expanding the concept of van der Waals heterostructures to interwoven 3D Structures Chem. Mater. 29 (2017) 8292-8298 A. Hans, L. B. Ltaief, M. Förstel, P. Schmidt, C. Ozga, P. Reiß, X. Holzapfel, C. Küster-Wetekam, F. Wiegandt, F. Trinter, U. Hergenhahn, T. Jahnke, R. Dörner, A. Ehresmann, P. V. Demekhin, A. Knie Fluorescence cascades evoked by resonant interatomic Coulombic decay of inner-valence excited neon clusters Chem. Phys. 428 (2017) 165-168 87

Publications in Journals and Books A. Lehmann, F. Pietag, Th. Arnold Human health risk evaluation of a microwave-driven atmospheric plasma jet as medical device Clin. Plasma Med. 7-8 (2017) 16-23 J. Lehnert, J. Meijer, C. Ronning, D. Spemann, E. Vittone Ion Beam Induced Charge analysis of diamond diodes Nucl. Instrum. Meth. B 404 (2017) 259-263 J. Lehnert, D. Spemann, M. Hamza Hatahet, St. Mändl, M. Mensing, A. Finzel, A. Varga, B. Rauschenbach Graphene on silicon dioxide synthesized using carbon ion implantation in copper foils with PMMA-free transfer Appl. Phys. Lett. 110 (2017) 233114 Y. Li, H. Takino, F. Frost Characteristics of diamond turned NiP smoothed with ion beam planarization technique J. Europ. Opt. Soc. - Rapid Publications 13 (2017) 27 Y. Li, H. Takino, F. Frost Ion beam planarization of diamond turned surfaces with various roughness profiles Opt. Express 25 (2017) 7828-7838 S. Liedtke, Ch. Grüner, A. Lotnyk, B. Rauschenbach Glancing angle deposition of sculptured thin metal films at room temperature Nanotechnology 28 (2017) 1-7 F. P. Lohmann, P. S.C. Schulze, M. Wagner, O. Naumov, A. Lotnyk, B. Abel, A. Varga The Next Generation Solid Acid fuel Cell Electrodes: Stable, high Permormance with minimezed catalyst loading J. of Mat. Chem. A 5 (2017) 15021-15025 P. Lorenz, I. Zagoranskiy, J. Zajadacz, M. Ehrhardt, B. Han, L. Bayer, K. Zimmer Stress-assisted shock-wave-induced thin-film delamination (SWIFD) of CIGS on a flexible substrate J. Laser Micro/Nanoeng. 12 (2017) 91-96 P. Lorenz, I. Zagoranskiy, M. Ehrhardt, B. Han, L. Bayer, K. Zimmer Confinement assisted shock-wave-induced thin-film delamination (SWIFD) of copper indium gallium diselenide (CIGS) on a flexible substrate Appl. Surf. Sci. 426 (2017) 527-535 P. Lorenz, C. Gruner, F. Frost, M. Ehrhardt, K. Zimmer Nanosecond laser nanostructuring of fused silica surfaces assisted by a chromium triangle template Appl. Surf. Sci. 418 (2017) 481-486 M. Lorenz, D. Hirsch, C. Patzig, T. Höche, S. Hohenberger, H. Hochmuth, V. Lazenka, K. Temst, M. Grundmann Correlation of Interface Impurities and Chemical Gradients with High Magnetoelectric Coupling Strength in Multiferroic BiFeO3-BaTiO3 Superlattices ACS Appl. Mater. Interfaces 9 (2017) 18956-18965 A. Lotnyk, I. Hilmi, U. Ross, B. Rauschenbach Van der Waals interfacial bonding and intermixning in GeTe-Sb2Te3-based superlattices Nano Research 10 (2017) A. Lotnyk, U. Ross, T. Dankwort, I. Hilmi, L. Kienle, B. Rauschenbach Atomic structure and dynmamic reconfiguration of layered defects in van der Waals layered Ge- Sb-Te based materials Acta Materialia 141 (2017) 92-96 89

Publications in Journals and Books B. Rauschenbach, A. Lotnyk, L. Neumann, D. Poppitz, J.W. Gerlach Ion beam assisted deposition of thin epitaxial GaN films Materials 10 (2017) 690-702 S. Riedel, B. Heyart, K. S. Apel, S. G. Mayr Programing stimuli-responsiveness of gelatin with electron beams: basic effects and development of a hydration-controlled biocompatible demonstrator Sci. Rep. 7 (2017) 17436 H.J. Risselada Membrane fusion stalks and lipid rafts: A love-hate relationship J. Biophys. 112 (2017) 2475-2478 Y. M. Riyad Thioanisole triplet: Laser flash photolysis and pulse radiolysis studies Journal of Photochemistry and Photobiology A: Chemistry 335 (2017) 294-299 M. Saifutdinow, K. Uhlig, A. Prager, C. Schneider, B. Abel, D.M. Smith Nanoscale patterning of self-assembeld monolayer (SAM)-functionalised substrates with single molecule contact printing Nanoscale 9 (2017) 15098-15106 J. Schmidt, R. Wei, T. Oeser, L. A. D. E. Silva, D. Breite, A. Schulze, W. Zimmermann Degradation of polyester polyurethane by bacterial polyester hydrolases Polymers 9 (2017) 65 F. Scholze, C. Eichhorn, C. Bundesmann, D. Spemann, H. Neumann, A. Bulit, D. Feili, J. Gonzalez del Amo Modelling of a Radio Frequency Plasma Bridge Neutralizer (RFPBN) Procedia Eng. 185 (2017) 9-16 A. Schulze, D. Breite, Y. Kim, M. Schmidt, I. Thomas, M. Went, K. Fischer, A. Prager Bio-Inspired Polymer Membrane Surface Cleaning Polymers 9 (2017) 97 S. Schulze, M. Pahl, F. Stolz, J. Appun, B. Abel, C. Schneider, D. Belder Liquid beam desorption mass spectrometry for the investigation of continuous flow reactions in microfluidic chips Anal. Chem. 89 (11) (2017) 6175-6181 P. Schumacher*, S. G. Mayr, B. Rauschenbach Topography evolution of germanium thin films synthesized by pulsed laser deposition AIP Advances 7 (2017) 045115 K. R. Siefermann, A. Neff Time-Resolved Photoemission Electron Microscopy Reference Module in Chemistry, Molecular Sciences and Chemical Engineering (2017) S. K. Srivastava, C. Grüner, D. Hirsch, B. Rauschenbach, I. Abdulhalim Enhanced intrinsic fluorescence from carboxidized nano-sculptured thin films of silver and their application for label free dual detection of glycated hemoglobin Opt. Express 25 (2017) 4761-477 M. Stiller, J. Barzola-Quiquia, P. D. Esquinazi, S. Sangiao, J. M. De Teresa, N. Meijer, B. Abel Functionalized Akiyama tips for magnetic force microscopy measurements Measurement Science and Technology 28 (2017) 125401 F. Stolz, J. Appun, S. Naumov, C. Schneider, B. Abel A Complex Catalytic Reaction Caught in the Act: Intermediates and Products Sampling online by Liquid ¼-Beam Mass Spectrometry and Theoretical Modeling ChemPlusChem 82 (2017) 233-240 91

Conference Proceedings Conference Proceedings 2016 Th. Arnold, G. Böhm, H. Paetzelt Non-conventional ultra-precision manufacturing of ULE® mirror surfaces using atmospheric reactive plasma jets Paper Nr. 99123N, SPIE Telescopes u. Instrumentation, Edinburgh, 26.06.-01.07.2016 Th. Arnold, J. Bauer Ion beam figuring of RSA aluminium surfaces Paper Nr. O3.4, EUSPEN 16th International Conference, Nottingham, UK, 30.05.-03.06.2016 L. Bayer, M. Ehrhardt, P. Lorenz, M. Mäser, N. Kechagias, K. Zimmer Large-area picosecond laser-induced periodic surface structure (LIPSS) on chromium Paper Nr. 11283, LANE 2016 - 9th International Conference on Photonic Technologies, Fürth, Deutschland, 22.09.2016 C. Bundesmann, C. Eichhorn, F. Scholze, D. Spemann, H. Neumann, F. Scortecci, H.J. Leiter, K. Holste, P.J. Klar, A. Bulit, K. Dannenmayer, J. Gonzalez del Amo Improvements of the advanced electric propulsion diagnostic tools at IOM Paper Nr. SP2016 3124791, Space Propulsion 2016, Rom, 02.-06.05.2016 C. Bundesmann, C. Eichhorn, F. Scholze, D. Spemann, H. Neumann, D. Pagano, S. Scaranzin, F. Scortecci, H.J. Leiter, S. Gauter, R. Wiese, H. Kersten, K. Holste, P. Köhler, P.J. Klar, S. Mazouffre, R. Blott, A. Bulit, K. Dannenmayer, J. Gonzales del Am Qualification of the AEPD system as a Standard On-ground Tool for Electric Propulsion Thrusters - Status and Perspectives Paper Nr. SP2016 3124997, Space Propulsion 2016, Rom, 02.-06.05.2016 M. Burkhardt, P. Triebel, T. Diehl, L. Erdmann, A. Kalies, M. Helgert, R. Fechner, F. Frost, A. Gatto Manufacturing of deep blazed gratings based on holography Paper Nr. ID234, European Optical Society Bi-Annual Meeting (EOSAM) 2016, Berlin, 26.-30.09.2016 M. Ehrhardt, P. Lorenz, L. Bayer, C. Molpeceres, C. A. H. Ramirez, K. Zimmer Selective structuring of multi-layer functional thin films using a laser-induced shockwave delamination process Paper Nr. 973503, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, SPIE, San Fransisco, 14.03.2016 K. Fischer, A. Abdul Latif, A. Schulze Direct formation of TiO2 nanoparticles on a PVDF membrane: Optimization of synthesis Paper Nr. P 1.3, 16th Aachener Membran Kolloquium, Aachen, 02.-03.11.2016 P. Frach, D. Glöß, H. Bartzsch, T. Goschurny, A. Drescher, C. Gottfried, J.-S. Liebig, J. Hartung, A. Heisig, H. Grune, L. Leischnig, S. Leischnig, H. Neumann, C. Bundesmann Precision Optical Coatings on Large Substrates by Reactive Magnetron Sputtering Paper WA.11, Optical Interference Coatings (OIC), Tucson, Arizona, USA, 19.-24.06.2016 S. Liedtke, Ch. Grüner, M. Mensing, J.W. Gerlach, B. Rauschenbach Metallic Nanostructures Prepared by Glancing Angle Deposition European Conference on Nanofilms, Bilbao, Spain, 19.-21.10.2016 A. Lotnyk, U. Roß, S. Bernütz, E. Thelander, B. Rauschenbach Evaluation of local atomic arrangements and lattice distortions in layered Ge-Sb-Te crystal structures Paper Nr. 6108, 16th European Microscopy Congress, Lyon, France, 28.08.-02.09.2016 93

Conference Proceedings C. Bundesmann, F. Scholze, C. Eichhorn, D. Spemann, H. Neumann, F. Scortecci, H.J. Leiter, K. Holste, P.J. Klar Development of advanced in-situ EP diagnostic tools at IOM: Current status Paper Nr. IEPC-2017-441, 35th International Electric Propulsion Conference, Atlanta, Georgia, USA, 08.-12.10.2017 C. Bundesmann, R. Feder, T. Lautenschläger, D. Spemann Ionenstrahlgestützte Schichtabscheidung: Zusammenhänge zwischen Prozessparametern, Teilchen- und Schichteigenschaften 12. Thementage Grenz- und Oberflächentechnik (ThGOT) und 5. Kolloquium Dünne Schichten in der Optik, Zeulenroda, 14.-16.03.2017 C. Bundesmann, R. Feder, T. Lautenschläger, M. Mateev, D. Spemann Sytematics in Ion Beam Sputter Deposition 23rd International Conference on Ion-Surface Interactions (ISI-2017), Moscow, 21.-25.08.2017 Y. Li, H. Takino, F. Frost Characteristics of Diamond Turned NiP Smoothed with IBP EOS Optical Technologies Conferences 2017 (ISBN 978-952-68553-3-2), Munich, Germany, 26.-29.06.2017 P. Lorenz, I. Zagoranskiy, M. Ehrhardt, L. Bayer, K. Zimmer Nanostructuring of sapphire using time-modulated nanosecond laser pulses Paper Nr. 100921P, Photonics West: Laser-based Micro- and Nanoprocessing XI, San Fransisco, 17.02.2017 P. Lorenz, J. Zajadacz, M. Ehrhardt, L. Bayer, K. Zimmer Pattern transfer, self-organized surface nanostructuring, and nanodrilling of sapphire using nanosecond laser irradiation Paper Nr. 97361K, Laser-based Micro- and Nanoprocessing X, SPIE Proceedings, San Fransisco, 04.03.2017 S. Mändl Untersuchungen zur Dynamik schnell-veränderlicher Plasmarandschichten bei der Plasma- Immersions-Ionenimplantation mittels nicht-konventioneller Diagnostik 3rd Int. Workshop Diagnostic Systems for plasma processes, Lichtenwalde, Germany, 26.09.2017 G. Mirschel, O. Daikos, T. Scherzer, C. Steckert, K. Heymann Characterization of Sizes on Textiles by In-Line NIR Chemical Imaging 3rd International Conference on Optical Characterization of Materials, Karlsruhe, Germany, 22.-23.03.2017 J.P. Porst, C. Altmann, C. Arnold, J. Kuhmann, C. Syring, H.-J. Leiter, M. Berger, A. Soto, F. Herty, F. Scholze, C. Eichhorn, C. Bundesmann The RIT 2X propulsion system: Current development status Paper Nr. IEPC-2017-505, 35th International Electric Propulsion Conference, Atlanta, Georgia, USA, 08.-12.10.2017 F. Scortecci, D. Pagano, C. Bundesmann, C. Eichhorn, F. Scholze, D. Spemann, H. Leiter, H. Kersten, R. Blott, S. Mazouffre, P.J. Klar, D. Feili, J. Gonzales del Amo AEPD System as a Standard On-ground Tool for Electric Propulsion Thrusters Paper Nr. IEPC-2017-33, 35th International Electric Propulsion Conference, Atlanta, Georgia, USA, 08.-12.10.2017 F. Sotier, S. Geiger, W. K. Kipnusu, G. Marowsky, K. R. Siefermann Ultra-short pulses from a 2 um fiber laser source and applications in materials processing LANE 2016, Fürth, 19.-22.09.2017 95

Presentations C. Bundesmann*, C. Eichhorn, F. Scholze, D. Spemann, H. Neumann, D. Pagano, S. Scaranzin, F. Scortecci, H. J. Leiter, S. Gauter, R. Wiese, H. Kersten, A. Bulit New Developments of the Advanced Electric Propulsion Diagnostics (AEPD) System XXIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 15.-17.03.2016 M. Burkhardt, P. Triebel, T. Diehl*, L. Erdmann, A. Kalies, M. Helgert, R. Fechner, F. Frost, A. Gatto Manufacturing of deep blazed gratings based on holography European Optical Society Bi-Annual Meeting (EOSAM) 2016, Berlin, 26.-30.09.2016 M. Ehrhardt, P. Lorenz*, L. Bayer, C. Molpeceres, C. A. H. Ramirez, K. Zimmer Selective structuring of multi layer functional thin films using laser induced shockwave delamination Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, SPIE, San Francisco, 13.02.2016 M. Ehrhardt, K. Zimmer, P. Lorenz, L. Bayer*, E. S. Cortezon Processing of CIGS thin film with infrared nanosecond laser radiation EMRS Spring Meeting 2016, Lille, France, 02.-06.05.2016 M. Ehrhardt, P. Lorenz, L. Bayer, I. Zagoranskiy, K. Zimmer* Laser Patterning of CIGS thin Films with 1550 nm Nanosecond Laser Pulses LANE 2016 - 9th International Conference on Photonic Technologies, Fürth, 19.-22.09.2016 C. Eichhorn*, C. Bundesmann, F. Scholze, D. Spemann, H. Neumann, F. Scortecci, H.J. Leiter, K. Holste, P.J. Klar, A. Bulit, K. Dannenmayer, J. Gonzalez del Amo Improvements of the Advanced Electric Propulsion Diagnostic (AEPD) Tools at IOM Space Propulsion 2016, Rom, Italien, 02.-06.05.2016 C. Eichhorn*, F. Scortecci, D. Pagano, S. Scaranzin, C. Bundesmann, F. Scholze, D. Spemann, H. Neumann, H. Leiter, H. Kersten, S. Gauter, R. Wiese, R. Blott, P.J. Klar, P. Köhler, K. Holste, B. Meyer, S. Mazouffre, A. Bulit, K. Dannenmayer, J. Gonzal Qualification of the AEPD System as a Standard On-Ground Tool for Electric Propulsion Thrusters Status and Perspectives Space Propulsion 2016, Rom, Italien, 02.-06.05.2016 C. Eichhorn*, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann, A. Bulit, D. Feili, J. Gonzalez del Amo Performance Modelling of a Radio Frequency Plasma Bridge Neutralizer Space Propulsion 2016, Rom, Italien, 02.-06.05.2016 A. Finzel*; R. Fechner, M. Mitzschke, F. Frost Reactive Ion Beam Etching of Diffractive Elements 2nd International Summer School 2016: Trends in energy and particle beam ultra-precision optical surface manufacturing, Leipzig, Germany, 29.08.-02.09.2016 K. Fischer*, A. Schulze, I. Thomas, A. Prager Biocatalytic Self-Cleaning Polymer Membranes Advances in Functional Materials Conference, Jeju Island, Südkorea, 08.-11.08.2016 F. Frost*, R. Fechner, A. Finzel, M. Mitzschke, F. Carstens, H. Ehlers, M. Helgert Optisches und massenspektrometrisches Prozess-Monitoring beim RIBE von mikrooptischen Oberflächen XXIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 15.-17.03.2016 F. Frost 350.000 km/h schnell: Ionen in Aktion Tag der deutschen Einheit Innovatives Sachsen, Dresden, 01.-03.10.2016 97

Presentations A. Lotnyk*, S. Bernütz, X. Sun, U. Roß, M. Ehrhardt, B. Rauschenbach Electron beam induced in situ writing and recovering of vacancy layers in Ge2Sb2Te5 crystal lattice 16th European Microscopy Congress, Lyon, France, 28.08.-02.09.2016 A. Lotnyk*, U. Roß, X. Sun, E. Thelander, B. Rauschenbach Local atomic arrangement in Ge-Sb-Te phase-change thin films International Conference on Applied Crystallography, Houston, USA, 17.-19.10.2016 A. Lotnyk*, U. Roß, X. Sun, B. Rauschenbach Advanced electron microscopy of Ge-Sb-Te phase change thin films EMN Summer Meeting, Cancun, Mexico, 05.-09.06.2016 A. Lotnyk*, U. Roß, S. Bernütz, E. Thelander, B. Rauschenbach Analysis of local atomic arrangement in layered Ge-Sb-Te crystal structures by advanced scanning transmission electron microscopy DPG-Frühjahrstagung, Regensburg, Germany, 06.-11.03.2016 A. Lotnyk*, U. Roß, S. Bernütz, E. Thelander, B. Rauschenbach Analysis of local atomic arrangement in layered Ge-Sb-Te crystal structures by advanced STEM DPG Spring Meeting, Regensburg, 06.-11.03.2016 A. Lotnyk*, U. Ross, I. Hilmi, X. Sun, B. Rauschenbach Formation and direct imaging of heterogeneous vacancy structures in cubic Ge2Sb2Te5 crystal lattices European Phase Change and Ovonic Symposium, Cambridge, UK, 04.-06.09.2016 A. Lotnyk New insights into local structure of Ge-Sb-Te phase change thin films 2nd IOM-KAIST Workshop, Leipzig, Germany, 25.-27.07.2016 A. Lotnyk Advanced STEM of Ge-Sb-Te thin films Treffen des DGE Arbeitskreises Hochauflösende Transmissions-Elektronenmikroskopie (DGE-AK- HREM), TU Berlin, 11.04.2016 S. Mändl*, D. Manova Surface Modification by Energetic Particles Institut Jean Lamour, Université de Lorraine, Nancy, France, 12.04.2016 D. Manova*, S. Mändl In situ Diagnostic for Nitriding of Advanced Metals Institut Jean Lamour, Université de Lorraine, Nancy, France, 11.04.2016 D. Manova, L. Franco Arias, A. Hofele, I. Alani, A. Kleiman, I. Asenova, U. Decker, A. Marquez, S. Mändl* Nitrogen Insertion into TiO2 Thin Films XXIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 15.-17.03.2016 D. Manova, C. Eichhorn, S. Mändl* Optical Emission Spectroscopy during PIII XXIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 15.-17.03.2016 D. Manova*, A. Lotnyk, S. Mändl, B. Rauschenbach Elemental Segregation Observed for Decaying Expanded Austenite 15th Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 99

Presentations F. Scholze, C. Eichhorn, C. Bundesmann*, D. Spemann, H. Neumann, A. Bulit, D. Feili, J. Gonzalez del Amo Performance Modelling of a Radio Frequency Plasma Bridge Neutralizer 6th Russian-German Conference on Electric Propulsion and Their Application, Samara, Russian Federation, 28.08.-02.09.2016 F. Scholze*, N. Hamer, H. Neumann Performance-Modellierung, Thermal- und Strukturmodell für den RF-PBN XXIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 15.-17.03.2016 P. Schumacher*, M. Mensing, J.W. Gerlach, S. Rauschenbach, B. Rauschenbach A custom quadrupole setup for ion energy and ion mass selective ion-beam assisted deposition of nitride nanofilms European Conference on Nanofilms, Bilbao, 18.10.-21.10.2016 K. Siefermann Ultrafast photoemission electron microscopy in materials science Physical Chemistry Colloquium, ETH Zürich, 08.11.2016 K. Siefermann Ultrafast photoemission electron microscopy in materials science The 15th international conference on desorption and dynamics induced by electronic transitions (DIET- 15, Shanghai, 09.-13.10.2016 K. Siefermann Towards real-time imaging of ultrafast electron dynamics Gordan Conference on Photoionization and Photodetachment, Il Ciocco, 07.-12.02.2016 D. Spemann*, J. Meijer, J.W. Gerlach, P. Räcke, S. Liedtke, S. Rauschenbach, B. Rauschenbach Concept of deterministic ion implantation at the nanoscale XXIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 15.-17.03.2016 D. Spemann*, J. Meijer, J.W. Gerlach, P. Räcke, S. Liedtke, S. Rauschenbach, B. Rauschenbach Deterministic ion implantation for engineering arrays of atoms at the nanoscale Autumn School and BuildMoNa Module T4, Universität Leipzig, 19.09.2016 D. Spemann*, J. Meijer, J. W. Gerlach, P. Räcke, S. Liedtke, S. Rauschenbach, B. Rauschenbach Concept of deterministic ion implantation at the nanoscale Seminar ECMP, School of Physics, The University of Melbourne, Melbourne, Australia, 11.07.2016 D. Spemann*, J. Meijer, J. W. Gerlach, P. Räcke, S. Liedtke, S. Rauschenbach, B. Rauschenbach Concept of deterministic ion implantation at the nanoscale International Conference on Electronic Materials (ICEM2016), Singapore, 04.-08.07.2016 2017 A. Anders*, M. Panjan Potential Structure of Magnetrons TACT 2017 International Thin Films Conference, Hualien, Taiwan, 15.-18.10.2017 A. Anders Ion Energy Distributions in Magnetron Sputtering: Questions Remain Even After Detailed Measurements of the Plasma Potential International Conference on Reactive Sputter Deposition (RSD) 2017, Plzen, Czech Republic, 04.-06.12.2017 101

Presentations C. Bundesmann, F. Scholze, C. Eichhorn, D. Spemann, H. Neumann, F. Scortecci*, H.J. Leiter, K. Holste, P.J. Klar Development of advanced in-situ EP diagnostic tools at IOM: Current status 35th International Electric Propulsion Conference, Atlanta, Georgia, USA, 08.-12.10.2017 C. Bundesmann*, R. Feder, T. Lautenschläger, M. Mateev, D. Spemann Sytematics in Ion Beam Sputter Deposition 23rd International Conference on Ion-Surface Interactions (ISI-2017), Moscow, 21.-25.2017 C. Eichhorn*, F. Scholze, C. Bundesmann, D. Spemann, H. Neumann Two-Photon Laser Induced Fluorescence in Xenon Plasmas: Current Developments at IOM XXIV. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 07.-09.03.2017 P. Frach*, D. Gloess, T. Goschurny, A. Drescher, U. Hartung, H. Bartzsch, A. Heisig, H. Grune, L. Leischnig, S. Leischnig, C. Bundesmann Large area precision coatings by pulse magnetron sputtering SPIE, Defense and Commercial Sensing, Anaheim, California, USA, 09.-13.04.2017 F. Frost Leibniz-Institut für Oberflächenmodifizierung (IOM): Oberflächen nach Maß 1. Mitteldeutsches Symposium der Junior-GBM Leipzig, Leipzig, 22.04.2017 J.W. Gerlach*, P. Schumacher, M. Mensing, S. Rauschenbach, B. Rauschenbach Ion mass and ion energy selective hyperthermal ion-beam assisted epitaxial growth Collaborative Conference on Crystal Growth (EMN 3CG), Berlin, 08.-11.08.2017 J.W. Gerlach*, P. Schumacher, M. Mensing, S. Rauschenbach, B. Rauschenbach An ion mass and ion energy selected hyperthermal ion-beam assisted deposition setup for nitride nanofilm synthesis International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA, 24.-28.04.2017 S. Glaß*, A. Schulze, B. Abel Uptake and Release of Dyes for Photodynamic Therapy from Hydrogels SMS EUROPE 2017, Smart Materials and Surfaces Coference, Paris, France, 26.04.-28.04.2017 S. Glaß*, A. Schulze, B. Abel Hydrogels as Carriers for Photosensitizers Used in Photodynamic Therapy Jahrestagung der deutschen Gesellschaft für Biomaterialien, Würzburg, 09.-11.11.2017 C. Grüner*, S. Liedtke, J. Bauer, S. Mayr, B. Rauschenbach Oblique Angle Deposition: A Ballistic Model and its Limits Nanotech France, Paris, 28.-30.06.2017 Ch. Grüner*, S. K. Srivastava, A. Shalabney, I. Abdulhalim, M. Abu Tier, B. Rauschenbach Glancing Angle Deposited Silver Nanostructures for Surface Enhanced Raman Scattering Based Sensors DPG-Frühjahrstagung, Dresden, 19.-24.03.2017 U. Helmstedt*, T. Machleidt, A. Freyer, M. Naumann, H.-Ch. Schwannecke, K. Menzel, P. With, B. Rauschenbach Direct laser ablation of nanoparticle-filled polymers for micro-structured print and replication master surfaces Pro Flex 2017, Dresden, 27.-28.11.2017 U. Hergenhahn Opportunities for probing liquid interfaces at an advanced X-Ray source Opportunities for soft X-Ray science at Petra IV, Hamburg, 27.-29.09.2017 103

Presentations M. Lorenz*, D. Hirsch, C. Patzig, T. Höche, V. Lazenka, K. Temst, and M. Grundmann Multiferroic magnetoelectric BiFeO3 - BaTiO3 superlattices: chemical interface features by ToF- SIMS and STEM-EDX Meeting Towards Oxide Based Electronics 2017, Riga, Lettland, 11.09.-13.09.2017 P. Lorenz*, I. Zagoranskiy, L. Bayer, J. Zajadacz, K. Zimmer Applying of UV and IR nanosecond laser radiation for the nanostructuring of dielectric surfaces DPG Fühjahrstagung, Dresden, 19.-24.2017 A. Lotnyk Imaging of light elements by Cs-corrected STEM: Experiment vs simulation Treffen des Arbeitskreises Hochauflösung (AK-HREM), IOM Leipzig, Germany, 03.04.2017 A. Lotnyk Local atomic arrangement, vacancy structure and bilayer defects in chalcogenide based thin films and superlattices 3rd KAIST-IOM Research Meeting, KAIST, Daejeon, Korea, 05.06-07.06.2017 A. Lotnyk Novel insights into local structure of Ge-Sb-Te based phase-change thin films World Congress and Expo on Nanotechnology and Materials Science, Barcelona, Spain, 05.-07.04.2017 A. Lotnyk Heterogeneous Vacancy Structures in Ge-Sb-Te Phase Change Thin Films 5th Annual Conference of AnalytiX-2017, Fukuoka, Japan, 22.-24.03.2017 A. Lotnyk Insights into local structure of Ge-Sb-Te phase-change alloys Festkörperphysik Seminar, SS 2017, Institut für Festkörperphysik, Universität Bremen, Germany, 20.06.2017 A. Lotnyk Understanding the local structure of chalcogenide phase change thin films with advanced transmission electron microscopy Electron Microscopy for Materials The Next Ten Years, Zhejiang, China, 27.-29.05.2017 A. Lotnyk Understanding the local structure of phase change alloys with advanced scanning transmission electron microscopy Institutsseminar, I. Physikalisches Institut (IA), RWTH Aachen, Germany, 31.07.2017 S. Mändl Untersuchungen zur Dynamik schnell-veränderlicher Plasmarandschichten bei der Plasma- Immersions-Ionenimplantation mittels nicht-konventioneller Diagnostik 3rd International Workshop Diagnostic Systems for Plasma Processes, Lichtenwalde, Germany, 26.09.2017 S. Mändl*, D. Manova Modification of metals by plasma immersion ion implantation 14th Int. Conf. on Plasma Based Ion Implantation, Shanghai, China, 17.-20.10.2017 S. Mändl*, D. Manova Dynamic OES measurements during PIII XXIV. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, Germany, 07.-09.03.2017 D. Manova*, F. Haase, H. Kersten, S. Mändl Dynamic Measurements of Surface and Plasma Parameters during Plasma Immersion Ion Implantation 14th Int. Conf. on Plasma Based Ion Implantation, Shanghai, China, 17.-20.10.2017 105

Presentations A. Nickel, C. Alvermann, F. Frost* Verfahren zum homogenen Materialabtrag beim raktiven Ionenstrahlätzen XXIV. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen, 07.-09.03.2017 F. Niefind, A. Neff, B. Abel, M. Hambsch, S. Mannsfeld, K. Siefermann Imaging Nanoscale Morphology of Semiconducting Polymer Films with Photoemission Electron Microscopy Bunsentagung 2017, Kaiserslautern, 25.-27.05.2017 M. Panjan*, K. Tanaka, R. Franz, A. Anders The Influence of Spokes on Spatial and Energy Distributions of Ions in Magnetron Sputtering Discharges AVS 64th Int. Symposium and Exhibition, Tampa, FL, USA, 31.10.-02.11.2017 S. Pezzagna, D. Spemann, P. Räcke, N. Raatz, J.W. Gerlach, B. Rauschenbach, J. Meijer Single Ion Implantation: An important tool for fabrication of quantum devices based on NV- centers Quantum 2017, Turin, Italien, 07.-13.05.2017 S. Pisoni*, L. Bayer, F. Fu, K. Zimmer, S. Buecheler, A. N. Tiwari, All laser scribed Perovskite Solar Mini-Modules MRS Spring Meeting 2017, Phoenix, Arizona, 17.04.2017 J.P. Porst*, C. Altmann, C. Arnold, J. Kuhmann, C. Syring, H.-J. Leiter, M. Berger, A. Soto, F. Herty, F. Scholze, C. Eichhorn, C. Bundesmann The RIT 2X propulsion system: current development status 35th International Electric Propulsion Conference, Atlanta, Georgia, USA, 08.-12.10.2017 M. Quaas*, F. Scholze, C. Eichhorn, R. Woyciechowski, C. Bundesmann, D. Spemann Evaluation of Faraday probe designs employing RF ion sources DPG-Frühjahrstagung, Bremen, 13.-17.03.2017 B. Rauschenbach Ion beam - Solid Surface Interaction Kolloquium, Faculty of Mathematical, Physical and Natural Sciences, University of Salerno, Italy, 19.07.2017 B. Rauschenbach*, Ch. Grüner, T. Karabacak, I. Abdulhalim Sculptured thin films by low energy ion beam sputtering 20th Int. Conf. on Surface Modification of Materials by Ion Beams, Lisboa, Portugal, 10.-14.07.2017 B. Rauschenbach*, S. Liedtke, Ch. Grüner Constructive route to prepare nanostructures on surfaces by low-energy ion beam sputtering 25th Intern. Conference on Nanotechnology, Rom, 16.-22.07.2017 B. Rauschenbach*, F. Frost, Ch. Grüner, I. Abdulhalim, T. Karabacak Surface engineering by low-energy ion bombardment 20th International Summer School on Vacuum, Electron and Ion Technologies, VEIT 2017, Sozopol, Bulgaria, 25.-29.09.2017 B. Rauschenbach*, Ch. Grüner Sculptured thin films by ion beam sputtering Inter. Conference on Metallurgical Coatings and Thin Films, San Diego, 24.-28.04.2017 C. Richter Local and Non-Local Autoionization in Water and Solvent Clusters Young Investigators Workshop 2017, Helmholtz Virtual Institute, Grainau, 24.04.2017 C. Richter Non-Local Autoionization in Water Clusters Gordon Research Seminar, Chemistry and Physics of Liquids 2017, New Hampshire, USA, 05.08.2017 107

Presentations K. Zimmer*, L. Bayer, M. Ehrhardt, P. Lorenz, S. Pisoni, S. Buecheler Laser scribing of thin films for future photovoltaic applications 10. Mittweidaer Lasertage, Mittweida, 16.11.2017 K. Zimmer Tailored surfaces and thin films by beam-based technologies at the Leibniz Institute of Surface Engineering (IOM) Kick off meeting of the Joint International Lab, Nanjing, 29.11.2017 K. Zimmer Laser machining for integrated interconnection of thin film PV material Summer School on Ultra-short Pulse Lasers Applications in Material Processing, Vilnius, Lithuania, 07.07.2017 K. Zimmer*, L. Bayer, M. Ehrhardt, P. Lorenz, A. Braun, S. Pisoni, S. Buecheler, A. N. Tiwari Laser patterning of thin films for applications in photovoltaic EMRS Spring Meeting, Symp. X, Strassbourg, 22.-26.05.2017 K. Zimmer*, L. Bayer, P. Lorenz, M. Ehrhardt Ultra-precise processing by pulsed laser radiation for functional optical surfaces 3dr International Summer School, Trends in Energy and Particle Beam Ultra-precision Optical Surface Engineering, Leipzig, 30.08.2017 V. Zviagin*, Y. Kumar, P. Huth, I. Lorite, A. Setzer, D. Spemann, J. Meijer, R. Denecke, P. Esquinazi, M. Grundmann, R. Schmidt-Grund Optical Investigation of Structural Disorder in Normal Spinel Ferrites in Relation to Magnetic Properties Frühjahrstagung der DPG, Dresden, 19.-24.03.2017 109

Posters M. Fazio, D. Manova, D. Hirsch, E. Valcheva, S. Mändl*, A. Márquez Characterization of hydrogen-free amorphous carbon films by filtered vacuum arc on stainless steel 15th Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 K. Fischer*, A. Abdul Latif, A. Schulze Direct formation of TiO2 nanoparticles on a PVDF membrane: Optimization of synthesis 16th Aachener Membran Kolloquium, Aachen, 02.-03.11.2016 P. Frach, D. Glöss, H. Bartzsch, T. Goschurny, A. Drescher, C. Gottfried, J.S. Liebig, J. Hartung, A. Heisig, H. Grune, L. Leischnig, H. Neumann, C. Bundesmann Precision Optical Coatings on Large Substrates by Reactive Magnetron Sputtering Optical Interference Coatings (OIC), Tucson, Arizona, USA, 19.-24.6.2016 A. Freyer*, M. Naumann, B. Rauschenbach, B. Abel, U. Helmstedt Laser-engravable UV curable coatings as an alternative print form surface for rotogravure printing 4th European Symposium of Photopolymer Science (ESPS 2016), Leipzig, 11.-14.09.2016 S. Friebe*, S. Weigel, M. Francke, M. Zink, S. G. Mayr TiO2 Nanotubes for Long-Term Organotypic Culture of Adult Retinal Tissue Meet and Leap Bridging Biotech and biodiv Research, Leipzig, 02.12.2016 S. Friebe*, S. Weigel, M. Francke, M. Zink, S. G. Mayr TiO2 Nanotubes for Long-Term Organotypic Culture of Adult Retinal Tissue Physics of Cancer, Leipzig, 04.-06.10.2016 S. Germer*, F. Pietag, J. Polak, T. Arnold Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 S. Glaß*, A. Schulze, B. Abel Preparation of Polyethylenglycol diacrylte Hydrogels for Photodynamic Therapy 4th European Symposium of Photopolymer Science (ESPS 2016), Leipzig, 11.-14.09.2016 S. Glaß*, A. Schulze, B. Abel Immobilization of Drugs for Photodynamic Therapy on Hydrogels Jahrestagung der Deutschen Gesellschaft für Biomaterialien, Aachen, 29.09.-01.10.2016 D. Glöß, T. Goschurny, A. Drescher, H. Bartzsch, P. Frach, A. Heisig, H. Grune, L. Leischnig, S. Leischnig, C. Bundesmann Large Area Precision Optical Coatings by Pulse Magnetron Sputtering 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 J. Griebel*, C. Hackl, C. Elsner, B. Abel Light Induced Wettability Changes in Poly(acrylate) Coatings 4th European Symposium of Photopolymer Science (ESPS 2016), Leipzig, 11.-14.09.2016 F. Haase*, D. Manova, S. Mändl, H. Kersten Investigations of Dynamic Effects in Plasma Immersion Ion Implantation using Calorimetric Probe and High Speed Camera Measurements 15th Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 F. Haase, D. Manova*, S. Mändl, H. Kersten Changing Secondary Electron Emission during PIII Processing 15th Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 C. Hackl, J. Griebel, C. Elsner* Radiation-induced polymerization techniques for the generation and modification of microsystem components 4th European Symposium of Photopolymer Science (ESPS 2016), Leipzig, 11.-14.09.2016 111

Posters D. Manova*, T. Czerwiec, S. Mändl Thermal Expansion Coefficient of Expanded Austenite in Stainless Steel and CoCr Alloy 15th Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, 12.-16.09.2016 G. Mirschel*, O. Daikos, K. Heymann T. Scherzer Determination of the Conversion in Thin Photopolymerized Acrylate Layers by Near-Infrared Reflection Spectroscopy 4th European Symposium of Photopolymer Science (ESPS 2016), Leipzig, 11.-14.09.2016 G. Mirschel*, O. Daikos, C. Steckert, T. Scherzer Hyperspectral Imaging Used for In-line Characterization of Surface Finishes on Textiles Conference in Spectral Imaging (IASIM-16), Chamonix, France, 02.-06.07.2016 G. Mirschel*, O. Daikos, C. Steckert, T. Scherzer In-line Analysis of Inside Adhesive Layers in Textile Laminates by NIR Chemical Imaging Conference in Spectral Imaging (IASIM-16), Chamonix, France, 02.-06.07.2016 M. Naumann*, A. Freyer, B. Rauschenbach, B. Abel, U. Helmstedt Direct laser ablation of polymers for a new printing technology International Exhibition and Conference for the Printed Electronics Industry (LOPEC), München, 05.-07.04.2016 O. Naumov*, S. Naumov, B. Abel, Á. Varga Activity and Stability of Functionalized Carbon Nanotubes in Solid Acid Fuel Cell Cathodes 229th ECS Meeting, San Diego, 29.05.-02.06.2016 O. Naumov*, S. Naumov, B. Abel, Á. Varga Degradation reaction pathways of N-, BN- and SN- graphene: A DFT study MRS Fall Meeting and Exhibit 2016, Boston, USA, 27.11.-02.12.2016 S. Naumov*, A. Kahnt, R. Flyunt, W. Knolle, S. Eigler, R. Hermann, B. Abel Quantum chemical modelling of free radical reduction of graphene oxide 8th International Conference on Molecular Electronics, Paris, France, 22.-26.09.2016 S. Naumov*, P. C. With, U. Helmstedt, A. Sobottka, A. Prager, U. Decker, L. Prager Molecular Modelling of Photochemical Conversion of Titanium(IV) ethoxide Ti(OEt)4 as Organometallic Precursors for Titania 4th European Symposium of Photopolymer Science, Leipzig, 11.-14.09.2016 P. Räcke*, D. Spemann, F.-J. Schmückle, W. Heinrich, S. Liedtke, J.W. Gerlach, B. Rauschenbach, J. Meijer Novel concept for deterministic ion implantation at the nano-scale DIADEMS Summer School, Cargèse, Corsica, 26.04.-06.05.2016 U. Roß, A. Lotnyk*, E. Thelander, B. Rauschenbach Real structure of highly oriented Ge-Sb-Te thin films investigated by Cs-corrected STEM 16th European Microscopy Congress, Lyon, France, 28.08.-02.09.2016 P. Schulze, F. P. Lohmann*, O. Naumov, M. Wagner, B. Abel, Á. Varga Facile, Scalable Synthesis of Platinum-CNT Composite Electrocatalyst for Solid Acid Fuel Cells 67th Annual Meeting of the International Society of Electrochemistry, Den Haag, 21.-26.08.2016 A. Schulze*, D. Breite, M. Went, A. Prager Surface Charge Electrostatic Interactions Dictate Membrane Fouling Permea and Melpro 2016, Prague, Czech Republic, 15.-19.5.2016 P. Schumacher*, J. W. Gerlach, S. Rauschenbach, B. Rauschenbach Setup for ion energy and ion mass selective hyperthermal ion-beam assisted deposition of ultra- thin nitride films DPG-Frühjahrstagung, Regensburg, 07.03.2016 113

Posters 2017 P.A. Atanasov, Ru.G. Nikov, N.N. Nedyalkov, N. Fukata, Ch. Grüner, B. Rauschenbach SERS analyse of samples produced by ion beam and laser deposition 20th Intern. Summer School Vacuum, Electron and Ion Technologies (VEIT 2017), Sozopol, Bulgaria, 25.-29.09.2017 J. Bauer*, F. Frost, Th. Arnold Effect of a moderating etching front in reactive ion beam figuring of optical aluminium surfaces DPG-Frühjahrstagung der Sektion Kondensierte Materie (SKM), Dresden, 19.-24.03.2017 J. Bauer*, F. Frost, Th. Arnold Planarization and pattern transfer at ultra-smooth aluminium surfaces DPG-Frühjahrstagung der Sektion Kondensierte Materie (SKM), Dresden, 19.-24.03.2017 L. Bayer, M. Ehrhardt, P. Lorenz, S. Pissoni, S. Buecheler, A. N. Tiwari, K. Zimmer* Studies on perovskite film ablation and scribing with ns, ps and fs laser pulses EMRS Spring Meeting, Symp. X, Strassbourg, 22.-26.05.2017 M. Behrens*, A. Lotnyk, J. Griebel, J. W. Gerlach, B. Rauschenbach Epitaxial Ge2Sb2Te5 Thin Films Prepared by Pulsed Laser Deposition Deposition, Epitaxy and Switching 20th Intern. Summer School Vacuum, Electron and Ion Technologies (VEIT 2017), Sozopol, Bulgaria, 25.-29.09.2017 C. Bundesmann*, T. Lautenschläger, R. Feder, M. Mateev, D. Spemann Ionenstrahlgestützte Schichtabscheidung: Zusammenhänge zwischen Prozessparametern, Teilchen- und Schichteigenschaften 12. Thementage Grenz- und Oberflächentechnik (ThGOT) und 5. Kolloquium Dünne Schichten in der Optik, Zeulenroda, 14.-16.03.2017 C. Bundesmann*, R. Feder, T. Lautenschläger, M. Mateev, D. Spemann Tailoring Thin Film Properties: Systematic Investigation of the Ion Beam Sputter Deposition Process Symposium on Optical Coatings for Laser Applications (OCLA), Buchs SG, Schweiz, 11.-13.04.2017 H.-F. Chang*, W.-C. Kao, W.-K. Yeung, K. Zimmer, J.-Y. Cheng Continuous trench micromachining on PMMA substrate using visible-LIBWE LPM 2017, Toyama, 29.05.2017 O. Daikos, K. Heymann*, T. Scherzer Characterization of Thickness and Conversion of Thick Pigmented UV-Curable Coatings by NIR Spectral Imaging International Conference on Near Infrared Spectroscopy (ICNIRS 2017), Copenhagen, 11.-15.06.2017 C. Elsner, C. Hackl, J. Griebel, B. Abel Combined image analysis and spatially-resolved MALDI-TOF-MS for the rapid detection of molecules in latent fingermarks and micro-particle assemblies Fraunhofer Life Science Symposium, Leipzig, 08.-09.11.2017 B. Bacci Fernandes*, S. Mändl, A. Ribeiro da Silva Junior, J.O. Rossi, M. Ueda Nano-characterization of PIII Treated 7075 Aluminum Alloy 19th International Conference on Aerospace, Mechanical, Automotive and Materials Engineering , Rome, Italy, 05.-06.03.2017 K. Fischer*, A. Gawel, D. Rosen, M. Krause, A. Abdul Latif, J. Griebel, A. Prager, A. Schulze Low Temperature Synthesis of Anatase/Rutile/Brookite TiO2 11th International Congress on Membranes and Membrane Processes, San Francisco, 29.07.-04.08.2017 115

Posters F. Koch*, D. Lehr, O. Schönbrodt, T. Glaser, R. Fechner, F. Frost Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching MNE 2017 - 43rd International Conference on Micro and NanoEngineering, Braga, Portugal, 18.-22.09.2017 A. Lehmann*, F. Pietag, Th. Arnold Plasma source diagnostics as risk evaluation for application as medical device in dentistry 4th International workshop on Plasma Science and Entrepreneurship, Orléans, Centre International Universitaire pour la Recherche, 30.11.-01.12.2017 A. Lehmann*, J. Bauer, G. Böhm, Th. Arnold Plasma gestützte deterministische Dünnschichtabscheidung 12. Thementage Grenz- und Oberflächentechnik (ThGOT) und 5. Kolloquium Dünne Schichten in der Optik, Zeulenroda, 14.-16.03.2017 J. Lehnert*, D. Spemann, M. H. Hatahet, S. Mändl, M. Mensing, A. Finzel, A. Varga, B. Rauschenbach Large area graphene on silicon by carbon ion implantation in copper and subsequent transfer DPG-Tagung 2017, Dresden, 23.03.2017 J. Lehnert*, D. Spemann, M. H. Hatahet, S. Mändl, M. Mensing, A. Finzel, A. Varga, B. Rauschenbach Graphene on silicon dioxide via carbon ion implantation in copper with PMMA-free transfer European Conference on Molecular Electronics, Dresden, 29.08.-02.09.2017 F. P. Lohmann*, P. S. C. Schulze, M. Wagner, O. Naumov, B. Abel, A. Varga Towards quantification of the active surface area in high-performance solid acid fuel cell electrodes GDCh-Wissenschaftsforum Chemie, Berlin, 10.-14.09.2017 P. Lorenz, I. Zagoranskiy*, M. Ehrhardt, L. Bayer, K. Zimmer Periodical nanostructuring of dielectric surfaces using ns IR laser radiation of varying pulse length DPG Fühjahrstagung Condensed Matter, Dresden, 21.03.2017 P. Lorenz, I. Zagoranskiy, F. Frost, L. Bayer, M. Ehrhardt, K. Zimmer* Periodical nanostructuring of dielectric surfaces using time-modulated nanosecond IR laser radiation) EMRS Spring Meeting; Symp. T, Strassbourg, 22.-26.05.2017 A. Mayer, J. Rond, J. Staabs, D. Blenskens, C. Steinberg, M. Papenheim, H.-C. Scheer, J. Zajadacz, K. Zimmer Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN 2017, Orlando, Lake Buena Vista, USA, 31.05.2017 M. Mensing*, P. Schumacher, J.W. Gerlach, S. Rauschenbach, I. Cermak, B. Rauschenbach Performance characterization of a custom quadrupole setup for the creation of an energy and mass selective hyperthermal ion beam DPG Frühjahrstagung 2017, Dresden, Germany, 22.03.2017 G. Mirschel, O. Daikos*, K. Heymann, T. Scherzer Monitoring of the Conversion in Very Thin UV-Cured Layers Using NIR Spectroscopy International Conference on Near Infrared Spectroscopy (ICNIRS 2017), Copenhagen, 11.-15.06.2017 S. Naumov, O. Naumov, B. Abel, A. Varga Computational and Experimental Study on the Stability of N-, BN-and SN-graphene 13th International Symposium on Functional p-Electron Systems (Fp-13), Hong-Kong, 03.-10.06.2017 A. Nikolov*, T. Koutzarova, R. Nikov, N. Nedyalkov, P. Peneva, D. Karashanova, D. Kovacheva, J.W. Gerlach, B. Rauschenbach Laser ablation in water for fabrication of hexaferrite colloids 20th Int. Summer School Vacuum, Electron and Ion Technologies (VEIT 2017), Bulgaria, 25.-29.09.2017 117

Posters C. Zlomke, W. Knolle*, K. Mäder Impact of sterilization via beta irradiation on properties and release of nifedipine loaded PLGA millirods 4th Congress on Innovation in Drug Delivery, Site-Specific Drug Delivery, Antibes-Juan-le-Pins, France, 25.-28.09.2017 V. Zviagin*, Y. Kumar, P. Huth, I. Lorite, A. Setzer, D. Spemann, K. Fleischer, J. Meijer, R. Denecke, P. Esquinazi, M. Grundmann, R. Schmidt-Grund Spectroscopic Ellipsometry as a Method for Structural Investigation of Spinel Ferrite Thin Films Frühjahrstagung der DPG, Dresden, 19.-24.03.2017 119